The invention is directed to a sealed high intensity illumination device configured to receive a laser beam from a laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber includes a reflective chamber interior surface having a first parabolic contour and parabolic focal region, a second parabolic contour and parabolic focal region, and an interface surface. An ingress surface is disposed within the interface surface configured to admit the laser beam into the chamber, and an egress surface disposed within the interface surface configured to emit high intensity light from the chamber. The first parabolic contour is configured to reflect light from the first parabolic focal region to the second parabolic contour, and the second parabolic contour is configured to reflect light from the first parabolic contour to the second parabolic focal region.

A sterilizing lamp includes a discharge tube, a ground electrode part, a high-voltage electrode part, a safety cover, and a light shield. The discharge tube is filled with discharge gas for generating excimer light. The ground electrode part and the high-voltage electrode part generate discharge in the discharge tube to excite the discharge gas. The safety cover is made of an electrically insulating organic material and covers the high-voltage electrode part. The light shield is made of an electrically insulating inorganic material and intervenes between the discharge tube and the safety cover to block the excimer light traveling from the discharge tube toward the safety cover.

The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber having several gas-filled plasma chambers (11, 12), wherein the chamber has at least one area (37, 39) transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited.

The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber having several gas-filled plasma chambers (11, 12), wherein the chamber has at least one area (37, 39) transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited.

A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.

A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.

An excimer lamp includes a housing portion having a sealed internal space, an internal electrode, and a discharge gas with which the internal space is filled. One end side of the internal electrode is electrically connected to a power supply member provided with a metal foil electrically connected to the internal electrode and is sealed together with the power supply member to one end side of the housing portion via a sealing portion. The other end side of the internal electrode protrudes into the internal space. A protrusion length, being a length of the internal electrode in the internal space and a length from one end of the internal space to the other end of the internal electrode, is equal to or less than a length from the other end of the internal electrode to the other end of the internal space in a direction along the axis.

An excimer lamp includes a dielectric tube, an end cap, a conductive hollow tube, and an electrode grid. The dielectric tube has a closed end and an open end, and defines a cavity. The end cap sealingly covers the open end. The conductive hollow tube passes through the end cap and into the cavity of the dielectric tube, with a volume defined between an exterior surface of the conductive hollow tube and an interior surface of the dielectric tube. The volume is configured to hold a gas. The electrode grid is disposed on an exterior surface of the dielectric tube.

An excimer lamp includes a first electrode, a dielectric plate, and a second electrode. The dielectric plate has a first side and a second side opposite the first side. The dielectric plate is spaced a distance from the first electrode to define a volume configured to hold a gas. The first side of the dielectric plate is oriented toward the first electrode. The second electrode is oriented toward the dielectric plate, wherein the dielectric plate is interposed between the first electrode and the second electrode.

A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.