A cooling system and method for using the cooling system are described. The cooling system includes a plurality of individual piezoelectric cooling elements spatially arranged in an array extending in at least two dimensions, a communications interface and driving circuitry. The communications interface is associated with the individual piezoelectric cooling elements such that selected individual piezoelectric cooling elements within the array can be activated based at least in part on heat energy generated in the vicinity of the selected individual piezoelectric cooling elements. The driving circuitry is associated with the individual piezoelectric cooling elements and is configured to drive the selected individual piezoelectric cooling elements.

In an embodiment, a system includes: a tool port of a semiconductor processing tool; a processing port with an internal processing port location and an external processing port location; a robot configured to move a die vessel between the internal processing port location and the tool port; and an actuator configured to move the die vessel between the internal processing port location and the external processing port location.

In an embodiment, a system includes: a tool port of a semiconductor processing tool; a processing port with an internal processing port location and an external processing port location; a robot configured to move a die vessel between the internal processing port location and the tool port; and an actuator configured to move the die vessel between the internal processing port location and the external processing port location.

Embodiments include semiconductor packages and methods to form the semiconductor packages. A semiconductor package includes a plurality of first dies on a substrate, an interface layer over the first dies, a backside metallization (BSM) layer directly on the interface layer, where the BSM layer includes first, second, and third conductive layer, and a heat spreader over the BSM layer. The first conductive layer includes a titanium material. The second conductive layer includes a nickel-vanadium material. The third conductive layer includes a gold material, a silver material, or a copper material. The copper material may include copper bumps. The semiconductor package may include a plurality of second dies on a package substrate. The substrate may be on the package substrate. The second dies may have top surfaces substantially coplanar to top surface of the first dies. The BSM and interface layers may be respectively over the first and second dies.

A thermal interface material (TIM) structure for directing heat in a three-dimensional space including a TIM sheet. The TIM sheet includes a lower portion along a lower plane; a first side portion along a first side plane; a first upper portion along an upper plane; a first fold between the lower portion and the first side portion positioning the first side portion substantially perpendicular to the lower portion; and a second fold between the first side portion and the first upper portion positioning the first upper portion substantially perpendicular to the first side portion and substantially parallel to the lower portion.

A semiconductor package is provided. The semiconductor package includes a segmented inset lid that is divided into a primary component and one or more secondary components, with each secondary component being coupled to the primary component by a compliant liquid-tight adhesive; wherein the primary component is a continuous region including i) a first surface, ii) a second surface, and iii) a boundary surface, the first surface including one or more integrated heat sink surfaces or one or more routing features to promote coolant distribution, the second surface contacting one or more semiconductor dies, and the boundary surface forming a sealing surface with a semiconductor substrate; wherein each secondary component contacts at least one other semiconductor die and forms a water-tight seal with the primary component; and a removable flow cover coupled with the segmented inset lid to form a seal along the boundary surface.

Provided is a semiconductor package having a package housing in an engraved surface form and a method of manufacturing the same, wherein the semiconductor package includes: at least one substrate on which at least one semiconductor chip is installed; at least one terminal lead electrically connected to the substrates; electrical connectors for connecting the semiconductor chips to the substrates or the terminal leads; a package housing covering the semiconductor chips, the electrical connectors, and the at least one substrate; at least one stopper which is formed of a material same as that of the package housing, is higher by a certain height than exposed surfaces of the substrates, is disposed on the exposed surfaces of the substrates, or covers at least a part of the exposed surfaces; and at least one heat sink transmitting heat from the semiconductor chips and radiating heat, wherein the at least a part of the exposed surfaces of the at least one substrate is formed on the upper surface, the lower surface, or the upper and lower surfaces of the package housing and the exposed surfaces of the at least one substrate are joined to the heat sinks by using heat transfer connectors interposed therebetween. Accordingly, the full thickness of the heat transfer connectors may be uniformly maintained.

A semiconductor device module includes a device mounted on the surface of an organic substrate; a heat dissipation block bonded and fixed to the surfaces of the device; and a molded resin sealing the device with at least one surface of the heat dissipation block being exposed. The heat dissipation block includes a first portion and a second portion made of materials different in hardness: the first portion is harder than the second portion, and a gradient in hardness from the first portion on the side exposed from the molded resin to the second portion on the side bonded to the device, to keep a good grinding performance of grinding wheel.

Embodiments include an electronic system and methods of forming an electronic system. In an embodiment, the electronic system may include a package substrate and a die coupled to the package substrate. In an embodiment, the electronic system may also include an integrated heat spreader (IHS) that is coupled to the package substrate. In an embodiment the electronic system may further comprise a thermal interface pad between the IHS and the die. In an embodiment the die is thermally coupled to the IHS by a liquid metal thermal interface material (TIM) that contacts the thermal interface pad.

A system can be designed with memory to operate in a low temperature environment. The low temperature memory can be customized for low temperature operation, having a gate stack to adjust a work function of the memory cell transistors to reduce the threshold voltage (Vth) relative to a standard memory device. The reduced temperature can improve the conductivity of other components within the memory, enabling increased memory array sizes, fewer vertical ground channels for stacked devices, and reduced operating power. Based on the differences in the memory, the memory controller can manage access to the memory device with adjusted control parameters based on lower leakage voltage for the memory cells and lower line resistance for the memory array.