H01L29/20

SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING SEMICONDUCTOR STRUCTURE
20230007832 · 2023-01-12 ·

Embodiments relate to the field of semiconductor technology, and propose a semiconductor structure and a method for fabricating a semiconductor structure. The semiconductor structure includes: a channel layer including a group III-V semiconductor and a group III-V semiconductor layer, the group III-V semiconductor and the group III-V semiconductor layer forming a heterojunction; a gate structure positioned on the channel layer, the gate structure including a gallium oxide layer, a gate oxide layer, and a gate electrode stacked in sequence; a source electrode positioned at an end of the heterojunction; and a drain electrode positioned at other end of the heterojunction.

COMPENSATION OF TRAPPING IN FIELD EFFECT TRANSISTORS

A circuit includes a field effect transistor (FET), a reference transistor having an output coupled to an output of the FET, an active bias circuit coupled to the reference transistor and configured to generate an input signal for the reference transistor in response to a change in drain current of the reference transistor due to carrier trapping and to apply the input signal to an input of the reference transistor, and a summing node coupled to an input of the FET and to the input of the reference transistor. The summing node adds the input signal to an input signal of the FET to compensate the carrier trapping effect.

Method of implanting dopants into a group III-nitride structure and device formed

A method including forming a III-V compound layer on a substrate and implanting a main dopant in the III-V compound layer to form source and drain regions. The method further includes implanting a group V species into the source and drain regions. A semiconductor device including a substrate and a III-V compound layer over the substrate. The semiconductor device further includes source and drain regions in the III-V layer, wherein the source and drain regions comprises a first dopants and a second dopant, and the second dopant comprises a group V material.

Wireless transmitter with improved thermal management

A high efficiency satellite transmitter comprises an RF amplifier chip in thermal contact with a radiant cooling element via a heat conducting element. The RF amplifier chip comprises an active layer disposed on a high thermal conductivity substrate having a thermal conductivity greater than about 1000 W/mK, maximizing heat conduction out of the RF amplifier chip and ultimately into outer space when the chip is operating within a satellite under normal transmission conditions. In one embodiment, the active layer comprises materials selected from the group consisting of GaN, InGaN, AlGaN, and InGaAlN alloys. In one embodiment, the high thermal conductivity substrate comprises synthetic diamond.

MANUFACTURE OF GROUP IIIA-NITRIDE LAYERS ON SEMICONDUCTOR ON INSULATOR STRUCTURES
20180005815 · 2018-01-04 ·

A method is provided for forming Group IIIA-nitride layers, such as GaN, on substrates. The Group IIIA-nitride layers may be deposited on mesa-patterned semiconductor-on-insulator (SOI, e.g., silicon-on-insulator) substrates. The Group IIIA-nitride layers may be deposited by heteroepitaxial deposition on mesa-patterned semiconductor-on-insulator (SOI, e.g., silicon-on-insulator) substrates.

METHOD FOR HOMOGENIZING THE HEIGHT OF A PLURALITY OF WIRES AND DEVICE USING SUCH WIRES
20180002169 · 2018-01-04 ·

A method for homogenizing the height of a plurality of wires from the plurality of wires erected on a face of a substrate, the method including a first step of coating the face of the substrate including the plurality of wires with a first film, the first film embedding the plurality of wires over a first height; a second step of coating the first film with a second film, the second film embedding at least one part of the plurality of wires over a second height; a step of removing the second film, the part of the wires of the plurality of wires embedded in the second film being removed at the same time as the second film, a mechanical stress between the first film and the second film being exerted during the removal step.

LAYER STRUCTURE FOR A GROUP-III-NITRIDE NORMALLY-OFF TRANSISTOR
20180012985 · 2018-01-11 · ·

A layer structure for a normally-off transistor has an electron-supply layer made of a group-III-nitride material, a back-barrier layer made of a group-III-nitride material, a channel layer between the electron-supply layer and the back-barrier layer, made of a group-III-nitride material having a band-gap energy that is lower than the band-gap energies of the other layer mentioned. The material of the back-barrier layer is of p-type conductivity, while the material of the electron-supply layer and the material of the channel layer are not of p-type conductivity, the band-gap energy of the electron-supply layer is smaller than the band-gap energy of the back-barrier layer. In absence of an external voltage a lower conduction-band-edge of the third group-III-nitride material in the channel layer is higher in energy than a Fermi level of the material in the channel layer.

METHODS FOR FORMING BIPOLAR TRANSISTORS HAVING COLLECTOR WITH GRADING
20180012978 · 2018-01-11 ·

This disclosure relates to methods for forming bipolar transistors, such as heterojunction bipolar transistors, having at least one grading in the collector. In some embodiments, the methods include forming a sub-collector. In some embodiments the methods include forming a primary collector region with at least one grading having a doping concentration that decreases away from the sub-collector. In some embodiments the methods further include forming a secondary collector region to abut a base of the bipolar transistor and having a doping concentration of at least about 3×10.sup.16 cm.sup.−3 at an interface with the base. Such bipolar transistors can be implemented, for example, in power amplifiers.

SEMICONDUCTOR STRUCTURE HAVING A GROUP III-V SEMICONDUCTOR LAYER COMPRISING A HEXAGONAL MESH CRYSTALLINE STRUCTURE

A semiconductor structure (100) comprising: a substrate (102), a first layer (106) of Al.sub.XGa.sub.YIn.sub.(1−X−Y)N disposed on the substrate, stacks (107, 109) of several second and third layers (108, 110) alternating against each other, between the substrate and the first layer, a fourth layer (112) of Al.sub.XGa.sub.YIn.sub.(1−X−Y)N, between the stacks, a relaxation layer of AlN disposed between the fourth layer and one of the stacks, and, in each of the stacks: the level of Ga of the second layers increases from one layer to the next in a direction from the substrate to the first layer, the level of Ga of the third layers is constant or decreasing from one layer to the next in said direction, the average mesh parameter of each group of adjacent second and third layers increasing from one group to the next in said direction, the thickness of the second and third layers is less than 5 nm.

SEMICONDUCTOR STRUCTURE HAVING A GROUP III-V SEMICONDUCTOR LAYER COMPRISING A HEXAGONAL MESH CRYSTALLINE STRUCTURE

A semiconductor structure (100) comprising: a substrate (102), a first layer (106) of Al.sub.XGa.sub.YIn.sub.(1−X−Y)N disposed on the substrate, stacks (107, 109) of several second and third layers (108, 110) alternating against each other, between the substrate and the first layer, a fourth layer (112) of Al.sub.XGa.sub.YIn.sub.(1−X−Y)N, between the stacks, a relaxation layer of AlN disposed between the fourth layer and one of the stacks, and, in each of the stacks: the level of Ga of the second layers increases from one layer to the next in a direction from the substrate to the first layer, the level of Ga of the third layers is constant or decreasing from one layer to the next in said direction, the average mesh parameter of each group of adjacent second and third layers increasing from one group to the next in said direction, the thickness of the second and third layers is less than 5 nm.