A coherent light source provides spontaneous emission (Dicke superradiance/subradiance) using a dilute and optically thin cloud of disordered atoms. The coherent light source provides improved noise statistics over that of a laser and, accordingly, may be used in sensitive interferometric applications such as light gyroscopes.

A laser light source is provided including an airtight container. A first resonance mirror and a second resonance mirror are disposed outside the airtight container. The first resonance mirror includes a lens unit and a reflection coating layer. The lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface.

An electromagnetic radiation steering mechanism An electromagnetic radiation steering mechanism configured to steer electromagnetic radiation to address a specific location within a two-dimensional field of view comprising a first optical element having an associated first actuator configured to rotate the first optical element about a first rotational axis to change a first coordinate of a first steering axis in the two-dimensional field of view, a second optical element having an associated second actuator configured to rotate the second optical element about a second rotational axis to change a second coordinate of a second steering axis in the two-dimensional field of view, and an electromagnetic radiation manipulator optically disposed between the first and second optical elements. A first angle is defined between the first and second rotational axes and a second angle is defined between the first and second steering axes. The electromagnetic radiation manipulator is configured to introduce a difference between the first angle and the second angle.

An electromagnetic radiation steering mechanism An electromagnetic radiation steering mechanism configured to steer electromagnetic radiation to address a specific location within a two-dimensional field of view comprising a first optical element having an associated first actuator configured to rotate the first optical element about a first rotational axis to change a first coordinate of a first steering axis in the two-dimensional field of view, a second optical element having an associated second actuator configured to rotate the second optical element about a second rotational axis to change a second coordinate of a second steering axis in the two-dimensional field of view, and an electromagnetic radiation manipulator optically disposed between the first and second optical elements. A first angle is defined between the first and second rotational axes and a second angle is defined between the first and second steering axes. The electromagnetic radiation manipulator is configured to introduce a difference between the first angle and the second angle.

A gas laser according to an embodiment includes a gas serving as a laser medium, a thermal radiation source having wavelength selectivity and configured to emit excitation light for excitation of the gas by thermal radiation, and an optical resonator for causing emission light emitted from the gas in response to the excitation light to resonate.

A gas laser according to an embodiment includes a gas serving as a laser medium, a thermal radiation source having wavelength selectivity and configured to emit excitation light for excitation of the gas by thermal radiation, and an optical resonator for causing emission light emitted from the gas in response to the excitation light to resonate.

A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.

A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.

A control device that can apply a laser oscillator control device to various types of systems. The control device includes an analog signal input unit configured to receive an output control signal for controlling a laser output of the laser oscillator or a mode control signal for controlling an operation mode of the laser oscillator as an analog signal; a digital signal input unit configured to receive the output control signal or the mode control signal as a digital signal; and a controller configured to transmit a laser command for controlling the laser output to the laser oscillator in response to the output control signal received by the analog signal input unit or the digital signal input unit, and transmit an operation command for operating the laser oscillator to the laser oscillator in the operation mode in response to the mode control signal received by the analog signal input unit or the digital signal input unit.

Methods and apparatus for processing a substrate. For example, a processing chamber can include a power source, an amplifier connected to the power source, comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, and configured to amplify a power level of an input signal received from the power source to heat a substrate in a process volume, and a cooling plate configured to receive a coolant to cool the amplifier during operation.