H01S3/10046

Laser applying mechanism
11027371 · 2021-06-08 · ·

A laser applying mechanism which has a laser oscillator adapted to oscillate a pulsed laser and to emit a linearly polarized pulsed laser beam. The laser applying mechanism includes: a polarization plane composing unit adapted to selectively synthesize a pulsed laser beam having a second polarization plane rotated by 90 degrees with respect to a pulsed laser beam having a first polarization plane which is emitted from the laser oscillator; an amplifier adapted to amplify a power of the pulsed laser beam composed by the polarization plane composing unit; and a pulsed laser beam extracting unit adapted to extract a pulsed laser beam having a polarization plane to be utilized, from among the pulsed laser beam having the first polarization plane and the pulsed laser beam having the second polarization plane which are contained in the pulsed laser beam amplified by the amplifier.

Laser device and extreme ultraviolet light generation device using delay determination at a shutter
11006511 · 2021-05-11 · ·

A laser device includes: a master oscillator (100) configured to output a pulse laser beam (L) based on a light emission trigger signal (S21); a delay circuit (153) configured to generate a switching signal (S10) after a predetermined delay time has elapsed since reception of the light emission trigger signal (S21); a high voltage switch (304) configured to generate a high voltage pulse based on the switching signal (S10); an optical shutter (32k) positioned on the optical path of the pulse laser beam (L) and driven based on the high voltage pulse; and a high voltage monitor (151) configured to detect the high voltage pulse and transmit a high voltage pulse sensing signal (S6) to the delay circuit (153). The delay circuit (153) determines the delay time based on the light emission trigger signal (S21) and the high voltage pulse sensing signal (S6).

SYSTEMS AND METHODS FOR CONTROLLING LASER PULSING

Techniques are provided for controlling an output laser pulse signal of a medical device. A control device defines a time duration of capacitive discharge to a laser device. The time duration corresponds to an intended energy of the output laser pulse signal. The control device generates a plurality of sub-pulse control signals. The sub-pulse control signals define a series of capacitive discharge events of the capacitor bank. The control device modulates one or more of a sub-pulse control signal period or a sub-pulse time duration of the sub-pulse control signals to modify the capacitive discharge of the capacitor bank to the laser device during the time duration.

Compact mode-locked laser module

Apparatus and methods for producing ultrashort optical pulses are described. A high-power, solid-state, passively mode-locked laser can be manufactured in a compact module that can be incorporated into a portable instrument. The mode-locked laser can produce sub-50-ps optical pulses at a repetition rates between 200 MHz and 50 MHz, rates suitable for massively parallel data-acquisition. The optical pulses can be used to generate a reference clock signal for synchronizing data-acquisition and signal-processing electronics of the portable instrument.

Laser Module and Methods Thereof
20230420907 · 2023-12-28 ·

Disclosed are laser modules for laser systems and methods thereof that expand options for clinicians when using lasers in medical procedures such as holmium lasers in urological procedures. A laser module includes independently drivable laser-producing assemblies, laser optics, and a driver for driving the laser-producing assemblies. Each laser-producing assembly includes an optical resonator having a gain medium set among resonator optics for directing light through the gain medium for amplification of the light by stimulated emission. The laser optics combines two or more input laser beams produced by the laser-producing assemblies into a combined laser beam having a pulse energy, a pulse width, or a pulse repetition frequency resulting from a combination of the two-or-more input laser beams. The laser optics also directs at least a portion of the combined laser beam through an outlet of the laser module as an output laser beam.

ULTRASHORT PULSE LASER SYSTEM HAVING A QUICKLY TUNABLE CENTRAL WAVELENGTH
20210033945 · 2021-02-04 ·

The present invention relates to a system and method for generating wavelength-tunable laser output pulses using parametric processes, wherein a simultaneous and tuned tuning of the pump pulse wavelength and repetition rate ensures a temporal overlap between pump and seed pulses in a parametric gain medium. Based on this parameter coupling, lasers with a wide tunable wavelength range can be obtained, which can be fully fiber-based and which are also suitable for modern nonlinear microscopy or fluorescence microscopy due to a particularly fast response.

Optical feedback-based repetitive frequency adjustable optical frequency comb

The present invention provides a repetition frequency-tunable optical frequency comb generated by basis of optical feedback. The optical frequency comb comprises a single-frequency laser resonant cavity, a wavelength division multiplexer, a single-mode semiconductor pump light source, an optical circulator, a first optical fiber coupler, a second optical fiber coupler, a photoelectric detector, a highly-stable signal source, an error signal processing system, a laser frequency modulation device and a tunable laser-delay module. The present invention performs delay-time processing to the single-frequency laser by the tunable laser-delay module, and achieves an optical feedback by the optical circulator for injecting to the resonant cavity, generating a series of tunable laser longitudinal modes with equal frequency space. Meanwhile, in combination with the highly-stable signal source, the error signal processing system and the laser frequency modulation device, a laser frequency lock is achieved, and the laser frequency comb is generated. The invention obtains a repetition frequency-tunable laser frequency comb with a simple and practical method, having an extensive application prospect and huge application value in fields such as optical fiber sensing and spectroscopy of atom and molecule.

LITHOGRAPHY SYSTEM BANDWIDTH CONTROL
20210021094 · 2021-01-21 ·

Methods and apparatus for controlling laser firing timing and hence bandwidth in a laser capable of operating at any one of multiple repetition rates.

SPECTRAL FEATURE SELECTION AND PULSE TIMING CONTROL OF A PULSED LIGHT BEAM

A method includes driving, while producing a burst of pulses at a pulse repetition rate, a spectral feature adjuster among a set of discrete states at a frequency correlated with the pulse repetition rate; and in between the production of the bursts of pulses (while no pulses are being produced), driving the spectral feature adjuster according to a driving signal defined by a set of parameters. Each discrete state corresponds to a discrete value of a spectral feature. The method includes ensuring that the spectral feature adjuster is in one of the discrete states that corresponds to a discrete value of the spectral feature of the amplified light beam when a pulse in the next burst is produced by adjusting one or more of: an instruction to the lithography exposure apparatus, the driving signal to the spectral feature adjuster, and/or the instruction to the optical source.

Laser apparatus and extreme ultraviolet light generating system
10897118 · 2021-01-19 · ·

The laser apparatus includes a master oscillator, an amplifier, a power source, and a controller to control the power source. The controller controls the power source such that an excitation intensity of the amplifier in a burst oscillation period performing the burst oscillation is a first excitation intensity, controls the power source such that, if the predetermined repetition frequency is a first repetition frequency, an excitation intensity of the amplifier in a suspension period suspending the burst oscillation is a second excitation intensity equal to or lower than the first excitation intensity, and controls the power source such that, if the predetermined repetition frequency is a second repetition frequency higher than the first repetition frequency, the excitation intensity of the amplifier in the suspension period is a third excitation intensity lower than the second excitation intensity.