A high-precision repetition rate locking apparatus for an ultra-fast laser pulse includes: an electronic controlling component comprising: a standard clock, configured to provide a high-precision frequency standard; a pulse generator (PG), configured to provide an electrical pulse signal with adjustable repetition rate, pulse width and voltage magnitude; and a signal generator (SG), connected to the standard clock and the PG, and configured to provide a stable frequency signal for the PG, a phase-shift adjusting component, connected to the electronic controlling component and configured to implement phase modulation through electrically induced refractive index change; a resonant cavity component, comprising a phase shifter, a doped fiber, a laser diode, a wavelength division multiplexer and a reflector, and configured to generate a mode-locked pulse; and a detection system, configured to measure a repetition rate of an output pulse.

A method of generating an optical pulse train using spectral extension by optical phase modulation, spectral narrowing by optical phase demodulation, and narrow linewidth optical filtering is disclosed. It is also described that the wavelength selection of light using a chromatic dispersion element between the optical phase modulator can enrich the method. Systems include an in-line optical setup and a ring-type laser cavity for mode-locked laser outputs. The duration with which the electrical signals driving the modulators are opposed determines the line width of the optical pulses, and the opposite repetition of the electrical signals defines the rate of repetition of an optical pulse train generated. Four different arrangements of electrical signals in the time domain or phase domain make it possible to control the generation of optical pulses and the wavelength selection of the light. (i) A signal arrangement comprising sinusoidal electrical signals with a slight frequency difference. (ii) A signal arrangement comprising a phase-shift between electrical signals. (iii) A signal arrangement comprising a phase-shift between electrical signals depending on the amplitude of the bits. (iv) A signal arrangement comprising random electric waves that repeat themselves over a predefined period to allow the insertion of controllable time delays between each other.

A method of generating an optical pulse train using spectral extension by optical phase modulation, spectral narrowing by optical phase demodulation, and narrow linewidth optical filtering is disclosed. It is also described that the wavelength selection of light using a chromatic dispersion element between the optical phase modulator can enrich the method. Systems include an in-line optical setup and a ring-type laser cavity for mode-locked laser outputs. The duration with which the electrical signals driving the modulators are opposed determines the line width of the optical pulses, and the opposite repetition of the electrical signals defines the rate of repetition of an optical pulse train generated. Four different arrangements of electrical signals in the time domain or phase domain make it possible to control the generation of optical pulses and the wavelength selection of the light. (i) A signal arrangement comprising sinusoidal electrical signals with a slight frequency difference. (ii) A signal arrangement comprising a phase-shift between electrical signals. (iii) A signal arrangement comprising a phase-shift between electrical signals depending on the amplitude of the bits. (iv) A signal arrangement comprising random electric waves that repeat themselves over a predefined period to allow the insertion of controllable time delays between each other.

Described herein are methods for developing and maintaining pulses that are produced from compact resonant cavities using one or more Q-switches and maintaining the output parameters of these pulses created during repetitive pulsed operation. The deterministic control of the evolution of a Q-switched laser pulse is complicated due to dynamic laser cavity feedback effects and unpredictable environmental inputs. Laser pulse shape control in a compact laser cavity (e.g., length/speed of light <˜1 ns) is especially difficult because closed loop control becomes impossible due to causality. Because various issues cause laser output of these compact resonator cavities to drift over time, described herein are further methods for automatically maintaining those output parameters.

Provided is a swept light source including one end surface coupled to a wavelength filter constituted of a diffraction grating and an end mirror via a light deflector and another end surface including a gain medium facing an output coupling mirror and which configures a laser cavity between the end mirror and the output coupling mirror, wherein a drive voltage having an AC voltage on which a DC bias voltage is superimposed is output from a control voltage source of the light deflector to an electrode pair of an electro-optic crystal, light is radiated from a light emitter to the electro-optic crystal, and incident light from the gain medium incident along an optical axis perpendicular to a direction of an electric field formed by the control voltage is deflected in a direction parallel to the electric field, so that wavelength sweeping is performed.

Provided is a swept light source including one end surface coupled to a wavelength filter constituted of a diffraction grating and an end mirror via a light deflector and another end surface including a gain medium facing an output coupling mirror and which configures a laser cavity between the end mirror and the output coupling mirror, wherein a drive voltage having an AC voltage on which a DC bias voltage is superimposed is output from a control voltage source of the light deflector to an electrode pair of an electro-optic crystal, light is radiated from a light emitter to the electro-optic crystal, and incident light from the gain medium incident along an optical axis perpendicular to a direction of an electric field formed by the control voltage is deflected in a direction parallel to the electric field, so that wavelength sweeping is performed.

A tunable microwave source based on dual-wavelength lasing of a single optical whispering gallery microcavity includes a dual-wavelength laser having the single optical whispering gallery microcavity for generating dual-wavelength lasing with adjustable spacing, narrow linewidth and low threshold; an optical fiber or waveguide amplifier for optical signal amplification; an optical filter for optical signal and noise filtration; and a high-speed detector for generating a tunable microwave signal with narrow bandwidth. The dual-wavelength laser includes a pump source, the optical whispering gallery microcavity, an optical waveguide or a tapered optical fiber, a microcavity substrate, and a gold electrode pair. The frequency spacing of the dual-wavelength lasing is tuned by adjusting the external voltage of the gold electrode pair.

A method and apparatus for control of a dose of extreme ultraviolet (EUV) radiation generated by a laser produced plasma (LPP) EUV light source. Each laser pulse is modulated to be of a width that is determined to be sufficient to allow for extraction of a suitable uniform amount of energy in the laser source gain medium; in some embodiments the suitable uniform amount of energy to be extracted may be selected to avoid self-lasing. The EUV energy created by each pulse is measured and total EUV energy created by the fired pulses determined, and a desired energy for the next pulse is determined based upon whether the total EUV energy is greater or less than a desired average EUV energy times the number of pulses. The energy of the next pulse is modulated, either by modulating its magnitude or by modulating the amplification of the pulse by one or more amplifiers, but without decreasing the determined width of the laser pulse.

A WDM seed beam source for a fiber laser amplifier system that includes a number of master oscillators that generate seed beams at different wavelengths and a spectral multiplexer that multiplexes all of the seed beams onto a single fiber. An EOM modulates the combined seed beams on the single fiber and a spectral demultiplexer then separates the modulated seed beams into their constituent wavelengths on separate fibers before the seed beams are amplified and spectrally combined. The fiber laser amplifier system includes a separate fiber amplifier that amplifies the separated seed beams, an emitter array that directs the amplified beams into free space, beam collimating optics that focuses the uncombined beams, and an SBC grating responsive to the collimated uncombined beams that spatially combines the collimated uncombined beams.

A WDM seed beam source for a fiber laser amplifier system that includes a number of master oscillators that generate seed beams at different wavelengths and a spectral multiplexer that multiplexes all of the seed beams onto a single fiber. An EOM modulates the combined seed beams on the single fiber and a spectral demultiplexer then separates the modulated seed beams into their constituent wavelengths on separate fibers before the seed beams are amplified and spectrally combined. The fiber laser amplifier system includes a separate fiber amplifier that amplifies the separated seed beams, an emitter array that directs the amplified beams into free space, beam collimating optics that focuses the uncombined beams, and an SBC grating responsive to the collimated uncombined beams that spatially combines the collimated uncombined beams.