The system and method for a scalable optically pumped CO.sub.2 laser. The optically pumped CO.sub.2 laser having a Tm fiber laser configured to pump a Q-switched Ho laser that is configured to pump a molecular isotopologue mix of CO.sub.2 above atmospheric pressure, to produce a broadband, high energy, tunable output beam.

A laser light waveguide device includes laser light provision units that oscillate and cause laser light to exit; a laser light waveguide path formed of an optical fiber capable of guiding the laser light; and a control unit that controls the laser light provision units. The control unit detects an illumination spot (output of the visible laser light) based on a captured image, captured by an image capturing unit, of a laser light illumination area and an area close thereto illuminated with the laser light, and controls exit of the infrared laser light by the infrared laser light provision unit based on a result of detection of the illumination spot (output of the visible laser light).

A method of manufacturing a semiconductor includes generating plasma in an amplifying tube using gas as a gain medium; detecting a state of the plasma generated in the amplifying tube; determining a virtual laser gain based on the detected state of the plasma; controlling the state of the plasma such that the virtual laser gain is within a target range; and manufacturing the semiconductor device including performing an exposure process on a substrate using a laser beam output from the amplifying tube adjusted to have the virtual laser gain within the target range.

A Q-switched CO2 laser material processing system with acousto-optic modulators (AOM) is employed, on the one hand, inside the resonator for Q-switching the CO2 laser and, on the other hand, externally for efficient suppression of the radiation feedback between a laser and workpiece. The frequency shift of the radiation diffracted at the AOM is taken into account which exactly corresponds to the excitation frequency of the acoustic wave in the AOM crystal under the aspect of the amplification of the radiation in the active medium. Since this frequency shift significantly reduces the amplification of the radiation, it has to be avoided in the Q-switching process, which is achieved, by means of a tandem of two AOMs with identical excitation frequencies but with the acoustic waves propagating in opposite directions in the crystal. The frequency shift advantageously suppresses radiation feedback between the laser and workpiece.

A system, comprising an optical component that, in operational use of the optical component, optically interacts with a laser beam, an electrically conductive element disposed on or within the optical component that, in operational use of the optical component, is exposed to the laser beam, and a monitoring system operative to monitor a physical quantity representative of an electrical resistance of the electrically conductive element and to determine based on the physical quantity, a position of the laser beam relative to the optical component.

An example laser apparatus of the disclosure may include an oscillator capable of outputting a laser beam, a slab optical amplifier capable of amplifying the laser beam outputted by the oscillator by passing the laser beam through an optical amplification region shaped like a slab and outputting the amplified laser beam, and a mirror disposed on an optical path of the laser beam to enter the slab optical amplifier or the amplified laser beam outputted from the slab optical amplifier, the mirror being movable in a direction parallel to a plane where the laser beam travels in the slab optical amplifier.

Devices and methods for generating EUV light are disclosed. The device comprises an oscillator having an oscillator cavity length, L.sub.o, and defining an oscillator path and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, L.sub.combined, where L.sub.combined=(N+x)*L.sub.o, where “N” is an integer and “x” is a number between 0.4 and 0.6. The amplifier comprises a polarization discriminating optic inputting light traveling along a first beam path from the oscillator and having substantially a first linear polarization into the amplifier and outputting light having substantially a linear polarization orthogonal to the first polarization out of the amplifier along a second beam path.

There is provided a laser system having a cylindrically-shaped annular minor with at least one opening in its surface; a pair of planar metallic electrodes disposed proximate opposite edges of the annular mirror, normal to the axis of the annular minor, the electrodes configured to have an RF field applied between them; a pair of end minors disposed at said at least one opening; and a ceramic material in the form of a disc, disposed in the internal volume of the annular minor, the ceramic material having a series of channels formed therein such that they generate a zig-zag pathway in the ceramic material, wherein (i) the zig-zag path, when filled with a gain medium, (ii) the annular minor and (iii) the pair of end minors, together constitute a laser cavity.

Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.

A laser resonator comprising a specially designed front mirror 32. The front mirror 32 together with a rear mirror form a resonator cavity. As well as having a resonator cavity reflective surface 42, the front mirror 32 also has an output coupling reflective surface 44 which forms a continuation of the resonator cavity reflective surface 42 and extends at an angle thereto so as to direct a beam laterally out of the cavity. The output coupling reflective surface 44 and the resonator cavity reflective surface 44 are joined by a “soft” rounded edge 40 of arcuate cross-section, this rounded transition suppressing diffraction ripples that would otherwise be generated if the edge were “hard”, i.e. sharp.