The present disclosure relates to a power supply system for improving plasma uniformity and a method thereof, wherein the power supply system includes a signal generating device, a first electrode and a second electrode. The signal generator is respectively connected with a plurality of signal processing circuits and is used for generating a plurality of initial signals at different frequencies; the signal processing circuits are used for processing the initial signals at corresponding frequencies; the plurality of signal processing circuits are all connected with the first electrode; and the initial signals are processed by the signal processing circuits and then act on the plasma through the first electrode. The present disclosure may effectively process signals in different power supplies, improve the stability of plasma discharge, reduce the impact of the coupling effect between different power supplies, and realize the independent control of ion flux and ion energy.

Systems, devices, and methods are discussed relating to plasma sources using load current switch timing of zero volt switching resonant topology.

When a plasma processing apparatus changes processing parameters of a plasma processing that include at least a temperature of a stage and a temperature of each zone obtained by dividing a placing surface of the stage into multiple patterns, and measures the temperature of each zone and a supply current to a hater in a state where the temperature is stabilized, an acquisition unit acquires the measurement data. The generator generates a prediction model using the measurement data, assuming that heat with heat quantity proportional to a temperature difference between adjacent zones moves therebetween, heat with heat quantity proportional to a temperature difference between the stage and each zone moves therebetween, heat with heat quantity calculated from the supply current to the heater of each zone is input to the zone, and quantity of heat input and quantity of heat output in each zone are consistent.

The present invention provides an apparatus of charged-particle beam e.g. an electron microscope comprising a plasma generator for selectively cleaning BSE detector. In various embodiments, the plasma generator is located between a sample stage and a sample table having one or more openings or holes. The plasma generator generates plasma and distributes or dissipates the plasma through the openings of the sample table toward and onto surface of the BSE detector. Cleaning contaminants on the surface of the BSE detector frequently and selectively with in-situ generated plasma can prevent the detectors from performance deterioration such as losing resolution and contrast in imaging at high levels of magnification.

A plasma generating device utilizes a cold plasma to contain and direct a stream of electrons with a hand held nozzle to enhance healing of wounds and skin surface abnormalities, and to kill pathogens on skin surfaces in humans and animals wounds, abnormalities and pathogens.

The invention concerns a method for treating in an enclosure an inner surface of a container made from polymer material, in order to deposit a barrier-effect coating there, comprising: inserting the container into the enclosure introducing a so-called precursor gas intended into the container intended, once transformed into the plasma state, to be deposited at least partially on the inner surface of the container in order to constitute the coating, the method further comprising: transforming the precursor gas into the plasma state by a combination of excitations comprising a main excitation by means of electromagnetic waves of the microwave type, and a secondary excitation by means of an electrical discharge of alternating voltage having a frequency between 1 kHz and 15 MHz. The invention also relates to a device for implementing the method of the invention.

Provided are a system and method for sterilizing one or more medium via plasma exposure. The sterilization may be accomplished by exposing a respective medium to a given electrical field generated by electrodes disposed to target such medium, and through, optionally, further application of a magnetic field having a portion thereof disposed orthogonally to the generated electrical field.

There is provided an in-liquid plasma device including a tubular flow channel in which a liquid flow, and a cavitation generator and a voltage application unit which are disposed in the tubular flow channel. The cavitation generator generates cavitation in the liquid inside the tubular flow channel. The voltage application unit is located in the tubular flow channel so as to generate plasma by applying a voltage to the liquid in which the cavitation is generated. The cavitation generator has a throttle portion whose inner diameter is smaller than other sites in the tubular flow channel. The throttle portion has an upstream side inclined surface located on an upstream side of a narrowest site of the throttle portion, and a downstream side inclined surface located on a downstream side of the narrowest site of the throttle portion.

An instrument for thermal treatment of tissue (34), particularly for electrosurgical treatment and particularly for argon plasma coagulation, is disclosed. The instrument has an instrument body (25) extending between a proximal end (27) and a distal end (28). In an end section (38) adjoining a distal end (28) the instrument body (25) comprises at least one color mark (39) in a defined color. This color corresponds to the color of a treated tissue (34) that is created, if the dosage of an energy introduction for achieving a desired depth effect in the tissue (34) has been selected correctly. Preferably the instrument is configured as probe (17), particularly as endoscope probe and has a flexible bendable instrument body (25) that can be referenced as instrument hose (26).

An integrated gas-enhanced electrosurgical generator. The generator comprises a high frequency power module, a low frequency power module and a gas module. The high frequency power module adapted to generate an electrical energy having a band of frequencies centered around a first frequency, wherein the electrical energy has a first power as the first frequency and a second power lower than the first power at a second frequency lower than the first frequency. The low frequency power module having an input connected to an output of the high frequency module. The low frequency module comprises a resonant transformer comprising a ferrite core, a primary coil and a secondary coil, the secondary coil having a larger number of turns than the primary coil, wherein the resonant transformer has a resonant frequency equal to the second frequency. The gas module is adapted to control a flow of an inert gas.