Embodiments of a multi-cassette carrying case are provided herein. In some embodiments a method for transporting a substrate from a first processing device to a second processing device includes docking a substrate cassette to a first chamber; pumping down pressure in the substrate cassette; transferring a substrate through the first chamber to the substrate cassette; sealing the substrate cassette and moving the substrate cassette having the substrate disposed therein from the first chamber to a second chamber; docking the substrate cassette to the second chamber; and transferring the substrate from the substrate cassette through the second chamber.

A purge apparatus is a purge apparatus that purges an inside of a storage container in which a product is stored, with a purge gas. The purge apparatus includes a discharge pipe that connects to a discharge port of the storage container to discharge the purge gas inside the storage container, a meter that measures an exhaust flow rate that is a flow rate of the purge gas flowing through the discharge pipe when the purging is carried out, and a detector that determines whether the purging is satisfactory, based on the exhaust flow rate measured by the meter.

A packing article for the storage and/or transport of items and materials requiring high levels of cleanliness is described. Methods of making and using the packaging article are also described. The packaging article may be used to store or transport, for example, advanced optical components, or materials and components used in the manufacturing of microelectronic devices or optical components. A method of making the packaging article includes contacting the packaging article with organic solvent(s) and acidic solution(s) and rinsing with ultrapure water. Interior cleanliness levels for various contaminants, such as, metals, anionic materials, organic compounds, and particles may be verified and the packaging articles may be labeled and sorted according to cleanliness level.

The present disclosure discloses a panel fixing device, including a box, a pressing member and an expansion agent. The inner wall of the frame of the box is provided with a limiting groove, the pressing member is movably disposed in the limiting groove, the frame has a receiving through hole connecting with the limiting groove, the expansion agent is received in the receiving through hole, and the expansion agent is used for pushing the pressing member after being expanded so that the pressing member compresses the panel accommodated in the box. An injection channel of the expansion agent is reserved on the box. After inflating the expansion agent, the pressing member is pushed by the expansion force, so that the pressing member compresses the panel in the box to limit the panel so as to prevent the box from causing a second impact during the dropping process.

A liquid-crystal-glass packing case comprises a case body, which includes a bottom and side walls integrated connecting around the bottom, wherein, a filter screen assembly is fixed on the case body, and the case body is capable of communicating inside and outside by the filter screen assembly. Wherein, a slot is disposed at a gap arranged on the side walls, and the filter screen assembly is interposed in the slot. Also, a hole slot is penetrating from the side walls of the case body to the bottom, and the filter screen assembly is interposed in the hole slot to provide solid supporting efficiency. The invention also provides a moisture-proof packing structure. The invention overcomes a prejudice of moisture-proof and sealing from people, provides a thought of putting into and dispersing out, and applies a utility of liquid-crystal-glass packing case and moisture-proof packing structure to get a better moisture-proof efficiency.

A lead frame includes an outer frame. The outer frame includes: an upper surface; a lower surface that is opposite to the upper surface; a side surface between the upper surface and the lower surface; a first recess that is formed to extend from the upper surface to the side surface; a second recess that is formed to extend from the lower surface to the side surface; and a curved surface that is positioned between the side surface and a side wall of the first recess or between the side surface and a side wall of the second recess.

A packaging container for transporting ceramic substrates according to the present embodiment includes a bottom portion in a rectangular shape, and four side portions connected to four edges of the bottom portion respectively. Side protrusions having a height of 2 mm or more and protruding inward are provided on at least two opposite side portions among the four side portions. The bottom portion is provided with a bottom protrusion having a height of 2 mm or more and protruding inward.

The present disclosure provides a cache device and a LCD screen production line. The cache device provided by the present disclosure includes an outer frame having an opening for picking and placing cached items on a first side wall thereof and a support bracket for horizontally supporting cached items therein; and first blowing means disposed on the second side wall of the outer frame for blowing air toward the opening; second blowing means disposed on the third side wall or the fourth side wall of the outer frame; an exhaust means disposed on a fourth side wall opposite to the third side wall of the frame.

Provided is a glass substrate package (1), including a plurality of disc-shaped glass substrates (2) packaged in a box (3), in which the plurality of disc-shaped glass substrates (2) are stacked and packaged in a horizontal posture under a state in which slip sheets (4) are interposed between the plurality of disc-shaped glass substrates (2).

A reticle pod with antistatic capability includes a base and plural of support members. The base has a carrying surface having a recess formed thereon and defined by a bottom surface. The support members encircle the carrying surface of the base and are adapted to support a reticle. The recess is defined by a depth extending between the carrying surface and the bottom surface. The depth ranges from 300 ?m to 3400 ?m to thereby weaken the electrostatic force exerted upon particles on the carrying surface.