A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.

Provided is a tray including a plate including a first region and a second region, a first groove on the first region of the plate and to which a stub is fixed, and a second groove on the second region of the plate and to which a grid holder is fixed, wherein the stub is configured to store test wafer pieces, and wherein the grid holder is configured to store a test sample.

The inventive concept provides a sensor station. The sensor station includes a body providing an inner space for storing a substrate-type sensor; a power source unit installed at the body and configured to transmit a power to the substrate-type sensor; a processing unit installed at the body and configured to process a data measured by the substrate-type sensor; and a communication unit installed at the body and configured to exchange a data with the substrate-type sensor and a server of a substrate treating system.

A portable robotic semiconductor pod loader may detect, with at least one sensor, receipt of a semiconductor pod on a load port of the portable robotic semiconductor pod loader. The at least one sensor is supported by the load port. The portable robotic semiconductor pod loader may cause a robot, of the portable robotic semiconductor pod loader, to align with the semiconductor pod provided on the load port. The portable robotic semiconductor pod loader may cause the robot to attach to the semiconductor pod, and may cause the robot to provide the semiconductor pod from the load port to a staging area of a semiconductor processing tool.

A storage system includes an overhead stocker having a first overhead track, a rack including a plurality of storages arranged vertically, and a crane that travels along the first overhead track and delivers and receives an article to and from the storages; and an overhead transport vehicle system having a second overhead track provided below a lower end of the overhead stocker, and an overhead transport vehicle that travels along the second overhead track and delivers and receives an article to and from a predetermined transfer destination, wherein the first overhead track has an elevating track capable of supporting and lowering the crane that is stopped traveling at a portion deviated from the second overhead track in planar view.

A system and an operating method for automated wafer carrier handling are provided. The system includes a storage rack including a standby position and a storage position separated from each other, a first and second moving mechanism, and a controller operatively coupled to the first and second moving mechanism to control operations of the first and second moving mechanism. The storage position is for buffering a wafer carrier awaiting transfer to a load port. The first moving mechanism is movably coupled to the storage rack and provides at least one degree of freedom of movement to transfer the wafer carrier from the storage position to the standby position. The second moving mechanism is disposed over the storage rack, operatively coupled the storage rack to the load port, and provides at least one degree of freedom of movement to transfer the wafer carrier from the standby position to the load port.

A system and method for rail management of an overhead transport (“OHT”) system of an associated automated material handing system (“AMHS”) that includes a controller in communication with the OHT system, including vehicles traveling on rails of the OHT. The rail management system also includes a turntable located on a portion of the OHT and equipped with a set of fixed rails. Upon receipt of a request to rotate the turntable from a first run-through direction to a second run-through direction, the controller engages at least one stopper sensor located near the turntable. The controller then directs the turntable to rotate from the first run-through direction to the second run-through direction. After completion, the controller disengages the at least one stopper to enable vehicles to travel directly in the second run-through direction.

A traveling vehicle system includes a traveling track, a working track, a mover to move a traveling vehicle between a first position on the traveling track and the working track, and a transportation controller configured or programmed to control at least the traveling vehicle and the mover. The transportation controller is configured or programmed to transmit to the traveling vehicle a first command to travel to the first position and transmit to the mover a third command to move the traveling vehicle stopped at the first position to the working track after or simultaneously when transmitting to the traveling vehicle stopped at the first position a second command to lead a state in which the traveling vehicle is movable by the mover.

The object is to provide a vehicle system capable of suppressing a decrease in article transport efficiency while ensuring a route of an operator. The vehicle system includes a grid-patterned rail, a vehicle traveling on the rail, a controller that controls the vehicle, a work terminal that transmits identification information indicating an actual location to the controller, and a scaffold for allowing an operator carrying the work terminal to walk below the rail, the scaffold being provided below the rail. If entry permission to one or more cells formed by the rail is obtained from the controller, the vehicle enters the one or more cells. If entry permission to the one or more cells is not obtained from the controller, the vehicle does not enter the one or more cells. The controller performs blocking so as not to grant the vehicle the entry permission at least to a cell corresponding to the actual location indicated by the identification information transmitted from the work terminal, among a plurality of cells corresponding to a route of the operator from the entrance to the scaffold to the destination.

An overhead buffer double-entry detection system, which includes an overhead hoist transport, a first sensing unit for scanning and generating detection data of a horizontal range, a driving device for moving the first sensing unit in a vertical range, a controlling unit, and an overhead hoist transport controlling system for sending a detection instruction and a driving instruction to the controlling unit when the overhead hoist transport moves to a corresponding overhead buffer position, whereby the controlling unit bases on the driving instruction to control the driving device to move the first sensing unit in a vertical range, bases on the detection instruction to control the first sensing unit to scan and generate detection data of each horizontal range within the overhead buffer during movement process, and bases on the detection data of each horizontal range within the overhead buffer to judge whether there is obstacle in the overhead buffer.