An overhead transport vehicle includes a traveler capable of traveling along a track; and an elevator including a chuck to grip a FOUP and capable of being lifted and lowered with respect to the traveler. The overhead transport vehicle includes a body controller provided in the body to control portions and operations of the overhead transport vehicle, a vibration detector provided in the elevator to detect vibration generated in the elevator, and a vibration monitor provided in the elevator to determine whether a result of vibration detected by the vibration detector is within a permissible range and also output a result of the determining to the body controller.

A transport system includes: a grid-patterned rail that has a plurality of first rails extending in a first direction and a plurality of second rails extending in a second direction different from the first direction and intersecting with the first rails and that forms a plurality of cells with the plurality of first rails and the plurality of second rails; an overhead transport vehicle that travels along the grid-patterned rail, a suspender that is suspended from the grid-patterned rail; and a frame surrounding one of the cells in a plan view and is provided below the suspender.

An AMHS interface management system configured to facilitate the exchange of lot information between distinct AMHS systems. The AMHS interface management system receives lot information from a first AMHS system in a first format and translates the lot information into a format associated with a second AMHS system. The AMHS interface management system utilizes a handshake area located between the first and second AMHS systems. The handshake area includes one or more vehicles that facilitate the movement of a lot between the first AMHS system and the second AMHS system.

Some implementations described herein provide a method that includes loading, from a load port and into a first buffer of a multiple-buffer overhead hoist transport (OHT) vehicle, a first transport carrier storing one or more processed wafers. The method includes unloading to the load port, while the first buffer retains the first transport carrier, and from a second buffer of the multiple-buffer OHT vehicle, a second transport carrier storing one or more wafers for processing. In other implementations, the method includes loading, into a first buffer of the multiple-buffer OHT vehicle, a first transport carrier storing one or more wafers for processing, while a semiconductor processing tool, associated with a load port, is processing one or more wafers associated with a second transport carrier. The method includes positioning the multiple-buffer OHT vehicle above the load port while the multiple-buffer OHT vehicle retains the first transport carrier in the first buffer.

A substrate processing apparatus includes: a carrier block including carrier placement parts and configured to load/unload a substrate into/from a carrier; a processing block provided on one side of the carrier block to process the substrate; first and second carrier placement parts of the carrier placement parts and provided side by side in a front-rear direction in a plan view; substrate placement parts provided to be arranged step by step vertically on one side of a substrate transfer region formed between the first and second carrier placement parts; a first substrate transfer mechanism provided in the substrate transfer region to deliver the substrate between the carrier of the first carrier placement part and a first substrate placement part of the substrate placement parts; and a second substrate transfer mechanism for moving upward and downward so as to deliver the substrate between first and second substrate placement parts.

Provided is an equipment front end module (EFEM) including a base configured to communicate with a processor, a tray port on the base, the tray port being configured to load a tray including a stub and a grid holder, a working robot configured to move in a direction on the base, and grasp and convey the stub in the tray and the grid holder in the tray, and a shuttle port on the base, the shuttle port including a first groove configured to fix the stub, and a second groove configured to fix the grid holder, wherein the working robot is further configured to convey the stub to the first groove and convey the grid holder to the second groove.

Disclosed is a semiconductor transfer device comprising a housing having a surface that has an opening through which a substrate is introduced, and a substrate hold structure that fixes the substrate in the housing. The substrate hold structure includes a lower support that extends onto a bottom surface of the substrate from one of inner surfaces of the housing, and an upper support that extends toward a side of the substrate from one of the inner surfaces of the housing and includes a second hold member. An operation of the upper support causes the second hold member to move onto the substrate such that the second hold member contacts a top surface of the substrate and overlaps the first hold member. An extension part penetrates the housing and protrudes onto an outer surface of the housing.

A transport device inspection system includes a plurality of transport devices configured to move along a transport path, a diagnostic server configured to create inspection schedule information for the plurality of transport devices, an inspector configured to receive the inspection schedule information from the diagnostic server and to sequentially inspect the plurality of transport devices in accordance with the inspection schedule information, and a transport device controller configured to receive the inspection schedule information from the inspector and to control the plurality of transport devices to sequentially move to an inspection position in accordance with the inspection schedule information.

An article transport facility includes a first rail and a second rail. The second rail is spaced upward relative to the first rail, and intersects the first rail in a view in an up-down direction. The transport vehicle includes a vehicle body disposed between the first rail and the second rail in the up-down direction, a first traveling unit that causes the vehicle body to travel along a first direction, and a second traveling unit that causes the vehicle body to travel along a second direction.

In an article transport vehicle that is able to transport a plurality of types of articles, the efficiency of operations is improved in accordance with the type of article, while suppressing an increase in the size of the article transport vehicle. If a control device determines that an article held by a holding portion is a first-type article, the control device controls the transfer mechanism so as to cause the turning mechanism to perform a turning mechanism and cause a sliding mechanism to perform a sliding operation such that operation periods of these operations do not overlap. If the control device determines that the article held by the holding portion is a second-type article, the control device controls the transfer mechanism so as to perform the turning operation and the sliding operation such that the operation periods of these operations overlap.