A substrate loading device including a frame adapted to connect to a substrate processing apparatus, the frame having a transport opening through which substrates are transported to the processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the support configured so that a sealed internal atmosphere of the container is accessed from the support at predetermined access locations of the container, and the cassette support has a predetermined continuous steady state differential pressure plenum region, determined at least in part by boundaries of fluid flow generating differential pressure, so that the predetermined continuous steady state differential pressure plenum region defines a continuously steady state fluidic flow isolation barrier disposed on the support between the predetermined access locations of the container and another predetermined section of the support isolating the other predetermined section from the predetermined access locations.

Each of first and second substrate transportation mechanisms transports a substrate for a FOUP placed not on, for example, each of two openers disposed laterally but on, for example, each of two openers disposed in an upward/downward direction. Thus, even if the number of openers increases, the substrate is transported not by sliding a hand capable of moving forward and backward, but by lifting, lowering, and rotating the hand. Thus, transportation of the substrate can be simplified. Accordingly, standby time of substrate transportation can be reduced, and a decrease in substrate transportation efficiency can be prevented.

The article transport device includes a transport vehicle configured to move back and forth between a receiving location and a delivery location, and a load receiving base that is provided at at least the receiving location. The transport vehicle includes a transport placing base on which an article is to be placed, and a lift device configured to raise and lower the transport placing base to a first height and to a second height that is lower than the first height. The load receiving base is a base on which an article is to be placed, and is fixed at a third height that is between the first height and the second height. When the transport vehicle performs restoration movement to move from the delivery location to the receiving location, the lift device performs a restoration operation that differs in accordance with whether or not an article is present on the load receiving base at the receiving location.

A load port includes a first pin projecting on a dock plate and provided on the dock plate so as to be pushed down, and a first detection unit provided on the base portion and configured to detect that the dock plate is located at a first position. The first detection unit includes a movable member capable of displacing in a moving direction of the dock plate, and a first sensor configured to detect the displacement of the movable member. The movable member is arranged at a position to abut against the first pin that is in a pushed down state in a process in which the dock plate moves from a second position to the first position.

A load port includes: a port plate; and a placing table on which a container that stores the substrate is placed. The placing table includes: a base portion; a dock plate; a support unit configured to support the dock plate such that the dock plate can move between the first position and a second position; and a cam mechanism configured to move the dock plate between the first position and the second position. The support unit includes a slider configured to move together with the dock plate. The cam mechanism includes: a driving mechanism provided on the base portion; and a cam plate which is connected to the slider and in which a cam groove is formed.

The disclosure describes devices and systems for a two-sided seal for a load port, and methods for using said seal. A factory interface for an electronic device manufacturing system can include a load port for receiving a substrate carrier. The load port can include a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening. The load port can also include a seal coupled to the frame. The seal can include a first contact point configured to engage with a load port door when the load port door is in a first position, and configured to disengage with the load port door when the load port door is in a second position and a second contact point configured to engage with a front of a substrate carrier when the substrate carrier is docked on the load port.

Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening, and selectably variable cassette support purge ports with a variable purge port nozzle outlet, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle outlet with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.

A load port includes a dock plate on which a container storing a substrate is placed, a port plate, a moving mechanism configured to move the dock plate between a dock position and an undock position, a gas supply nozzle unit provided in the dock plate and configured to contact a bottom surface of the container placed on the dock plate and supply a gas into the container, and a pressing unit provided above the dock plate and configured to press the container placed on the dock plate downward. The pressing unit includes a contact member brought into contact with the container placed on the dock plate, and a driving mechanism configured to move the contact member between a first position apart from the container and a second position in contact with the container.

A cassette transport device is disclosed which includes a smart cart, a base expansion frame mounted on the smart cart and a cassette-loading frame fixed to the base expansion frame. The cassette-loading frame is partitioned into several segments each accommodating a plurality of cassette trays. Each of the cassette trays defines, on its surface, a first trough and a second trough in the first trough. The first trough is configured to retain a cassette of a first size, and the second trough is configured to retain a cassette of a second size. With the first and second troughs, each of the cassette trays is able to retain a cassette of either the first or second size, making the cassette transport device possible to be used in transportation of the both types of cassettes with a high yield. Moreover, the smart cart is capable of automated transportation without human intervention or track construction while enabling savings in transportation cost, time and labor.

A semiconductor manufacturing apparatus includes a loadlock module including a loadlock chamber in which a substrate container is received, wherein the loadlock module is configured to switch an internal pressure of the loadlock chamber between atmospheric pressure and a vacuum; and a transfer module configured to transfer a substrate between the substrate container received in the loadlock chamber and a process module for performing a semiconductor manufacturing process on the substrate, wherein the loadlock module includes a purge gas supply unit configured to supply a purge gas into the substrate container through a gas supply line connected to the substrate container; and an exhaust unit configured to discharge a gas in the substrate container through an exhaust line connected to the substrate container.