A load port includes a first pin projecting on a dock plate and provided on the dock plate so as to be pushed down, and a first detection unit provided on the base portion and configured to detect that the dock plate is located at a first position. The first detection unit includes a movable member capable of displacing in a moving direction of the dock plate, and a first sensor configured to detect the displacement of the movable member. The movable member is arranged at a position to abut against the first pin that is in a pushed down state in a process in which the dock plate moves from a second position to the first position.

A cleaning assembly for cleaning one or more wafer edge handling contact surfaces of wafer handling equipment includes a substrate and a cleaning ring. The substrate includes an edge portion that extends about the body of the substrate. The cleaning ring is reversibly attachable to the edge portion of the substrate. The cleaning ring is formed from a deformable material. The substrate and cleaning ring are sized for compatibility with a front opening unified pod (FOUP) or a wafer cassette of a semiconductor fabrication facility.

A transportation system of a cassette comprises a port and a system controller. The port accommodates a cassette carrying a glass substrate, and the port includes displacement sensors for sensing a position of a cassette. The system controller calculates a distortion amount of the cassette using sensed values of the cassette and determines if the cassette is in a normal settlement status by comparing the distortion amount with a tolerance value. Therefore, the position of the cassette can be automatically taught without clamping operation of a clamping device clamping the cassette disposed in the port, thereby preventing defects of the glass substrate by removing various defect-causing factors such as particles and static electricity that may occur during a conventional clamping operation. In particular, quality defects of OLED can be eliminated by preventing particles and static electricity that affect product quality defects in the OLED manufacturing process.

Provided is a load port apparatus including: a mounting unit on which a pod housing a housed object is mounted; a frame portion provided to stand adjacent to the mounting unit and having a frame opening to which a main opening of the pod is connected; a door engageable with a lid for the main opening of the pod for opening and closing the frame opening and the main opening; a door drive mechanism which drives the door; an inner gas exhaust unit provided below an inner side of the frame opening to exhaust a gas from an inside of a mini environment connected to the pod through the main opening and the frame opening; and a corrosive gas detection sensor arranged between the frame opening and the inner gas exhaust unit or in an exhaust flow path of the inner gas exhaust unit.

A transfer device includes a holder that holds an article, and a self-propelled cart that supports the holder and travels. The self-propelled cart includes a wheel and a wheel drive source that drives the wheel, and the self-propelled cart travels along a traveling path provided on an elevation unit and a delivery device. The delivery device includes a positioning portion that positions the elevation unit while the elevation unit is at a transfer height, and a delivery-side guide that guides travel of the self-propelled cart along the traveling path. The elevation unit includes an elevation-side guide that guides travel of the self-propelled cart along the traveling path, and the elevation-side guide is arranged so as to be continuous with the delivery-side guide while the elevation unit is positioned by the positioning portion.

Apparatus and methods for automatically handling die carriers are disclosed. In one example, a disclosed apparatus includes: at least one load port each configured for loading a die carrier operable to hold a plurality of dies; and an interface tool coupled to the at least one load port and a semiconductor processing unit. The interface tool comprises: a first robotic arm configured for transporting the die carrier from the at least one load port to the interface tool, and a second robotic arm configured for transporting the die carrier from the interface tool to the semiconductor processing unit for processing at least one die in the die carrier.

A purge controlling system includes a purge module and a control module. The purge module is arranged in the load port and is electrically connected with the control module. The purge module includes an air curtain unit, a flow control unit and a sensing unit. The control module controls the purge module to provide adequate gas flow of purge gas into the air curtain unit and form a gas curtain according to the displacement value of the door assembly.

An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

A processing apparatus includes a chuck table that holds a workpiece, a cutting unit that processes the workpiece held by the chuck table, a cassette placing region where a cassette is placed, a carrying unit that carries the workpiece between the cassette placed in the cassette placing region and the chuck table, and a surrounding wall that partitions a route for lifting the cassette upward and downward from an external space, in a space directly above the cassette placing region. A height of the surrounding wall is equal to or more than a height of a ceiling wall of the processing apparatus and is so as not to interfere with the cassette held by a carrier that travels.

A container storage includes a purger that supplies a purge gas into a stored container and an evacuator that is disposed near a lid of the container and evacuates an atmosphere around the lid.