Patent classifications
H01L21/763
III-V compound semiconductor layer stacks with electrical isolation provided by a trap-rich layer
Semiconductor structures including electrical isolation and methods of forming a semiconductor structure including electrical isolation. A layer stack is formed on a semiconductor substrate comprised of a single-crystal semiconductor material. The layer stack includes a semiconductor layer comprised of a III-V compound semiconductor material. A polycrystalline layer is formed in the semiconductor substrate. The polycrystalline layer extends laterally beneath the layer stack.
III-V compound semiconductor layer stacks with electrical isolation provided by a trap-rich layer
Semiconductor structures including electrical isolation and methods of forming a semiconductor structure including electrical isolation. A layer stack is formed on a semiconductor substrate comprised of a single-crystal semiconductor material. The layer stack includes a semiconductor layer comprised of a III-V compound semiconductor material. A polycrystalline layer is formed in the semiconductor substrate. The polycrystalline layer extends laterally beneath the layer stack.
IC structure including porous semiconductor layer under trench isolations adjacent source/drain regions
An integrated circuit (IC) structure includes an active device over a bulk semiconductor substrate, and an isolation structure around the active device in the bulk semiconductor substrate. The active device includes a semiconductor layer having a center region, a first end region laterally spaced from the center region by a first trench isolation, a second end region laterally spaced from the center region by a second trench isolation, a gate over the center region, and a source/drain region in each of the first and second end regions. The isolation structure includes: a polycrystalline isolation layer under the active device, a third trench isolation around the active device, and a porous semiconductor layer between the first trench isolation and the polycrystalline isolation layer and between the second trench isolation and the polycrystalline isolation layer.
Isolation trenches augmented with a trap-rich layer
Semiconductor structures with electrical isolation and methods of forming a semiconductor structure with electrical isolation. A shallow trench isolation region, which contains a dielectric material, is positioned in a semiconductor substrate. A trench extendes through the shallow trench isolation region and to a trench bottom in the semiconductor substrate beneath the shallow trench isolation region. A dielectric layer at least partially fills the trench. A polycrystalline region, which is arranged in the semiconductor substrate, includes a portion that is positioned beneath the trench bottom.
Isolation trenches augmented with a trap-rich layer
Semiconductor structures with electrical isolation and methods of forming a semiconductor structure with electrical isolation. A shallow trench isolation region, which contains a dielectric material, is positioned in a semiconductor substrate. A trench extendes through the shallow trench isolation region and to a trench bottom in the semiconductor substrate beneath the shallow trench isolation region. A dielectric layer at least partially fills the trench. A polycrystalline region, which is arranged in the semiconductor substrate, includes a portion that is positioned beneath the trench bottom.
BOUNDARY DESIGN FOR HIGH-VOLTAGE INTEGRATION ON HKMG TECHNOLOGY
The present disclosure relates to an integrated circuit (IC) that includes a boundary region defined between a low voltage region and a high voltage region, and a method of formation. In some embodiments, the integrated circuit comprises an isolation structure disposed in the boundary region of the substrate. A first polysilicon component is disposed over the substrate alongside the isolation structure. A boundary dielectric layer is disposed on the isolation structure. A second polysilicon component is disposed on the sacrifice dielectric layer.
ELECTRONIC CHIP
An electronic chip including: a plurality of first semiconductor bars of a first conductivity type and of second semiconductor bars of a second conductivity type arranged alternately and contiguously on a region of the first conductivity type; two detection contacts arranged at the ends of each second bar; a circuit for detecting the resistance between the detection contacts of each second bar; insulating trenches extending in the second bars down to a first depth between circuit elements; and insulating walls extending across the entire width of each second bar down to a second depth greater than the first depth.
Dual deep trenches for high voltage isolation
A semiconductor device adopts an isolation scheme to protect low voltage transistors from high voltage operations. The semiconductor device includes a substrate, a buried layer, a transistor well region, a first trench, and a second trench. The substrate has a top surface and a bottom surface. The buried layer is positioned within the substrate, and the transistor well region is positioned above the buried layer. The first trench extends from the top surface to penetrate the buried layer, and the first trench has a first trench depth. The second trench extending from the top surface to penetrate the buried layer. The second trench is interposed between the first trench and the transistor well region. The second trench has a second trench depth that is less than the first trench depth.
GaN TRANSISTORS WITH POLYSILICON LAYERS USED FOR CREATING ADDITIONAL COMPONENTS
A GaN transistor with polysilicon layers for creating additional components for an integrated circuit and a method for manufacturing the same. The GaN device includes an EPI structure and an insulating material disposed over EPI structure. Furthermore, one or more polysilicon layers are disposed in the insulating material with the polysilicon layers having one or more n-type regions and p-type regions. The device further includes metal interconnects disposed on the insulating material and vias disposed in the insulating material layer that connect source and drain metals to the n-type and p-type regions of the polysilicon layer.
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
A semiconductor device includes a high voltage transistor formation region defined by an element isolation insulating film, a transistor formation region defined by an element isolation insulating film, and a substrate contact portion. A crystal defect region is formed at a portion of a semiconductor substrate that is positioned immediately below each of the substrate contact portion and element isolation insulating films.