An Integrated Circuit (IC) package is provided, comprising a first IC die having a first capacitor and a logic circuit, and a second IC die having a second capacitor. The first IC die and the second IC die may be stacked within the IC package one on top of another and electrically coupled with die-to-die interconnects. The logic circuit is electrically coupled in a power delivery network to the first capacitor and the second capacitor. The first IC die and the second IC die include respective back-end-of-line portions in which the first capacitor and the second capacitor, which may comprise metal-insulator-metal capacitors in some embodiments are situated. In some embodiments, the second capacitor is situated in a shadow of the logic circuit. In various embodiments, the first IC die and the second IC die comprise any suitable pair in a plurality of stacked IC dies within an IC package.

A method and an electronic device that includes an isolation structure having a dielectric material on or in a semiconductor surface layer, and a passive circuit component having a metal silicide structure on a side of the isolation structure, there the metal silicide structure includes a metal silicide portion and a dielectric portion, the dielectric portion of the metal silicide structure including one of silicon nitride, silicon oxide, silicon carbide, silicon carbon nitride, and silicon oxynitride. The method includes forming a dielectric material of the isolation structure on or in the semiconductor surface layer, forming a silicon-rich dielectric layer on a side of the isolation structure, and siliciding the silicon-rich dielectric layer to form the metal silicide structure on the side of the isolation structure.

A method includes forming a dielectric layer on a substrate; forming a first spiral electrode, a second spiral electrode, and a spiral common electrode in the dielectric layer, the first spiral electrode extending in a first spiral path, the second spiral electrode extending in a second spiral path, and the spiral common electrode extending in a third spiral path laterally between the first and second spiral paths.

The present disclosure relates to a semiconductor device and a manufacturing method, and more particularly to a MIM dual capacitor structure with an increased capacitance per unit area in a semiconductor structure. Without using additional mask layers, a second parallel plate capacitor can be formed over a first parallel plate capacitor, and both capacitors share a common capacitor plate. The two parallel plate capacitors can be connected in parallel to increase the capacitance per unit area.

An IC includes a substrate including circuitry configured to provide a receiver or a transmitter circuit. A metal stack is over the semiconductor surface including a top metal layer and a plurality of lower metal layers. An isolation capacitor includes the top metal layer as a top plate that is electrically connected to a first node; and a top dielectric layer on the top plate with a top plate dielectric aperture. One of the plurality of lower metal layers provides a bottom plate that includes a plurality of spaced apart segments. A capacitor dielectric layer is between the top and bottom plate. The segments include a first segment electrically connected to a second node and at least a second segment electrically connected to a third node, with separation regions located between adjacent spaced apart segments. The top plate covers at least a portion of each of the separation regions.

An electronic device has a conductive shield between first and second regions in a multilevel metallization structure, as well as a capacitor with first and second terminals in the first region, the first terminal laterally overlaps the second terminal by an overlap distance of 1.0 μm to 6.0 μm, the conductive shield includes a first metal line that encircles the first terminal, and the first metal line is spaced apart from the first terminal by a gap distance of 0.5 μm to 1.0 μm.

Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. The method includes forming a bottom electrode over a substrate. A dielectric layer is formed on the bottom electrode. A first top electrode layer is deposited on the dielectric layer by a first deposition process. A diffusion barrier layer is deposited on the first top electrode layer by a second deposition process different from the first deposition process. A second top electrode layer is deposited on the diffusion barrier layer by a third deposition. The third deposition process is the same as the first deposition process.

A method and semiconductor device including a substrate having one or more semiconductor devices. In some embodiments, the device further includes a first passivation layer disposed over the one or more semiconductor devices. The device may further include a metal-insulator-metal (MIM) capacitor structure formed over the first passivation layer. In addition, the device may further include a second passivation layer disposed over the MIM capacitor structure. In various examples, a stress-reduction feature is embedded within the second passivation layer. In some embodiments, the stress-reduction feature includes a first nitrogen-containing layer, an oxygen-containing layer disposed over the first nitrogen-containing layer, and a second nitrogen-containing layer disposed over the oxygen containing layer.

The present disclosure is directed to a method for the fabrication of MiM capacitor structures with metallic electrodes having nitrogen-rich metal nitride layers. The method includes depositing a first electrode bilayer on a first interconnect disposed on a substrate, where the first electrode includes a first layer and a second layer with a different nitrogen concentration. The method also includes depositing a dielectric layer on the first electrode bilayer and depositing a second electrode bilayer on the first interconnect where the second electrode includes a third layer and a fourth layer with a different nitrogen concentration. The method further includes patterning the first electrode bilayer, the dielectric layer, and the second electrode bilayer to form a capacitor structure on the first interconnect layer.

A cross-type semiconductor capacitor layout includes a first conductive structure and a second conductive structure. The first conductive structure includes longitudinal first conductive strips and lateral first conductive strips. The second conductive structure includes longitudinal second conductive strips and lateral second conductive strips. The longitudinal first conductive strips and the longitudinal second conductive strips are alternately disposed in a first integrated circuit layer. The lateral first conductive strips and the lateral second conductive strips are alternately disposed in a second integrated circuit layer. The lateral first conductive strips are coupled to the longitudinal first conductive strips through vias. The lateral second conductive strips are coupled to the longitudinal second conductive strips through vias. The cross-type semiconductor capacitor layout can mitigate the problem of parasitic capacitance and prevent the problem caused by a U-shaped structure applied in an advanced process.