An apparatus includes a substrate; a group III-Nitride buffer layer on the substrate; a group III-Nitride barrier layer on the group III-Nitride buffer layer, the group III-Nitride barrier layer may include a higher bandgap than a bandgap of the group III-Nitride buffer layer; a source electrically coupled to the group III-Nitride barrier layer; a gate electrically coupled to the group III-Nitride barrier layer; a drain electrically coupled to the group III-Nitride barrier layer; and a conductive metallic region being at least one of the following: in the substrate or on the substrate below said group III-Nitride barrier layer. Additionally, the conductive metallic region is structured and arranged to extend a limited length parallel to said group III-Nitride barrier layer.

A semiconductor device includes a first gate stack and a second gate stack over a substrate, an isolation structure in the substrate, a first epitaxial (epi) material in the substrate between the first gate stack and the isolation structure, and a second epi material in the substrate between the first gate stack and the second gate stack. The first gate stack is between the isolation structure and the second gate stack. The first epi material includes a first upper surface having a first crystal plane. The second epi material includes a second upper surface having a second crystal plane and a third upper surface having a third crystal plane, and first crystal plane is different from both the second crystal plane and the third crystal plane.

A Group III-V semiconductor structure having a semiconductor device. The semiconductor device has a source and drain recess regions extending through a barrier layer and into a channel layer. A regrown, doped Group III-V ohmic contact layer is disposed on and in direct contact with the source and drain recess regions. A gate electrode is disposed in a gap in the regrown, doped Group III-V ohmic contact layer and on the barrier layer A dielectric structure is disposed over the ohmic contact layer and over the barrier layer and extending continuously from a region over the source recess region to one side of the stem to portion and then extending continuously from an opposite side of the stem portion to a region over the drain recess region, a portion of the dielectric structure being in contact with the stem portion and the barrier layer.

A semiconductor device includes a substrate, a first thin-film transistor, and a second thin-film transistor. The first and second thin-film transistors are disposed on the substrate. The first thin-film transistor includes stacked first and second metal oxide layers. An oxygen concentration of the first metal oxide layer is less than an oxygen concentration of the second metal oxide layer, and a thickness of the second metal oxide layer is less than a thickness of the first metal oxide layer. A two-dimensional electron gas is located at an interface between the first and second metal oxide layers. The second thin-film transistor is electrically connected to the first thin-film transistor. The second thin-film transistor includes a third metal oxide layer. The second and third metal oxide layers belong to a same patterned layer.

A Group III-nitride-based enhancement mode transistor includes a multi-heterojunction fin structure. A first side face of the multi-heterojunction fin structure is covered by a first p-type Group III-nitride layer, and a second side face of the multi-heterojunction fin structure is covered by a second p-type Group III-nitride layer.

A lateral power semiconductor device is provided. Some semiconductor devices show signs of failure caused by a short between metal layers, which have showed cracks in the insulator layer between the two metals which causes the short-circuit. Removing the superimposition between the borders of the metal layers reduces the risk of cracks in the insulator layer and thereby increases the reliability of the device. The lateral power semiconductor device of the present disclosure has one of these metal layers configured so that the metal has been removed at the area where it superimposes the area of the other metal layer so that these are isolated from each other not only by the insulation layer in between these metal layers, but also by the fact that they are isolated by a lateral spacing so that they do not lie on top of each other.

An embodiment is a semiconductor structure. The semiconductor structure includes a fin on a substrate. A gate structure is over the fin. A source/drain is in the fin proximate the gate structure. The source/drain includes a bottom layer, a supportive layer over the bottom layer, and a top layer over the supportive layer. The supportive layer has a different property than the bottom layer and the top layer, such as a different material, a different natural lattice constant, a different dopant concentration, and/or a different alloy percent content.

A transistor structure, includes a buffer layer and a quantum well channel layer on top of the buffer layer. There is a barrier layer on top of the channel layer. There is a drain contact on a channel stack. A source contact is on a channel stack. A gate structure is located between the source contact and drain contact, comprising: an active gate portion having a bottom surface in contact with a bottom surface of the source and the drain contacts. A superconducting portion of the gate structure is in contact with, and adjacent to, an upper part of the active gate portion.

A semiconductor device including a semiconductor layer, a drain region formed at a surface region of the semiconductor layer, and a source/gate region including a source region and a gate region, which are alternatively arranged so as to be electrically connected to each other. The device further includes a resistive field plate that is disposed on the semiconductor layer between the drain region and the source/gate region and spirally wound in a top view. The field plate including an innermost peripheral portion electrically connected to the drain region and an outermost peripheral portion electrically connected to ground. An outermost peripheral ground conductor film is disposed on the semiconductor layer between the outermost peripheral portion of the field plate and the source/gate region. Additionally, a second ground conductor film is disposed on the semiconductor layer between the outermost peripheral portion of the field plate and the outermost ground conductor film.

A communication system includes a two-dimensional array of a plurality of plasmonic nano-antennas. Each plasmonic nano-antenna supports a surface plasmon polariton wave. A plurality of communications elements each excite a corresponding one of the plasmonic nano-antennas, thereby causing a surface plasmon polariton wave that corresponds to a signal to form on each of the plasmonic nano-antennas.