Patent classifications
H01L29/66227
Nanoparticle structure and process for manufacture
A method for forming nanoparticles includes forming a stack of alternating layers including a first material disposed between a second material. The stack of alternating layers is patterned to form pillars. A dielectric layer is conformally deposited over the pillars. The pillars are annealed in an oxygen environment to modify a shape of the first material of the alternating layers. The dielectric layer and the second material are etched selectively to the first material to form nanoparticles from the first material.
THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING SAME, ARRAY SUBSTRATE, AND DISPLAY DEVICE
Disclosed in the present invention are a method for manufacturing a thin-film transistor, an array substrate, and a display device. The method includes: forming a buffer layer on a substrate; forming a polysilicon layer on the buffer layer; performing a patterning process on the polysilicon layer, to form an active layer; depositing a gate insulating layer on the active layer; depositing a gate metal layer on the gate insulating layer, and performing dry etching on the gate metal layer by using the patterning process and by using a gas containing CO as an etching gas, to form a gate; performing ion implantation on the active layer by using the gate as a mask, to form a source region and a drain region; and depositing a passivation layer on the gate, forming through holes in the gate insulating layer and the passivation layer, and manufacturing a source and a drain.
THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY PANEL
A thin film transistor, a manufacturing method thereof, an array substrate and a display panel are provided. The thin film transistor includes: a base substrate; and a gate electrode, a gate insulating layer, an active layer and a source/drain electrode layer which are on the base substrate. The source/drain electrode layer includes a source electrode and a drain electrode. The thin film transistor further includes a light blocking layer surrounding the active layer.
Thin film transistor and manufacturing method thereof, array substrate and display panel
A thin film transistor, a manufacturing method thereof, an array substrate and a display panel are provided. The thin film transistor includes: a base substrate; and a gate electrode, a gate insulating layer, an active layer and a source/drain electrode layer which are on the base substrate. The source/drain electrode layer includes a source electrode and a drain electrode. The thin film transistor further includes a light blocking layer surrounding the active layer.
Lateral semiconductor nanotube with hexagonal shape
A method of forming a semiconductor structure includes forming one or more fins disposed on a substrate, rounding surfaces of the one or more fins, forming faceted sidewalls from the rounded surfaces of the one or more fins, and forming a lateral semiconductor nanotube shell on the faceted sidewalls. The lateral semiconductor nanotube shell comprises a hexagonal shape.
Nanoparticle structure and process for manufacture
A method for forming nanoparticles includes forming a stack of alternating layers including a first material disposed between a second material. The stack of alternating layers is patterned to form pillars. A dielectric layer is conformally deposited over the pillars. The pillars are annealed in an oxygen environment to modify a shape of the first material of the alternating layers. The dielectric layer and the second material are etched selectively to the first material to form nanoparticles from the first material.
Thin film transistor and manufacturing method thereof
The disclosure discloses a thin film transistor and a manufacturing method thereof. The method includes depositing quantum dot ink containing carbon quantum dots in a groove region between a source electrode and a drain electrode, after the quantum dot ink is dry, cleaning and blow-drying the dried quantum dot ink to film the carbon quantum dots to be an active layer of the thin film transistor. Accordingly, the disclosure can simplify the manufacturing process of the thin film transistor and enhance the production efficiency, as well as reducing costs and improving control sensitivity.
LATERAL SEMICONDUCTOR NANOTUBE WITH HEXAGONAL SHAPE
A method of forming a semiconductor structure includes forming one or more fins disposed on a substrate, rounding surfaces of the one or more fins, forming faceted sidewalk from the rounded surfaces of the one or more fins, and forming a lateral semiconductor nanotube shell on the faceted sidewalk. The lateral semiconductor nanotube shell comprises a hexagonal shape.
Nanoparticle structure and process for manufacture
A method for forming nanoparticles includes forming a stack of alternating layers including a first material disposed between a second material. The stack of alternating layers is patterned to form pillars. A dielectric layer is conformally deposited over the pillars. The pillars are annealed in an oxygen environment to modify a shape of the first material of the alternating layers. The dielectric layer and the second material are etched selectively to the first material to form nanoparticles from the first material.
Quantum box device comprising dopants located in a thin semiconductor layer
A method of making a quantum device with a quantum island structure is provided. The method includes the formation of a stack including a first semiconducting layer based on an undoped semiconducting material on which at least one second doped semiconducting layer is grown by epitaxy, the doping being made during epitaxial growth, a first region belonging to the first semiconducting layer and a second region belonging to the second semiconducting layer being suitable for forming a quantum island.