Patent classifications
H01L2224/80143
DIMENSION COMPENSATION CONTROL FOR DIRECTLY BONDED STRUCTURES
A method of direct hybrid bonding first and second semiconductor elements of differential thickness is disclosed. The method can include patterning a plurality of first contact features on the first semiconductor element. The method can include second a plurality of second contact features on the second semiconductor element corresponding to the first contact features for direct hybrid bonding. The method can include applying a lithographic magnification correction factor to one of the first patterning and second patterning without applying the lithographic magnification correction factor to the other of the first patterning and the second patterning. In various embodiments, a differential expansion compensation structure can be disposed on at least one of the first and the second semiconductor elements. The differential expansion compensation structure can be configured to compensate for differential expansion between the first and second semiconductor elements to reduce misalignment between at least the second and fourth contact features.
METHOD AND DEVICE FOR BONDING OF CHIPS
A method and device for bonding chips onto a substrate or onto further chips. The chips are bonded onto the substrate or the further chips by means of a direct bond.
Automatic registration between circuit dies and interconnects
- Ankit Mahajan ,
- Mikhail L. Pekurovsky ,
- Matthew S. Stay ,
- Daniel J. Theis ,
- Ann M. Gilman ,
- Shawn C. Dodds ,
- Thomas J. Metzler ,
- Matthew R. D. Smith ,
- Roger W. Barton ,
- Joseph E. Hernandez ,
- Saagar A. Shah ,
- Kara A. Meyers ,
- James Zhu ,
- Teresa M. Goeddel ,
- Lyudmila A. Pekurovsky ,
- Jonathan W. Kemling ,
- Jeremy K. Larsen ,
- Jessica Chiu ,
- Kayla C. Niccum
Processes for automatic registration between a solid circuit die and electrically conductive interconnects, and articles or devices made by the same are provided. The solid circuit die is disposed on a substrate with contact pads aligned with channels on the substrate. Electrically conductive traces are formed by flowing a conductive liquid in the channels toward the contact pads to obtain the automatic registration.
Method for transferring micro device
A method for transferring a micro device includes: preparing a carrier substrate with the micro device thereon in which an adhesive layer is present between and in contact with the carrier substrate and the micro device; picking up the micro-device from the carrier substrate by a transfer head comprising a force-adjustable glue layer thereon; forming a liquid layer on a receiving substrate; reducing the grip force of the force-adjustable glue layer of the transfer head to be smaller than a force attaching the micro device to the receiving substrate; placing the micro device over the receiving substrate such that the micro device is in contact with the liquid layer and is gripped by a capillary force; and moving the transfer head away from the receiving substrate such that the micro device is detached from the transfer head and is stuck to the receiving substrate.
Method for transferring micro device
A method for transferring a micro device is provided. The method includes: preparing a carrier substrate with the micro device thereon, wherein an adhesive layer is between and in contact with the carrier substrate and the micro device; picking up the micro-device from the carrier substrate by a transfer head; forming a liquid layer on a receiving substrate; and placing the micro device over the receiving substrate by the transfer head such that the micro device is in contact with the liquid layer and is gripped by a capillary force; and moving the transfer head away from the receiving substrate such that the micro device is detached from the transfer head and is stuck to the receiving substrate.
LIGHT EMITTING ELEMENT AND DISPLAY DEVICE INCLUDING THE SAME AND METHOD FOR MANUFACTURING DISPLAY DEVICE
Provided is a light emitting element according to embodiments which includes a body including a semiconductor layer and an active layer, and a ligand including a head portion bonded to a surface of the body, an end portion spaced apart from the body, and having a positive or a negative charge, and a chain portion connecting the head portion and the end portion.
Semiconductor package
A semiconductor package includes: a lower semiconductor chip including a first semiconductor substrate, which includes a first semiconductor device on an active surface thereof and a protrusion defined by a recess region on an inactive surface thereof opposite to the active surface, a plurality of external connecting pads on a bottom surface of the first semiconductor substrate, and a plurality of through-electrodes electrically connected to the plurality of external connecting pads; and at least one upper semiconductor chip stacked on the protrusion of the lower semiconductor chip and electrically connected to the plurality of through-electrodes, the at least one upper semiconductor chip including a second semiconductor substrate which includes a second semiconductor device on an active surface thereof.
Chip package structure and method for forming the same
A method for forming a chip package structure is provided. The method includes partially removing a first redistribution layer to form an alignment trench in the first redistribution layer. The alignment trench surrounds a bonding portion of the first redistribution layer. The method includes forming a liquid layer over the bonding portion. The method includes disposing a chip structure over the liquid layer, wherein a first width of the bonding portion is substantially equal to a second width of the chip structure. The method includes evaporating the liquid layer. The chip structure is in direct contact with the bonding portion after the liquid layer is evaporated.
METHOD OF SELF-ASSEMBLY WITH A HYBRID MOLECULAR BONDING
The present disclosure relates to a method of manufacturing a first electronic circuit including a planar surface, intended to be affixed to a second electronic circuit by a self-assembly method with a hybrid molecular bonding, and first electrically-conductive pads exposed on the surface. The method includes the forming of a peripheral area around the surface including second exposed and raised pads, each at least partly having the same composition as the first pads.
HYBRID MOLECULAR BONDING METHOD AND ELECTRONIC CIRCUITS FOR IMPLEMENTING SUCH A METHOD
The present disclosure relates to a method of hybrid molecular bonding of a first surface of a first electronic circuit to a second surface of a second electronic circuit. The first electronic circuit includes first conductive pads exposed on the first surface and first conductive tracks exposed on the first surface. The length of each first track is equal to at least five times the width of the first track, the first tracks delivering the reference voltage to the first electronic circuit. The second electronic circuit includes second conductive pads exposed on the second surface and second conductive tracks exposed on the second surface. The length of each second track is equal to at least five times the length of the second track. The method comprises placing into contact the first pads with the second pads and the first tracks with the second tracks.