Patent classifications
H01L2224/81136
Method of forming sacrificial self-aligned features for assisting die-to-die and die-to-wafer direct bonding
A method of manufacturing a three-dimensional semiconductor device includes forming a bi-layer sacrificial stack on a top wafer and a bottom wafer each including a series of interconnects in a dielectric substrate. The bi-layer sacrificial stack includes a second sacrificial layer on a first sacrificial layer. The method also includes selectively etching the second sacrificial layers to form a first pattern of projections on the top wafer and a second pattern of projections on the bottom wafer. The first pattern of projections is configured to mesh with the second pattern of projections. The method also includes positioning the top wafer on the bottom wafer and releasing the top wafer such that engagement between the first pattern of projections and the second pattern of projections self-aligns the plurality of interconnects of the top wafer with the plurality of interconnects of the bottom wafer within a misalignment error.
BONDING OF BRIDGE TO MULTIPLE SEMICONDUCTOR CHIPS
Interconnecting a first chip and a second chip includes mounting the first and second chips to a chip handler having an opening and at least one support surface. Each of the first chip and the second chip has a first surface including a first set of terminals and a second surface opposite to the first surface. The first surface of the first chip and the first surface of the second chip mounted to the chip handler are supported by the at least one support surface of the chip handler. The first and second chips are placed on a chip support member with the chip handler from the second surfaces. A bridge member is inserted by a bridge handler through the opening of the chip handler to place the bridge member onto the first sets of terminals of the first and second chips that are exposed from the opening.
Light-emitting device, manufacturing method thereof and display module using the same
A light-emitting device includes a carrier, a light-emitting element and a connection structure. The carrier includes a first electrical conduction portion. The light-emitting element includes a first light-emitting layer capable of emitting first light and a first contact electrode formed under the light-emitting layer. The first contact electrode is corresponded to the first electrical conduction portion. The connection structure includes a first electrical connection portion and a protective portion surrounding the first contact electrode and the first electrical connection portion. The first electrical connection portion includes an upper portion, a lower portion and a neck portion arranged between the upper portion and the lower portion. The lower portion has a width is wider than of the upper portion.
Semiconductor device package and method of manufacturing the same
The present disclosure relates to a method of manufacturing a semiconductor device package. The method includes: (a) disposing a support structure on a first substrate; (b) electrically connecting a first electronic component on the first substrate, wherein a portion of the first electronic component is separated from the first substrate by the support structure; (c) heating the semiconductor device package; and (d) removing the support structure.
Methods and systems for manufacturing semiconductor devices
A thermocompression bonding (TCB) apparatus can include a wall having a height measured in a first direction and configured to be positioned between a first pressing surface and a second pressing surface of a semiconductor bonding apparatus. The apparatus can include a cavity at least partially surrounded by the wall, the cavity sized to receive a semiconductor substrate and a stack of semiconductor dies positioned between the semiconductor substrate and the first pressing surface, the stack of semiconductor dies and semiconductor substrate having a combined unpressed stack height as measured in the first direction. In some embodiments, the unpressed stack height is greater than the height of the wall, and the wall is configured to be contacted by the first pressing surface to limit movement of the first pressing surface toward the second pressing surface during a semiconductor bonding process.
Methods and systems for manufacturing semiconductor devices
A thermocompression bonding (TCB) apparatus can include a wall having a height measured in a first direction and configured to be positioned between a first pressing surface and a second pressing surface of a semiconductor bonding apparatus. The apparatus can include a cavity at least partially surrounded by the wall, the cavity sized to receive a semiconductor substrate and a stack of semiconductor dies positioned between the semiconductor substrate and the first pressing surface, the stack of semiconductor dies and semiconductor substrate having a combined unpressed stack height as measured in the first direction. In some embodiments, the unpressed stack height is greater than the height of the wall, and the wall is configured to be contacted by the first pressing surface to limit movement of the first pressing surface toward the second pressing surface during a semiconductor bonding process.
Semiconductor Assembly Packaging Method, Semiconductor Assembly and Electronic Device
A semiconductor assembly packaging method, a semiconductor assembly and an electronic device are provided. The method comprises providing an interconnect board and at least one semiconductor device; aligning and attaching the at least one semiconductor device to the interconnect board by forming a plurality of alignment solder joints; applying pressure to the at least one semiconductor device and/or the interconnect board while the alignment solder joints are in a molten or partially molten state, whereby first connection terminals on the interconnect board are joined with and bonded to corresponding second connection terminals on the at least one semiconductor device. Using the packaging method, the semiconductor device and the interconnect board can be aligned accurately using relatively simple and low cost processes and equipment. The method can also be used to align and bond at least one semiconductor device to another semiconductor device.
Semiconductor Assembly Packaging Method, Semiconductor Assembly and Electronic Device
A semiconductor assembly packaging method, a semiconductor assembly and an electronic device are provided. The method comprises providing an interconnect board and at least one semiconductor device; aligning and attaching the at least one semiconductor device to the interconnect board by forming a plurality of alignment solder joints; applying pressure to the at least one semiconductor device and/or the interconnect board while the alignment solder joints are in a molten or partially molten state, whereby first connection terminals on the interconnect board are joined with and bonded to corresponding second connection terminals on the at least one semiconductor device. Using the packaging method, the semiconductor device and the interconnect board can be aligned accurately using relatively simple and low cost processes and equipment. The method can also be used to align and bond at least one semiconductor device to another semiconductor device.
Solder member mounting method and system
A solder member mounting method includes providing a substrate having bonding pads formed thereon, detecting a pattern interval of the bonding pads, selecting one of solder member attachers having different pattern intervals from each other, such that the one selected solder member attacher of the solder member attachers has a pattern interval corresponding to the detected pattern interval of the bonding pads, and attaching solder members on the bonding pads of the substrate, respectively, using the one selected solder member attacher.
Semiconductor device structure with air gap and method for forming the same
The present disclosure discloses a semiconductor device structure with an air gap for reducing capacitive coupling and a method for forming the semiconductor device structure. The semiconductor device structure includes a first conductive pad over a first semiconductor substrate, and a first conductive structure over the first conductive pad. The semiconductor device structure also includes a second conductive structure over the first conductive structure, and a second conductive pad over the second conductive structure. The second conductive pad is electrically connected to the first conductive pad through the first and the second conductive structures. The semiconductor device structure further includes a second semiconductor substrate over the second conductive pad, a first passivation layer between the first and the second semiconductor substrates and covering the first conductive structure, and a second passivation layer between the first passivation layer and the second semiconductor substrate. The first and the second passivation layers surround the second conductive structure, and a first air gap is enclosed by the first and the second passivation layers.