Patent classifications
H01L2224/83894
3D SEMICONDUCTOR DEVICES AND STRUCTURES WITH LOGIC GATES
A 3D semiconductor device including: a first level including a first single-crystal layer, a plurality of first transistors, a first metal layer (includes interconnection of first transistors), and a second metal layer, where first transistors' interconnection includes forming logic gates; a plurality of second transistors disposed atop, at least in part, of logic gates; a plurality of third transistors disposed atop, at least in part, of the second transistors; a third metal layer disposed above, at least in part, the third transistors; a global grid to distribute power and overlaying, at least in part, the third metal layer; a local grid to distribute power to the logic gates, the local grid is disposed below, at least in part, the second transistors, where the second transistors are aligned to the first transistors with less than 40 nm misalignment, where at least one of the second transistors includes a metal gate.
3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH NAND LOGIC
A 3D semiconductor device including: a first level including a single crystal layer and plurality of first transistors; a first metal layer including interconnects between first transistors, where the interconnects between the first transistors includes forming logic gates; a second metal layer atop at least a portion of the first metal layer, second transistors which are vertically oriented, are also atop a portion of the second metal layer; where at least eight of the first transistors are connected in series forming at least a portion of a NAND logic structure, where at least one of the second transistors is at least partially directly atop of the NAND logic structure; and a third metal layer atop at least a portion of the second transistors, where the second metal layer is aligned to the first metal layer with a less than 150 nm misalignment.
METHOD FOR PRODUCING A 3D SEMICONDUCTOR MEMORY DEVICE AND STRUCTURE
A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits in and on the first level, where the control circuits include first single crystal transistors, where the control circuits include at least two metal layers; forming at least one second level disposed on top of the first level; performing a first etch step within the second level; forming at least one third level disposed on top of the at least one second level; performing a second etch step within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the first memory cells include second transistors, and where the second memory cells include third transistors.
Method for processing a 3D integrated circuit and structure
A method for processing a 3D integrated circuit, the method including: providing a first level including a first wafer, the first wafer including a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers, where the first copper interconnecting layers at least interconnect the plurality of first transistors; processing a second level including a second wafer, the second wafer including a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers, where the second copper interconnecting layers at least interconnect the plurality of second transistors; then forming a bonded structure by bonding the second level to the first level, where the bonding includes metal to metal bonding, where the bonding includes oxide to oxide bonding; and then performing a lithography process to define dice lines for the bonded structure; and etching the dice lines.
Method for manufacturing a structure for forming a tridimensional monolithic integrated circuit
A method for manufacturing a structure comprising a first substrate comprising at least one electronic component likely to be damaged by a temperature higher than 400° C. and a semiconductor layer extending on the first substrate comprises: (a) providing a first bonding metal layer on the first substrate, (b) providing a second substrate comprising successively: a semiconductor base substrate, a stack of a plurality of semiconductor epitaxial layers, a layer of Si.sub.xGe.sub.1-x, with 0≤x≤1 being located at the surface of said stack opposite to the base substrate, and a second bonding metal layer, (c) bonding the first substrate and the second substrate through the first and second bonding metal layers at a temperature lower than or equal to 400° C., and (d) removing a part of the second substrate so as to transfer the layer of Si.sub.xGe.sub.1-x on the first substrate using a selective etching process.
VARIOUS 3D SEMICONDUCTOR DEVICES AND STRUCTURES WITH MEMORY CELLS
A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors; at least one first metal layer disposed above the plurality of first transistors; a second metal layer disposed above the at least one first metal layer; a plurality of second transistors disposed atop the second metal layer; a plurality of third transistors disposed atop the plurality of second transistors; a plurality of fourth transistors disposed atop the plurality of third transistors; a third metal layer disposed above the plurality of fourth transistors; a fourth metal layer disposed above the third metal layer; and a plurality of connecting metal paths from the fourth metal layer or the third metal layer to the second metal layer, where the device includes an array of memory cells, and where at least one of the memory cells includes one of the plurality of third transistors.
3D SEMICONDUCTOR MEMORY DEVICE AND STRUCTURE
A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and at least two metal layers; a plurality of logic gates including the at least two metal layers interconnecting the plurality of first transistors; a plurality of second transistors disposed atop the at least two metal layers; a plurality of third transistors disposed atop the second transistors; a top metal layer disposed atop the third transistors; and a memory array including word-lines, where the memory array includes at least two rows by two columns of memory mini arrays, where each of the mini arrays includes at least four rows by four columns of memory cells, where each of the memory cells includes at least one of the second transistors or at least one of the third transistors, and where at least one of the second transistors include a metal gate.
3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH REPLACEMENT GATES
A 3D semiconductor device, the device including: a first level including a first single crystal layer and first single crystal transistors; a first metal layer; a second metal layer disposed atop the first metal layer; second transistors disposed atop of the second metal layer; third transistors disposed atop of the second transistors, where at least one of the third transistors includes at least one replacement gate, being processed to replace a non-metal gate material with a metal based gate, and where a distance from at least one of the third transistors to at least one of the second transistors is less than 1 micron.
Dielets on flexible and stretchable packaging for microelectronics
Dielets on flexible and stretchable packaging for microelectronics are provided. Configurations of flexible, stretchable, and twistable microelectronic packages are achieved by rendering chip layouts, including processors and memories, in distributed collections of dielets implemented on flexible and/or stretchable media. High-density communication between the dielets is achieved with various direct-bonding or hybrid bonding techniques that achieve high conductor count and very fine pitch on flexible substrates. An example process uses high-density interconnects direct-bonded or hybrid bonded between standard interfaces of dielets to create a flexible microelectronics package. In another example, a process uses high-density interconnections direct-bonded between native interconnects of the dielets to create the flexible microelectronics packages, without the standard interfaces.
Methods for producing 3D semiconductor memory device and structure utilizing alignment marks
A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits in and on the first level, where the control circuits include first single crystal transistors, where the control circuits include at least two metal layers; forming at least one second level disposed on top of the first level; performing a first etch step within the second level; forming at least one third level disposed on top of the at least one second level; performing a second etch step within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the first memory cells include second transistors, and where the second memory cells include third transistors.