A polarization volume grating (PVG) includes a bulk, birefringent medium characterized by a plurality of helical structures with helix axes and a periodicity Λ.sub.y and an anisotropic alignment material having a rotatable optical axis, disposed on a top or bottom surface of the medium. The PVG is characterized in that the optical axis of the alignment material has a continuously rotated optical axis orientation in a plane of the material surface and a periodicity Λ.sub.x, wherein the helix axes are normal to the optical axes in the alignment material surface, further wherein the birefringent medium is characterized by a plurality of controllably slanted refractive index planes having a slant angle φ=±arctan (Λ.sub.y/Λ.sub.x) and a Bragg period Λ.sub.B. Fabrication methods are disclosed.

Systems, methods, and other embodiments for a new compact narrowband diode-pumped solid-state laser device enabled by Volume Bragg Grating (VBG) technology and capable of operating at the watt or higher output power level. This laser is stable, operates in a transverse electromagnetic (TEM) output mode, and with a single-narrowband (<1 kHz FWHM) longitudinal mode with acceptable relative intensity noise (RIN) performance from 1-100 GHz. In a preferred embodiment of the present invention, the TEM output mode is a TEM.sub.00 Gaussian output mode.

A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes.

Provided is a swept light source including one end surface coupled to a wavelength filter constituted of a diffraction grating and an end mirror via a light deflector and another end surface including a gain medium facing an output coupling mirror and which configures a laser cavity between the end mirror and the output coupling mirror, wherein a drive voltage having an AC voltage on which a DC bias voltage is superimposed is output from a control voltage source of the light deflector to an electrode pair of an electro-optic crystal, light is radiated from a light emitter to the electro-optic crystal, and incident light from the gain medium incident along an optical axis perpendicular to a direction of an electric field formed by the control voltage is deflected in a direction parallel to the electric field, so that wavelength sweeping is performed.

In various embodiments, laser apparatuses include thermal bonding layers between various components and sealing materials for preventing or retarding movement of thermal bonding material out of the thermal bonding layers.

A line narrowing module includes an enclosure, a prism which is disposed in an internal space of the enclosure and through which light passes, a mounter which is disposed in the internal space and on which the prism is mounted, a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and a light blocking member. The light blocking member is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.

A line narrowing gas laser device includes a line narrowing device, an output coupling mirror, a laser chamber arranged on an optical path of an optical resonator, a first holder which supports the output coupling mirror, a second holder which supports the first holder to be rotatable about a rotation axis of the first holder, and an adjustment device supported by the second holder and being in contact with the first holder to rotate the first holder about the rotation axis. The line narrowing device has a characteristic of changing, into a first direction, beam pointing of laser light output toward the output coupling mirror when temperature inside the line narrowing device rises. The second holder and the adjustment device rotate the first holder in a direction in which a change in the first direction in the beam pointing of the laser light is suppressed by thermal expansion.

An excimer laser chamber device may include: a the laser chamber; a first electrode provided in the laser chamber; a second electrode provided in the laser chamber to face the first electrode; an electrode holder provided in the laser chamber to be connected to a high voltage; at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder; a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode; and an electrode-gap-varying unit configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.

A discharge excitation gas laser device may include a laser chamber in which a laser gas containing a halogen gas is encapsulated, a pair of discharge electrodes disposed to face each other inside the laser chamber, a fan disposed inside the laser chamber to make the laser gas flow between the pair of discharge electrodes, a motor for rotating the fan, a motor power supply for supplying power to the motor, a magnetic bearing configured to levitate the rotary shaft of the fan magnetically, a displacement sensor for detecting the position of the rotary shaft through a can, and a controller configured to measure the rotational speed of the fan on the basis of a detection signal from the displacement sensor and control the motor power supply in such a manner that the measured rotational speed becomes a target rotational speed.

A high-voltage pulse generator may include a number “n” (n is a natural number of not less than 2) of primary electric circuits connected in parallel to one another on the primary side of a pulse transformer, and a secondary electric circuit of the pulse transformer, which is connected to a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus. The “n” primary electric circuits may include a number “n” of primary coils connected in parallel to one another, a number “n” of capacitors respectively connected in parallel to the “n” primary coils, and a number “n” of switches respectively connected in series to the “n” capacitors. The “n” primary electric circuits may be connected to a number “n” of chargers for charging the “n” capacitors, respectively. The secondary electric circuit may include a number “n” of secondary coils connected in series to one another, and a number “n” of diodes each connected to opposite ends of each of the “n” secondary coils, to prevent a reverse current flowing from the pair of discharge electrodes toward the secondary coils.