Patent classifications
H01S3/0973
High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method
A high voltage pulse generation device includes n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction; n primary electric circuits of the transformer connected in parallel to each other, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2; and a secondary electric circuit of the transformer including a secondary coil and connected to a pair of discharge electrodes.
High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method
A high voltage pulse generation device includes n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction; n primary electric circuits of the transformer connected in parallel to each other, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2; and a secondary electric circuit of the transformer including a secondary coil and connected to a pair of discharge electrodes.
Laser device and method for operating laser device
A laser device includes: a traveling wave type resonator comprising a first mirror and a second mirror; and a laser medium disposed between the first mirror and the second mirror. The first mirror and the second mirror are disposed such that round-trip light that travels in round trips in the resonator has a focus inside the laser medium. The laser device is configured such that: excitation light incident on the resonator is superimposed on the round-trip light at the focus and narrowed to be thinner than the round-trip light, Z.sub.R<0.5 is satisfied, where Z.sub.R is a Rayleigh length of the excitation light and is an absorption coefficient of the laser medium with respect to the excitation light, and a round-trip Gouy phase shift of the resonator has a value excluding 2n/m where m is an integer of less than 15 and n is an integer of equal to or less than m.
Laser device and method for operating laser device
A laser device includes: a traveling wave type resonator comprising a first mirror and a second mirror; and a laser medium disposed between the first mirror and the second mirror. The first mirror and the second mirror are disposed such that round-trip light that travels in round trips in the resonator has a focus inside the laser medium. The laser device is configured such that: excitation light incident on the resonator is superimposed on the round-trip light at the focus and narrowed to be thinner than the round-trip light, Z.sub.R<0.5 is satisfied, where Z.sub.R is a Rayleigh length of the excitation light and is an absorption coefficient of the laser medium with respect to the excitation light, and a round-trip Gouy phase shift of the resonator has a value excluding 2n/m where m is an integer of less than 15 and n is an integer of equal to or less than m.