Patent classifications
H01S3/137
CURRENT CONTROL DEVICE AND LASER DEVICE
A current control device supplies a current to a semiconductor laser in order to output laser light to the semiconductor laser, and includes a current commander and a supplier. The current commander outputs a command value corresponding to a current value by increasing the command value with a lapse of time until reaching a target command value corresponding to a current value for outputting the laser light with a predetermined strength. The supplier supplies a current with a size corresponding to the command value output by the current commander to the semiconductor laser.
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
A laser device includes a first actuator configured to adjust an oscillation wavelength of pulse laser light; a second actuator configured to adjust a spectral line width of the pulse laser light; and a processor configured to determine a target spectral line width by reading data specifying a number of irradiation pulses of the pulse laser light with which one location of an irradiation receiving object is irradiated and a difference between a shortest wavelength and a longest wavelength, control the second actuator based on the target spectral line width, and control the first actuator so that the oscillation wavelength periodically changes every number of the irradiation pulses between the shortest wavelength and the longest wavelength.
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
A laser device includes a first actuator configured to adjust an oscillation wavelength of pulse laser light; a second actuator configured to adjust a spectral line width of the pulse laser light; and a processor configured to determine a target spectral line width by reading data specifying a number of irradiation pulses of the pulse laser light with which one location of an irradiation receiving object is irradiated and a difference between a shortest wavelength and a longest wavelength, control the second actuator based on the target spectral line width, and control the first actuator so that the oscillation wavelength periodically changes every number of the irradiation pulses between the shortest wavelength and the longest wavelength.
LASER ADJUSTMENT METHOD AND LASER SOURCE DEVICE
A laser adjustment method includes a first adjustment step and a second adjustment step. In the first adjustment step, using a light detector detecting a second harmonic light, optical intensity and wavelength of the second harmonic light is detected and a first temperature adjuster is adjusted to adjust temperatures of a Nd:YVO.sub.4 crystal and a KTP crystal such that the detected wavelength of the second harmonic light approaches a desired wavelength and such that the optical intensity of the second harmonic light reaches at least a predetermined value. In the second adjustment step, after the first adjustment step, a temperature of an etalon is adjusted by a second temperature adjuster such that the detected wavelength of the second harmonic light approaches the desired wavelength and such that the optical intensity of the second harmonic light reaches at least a predetermined value.
LASER ADJUSTMENT METHOD AND LASER SOURCE DEVICE
A laser adjustment method includes a first adjustment step and a second adjustment step. In the first adjustment step, using a light detector detecting a second harmonic light, optical intensity and wavelength of the second harmonic light is detected and a first temperature adjuster is adjusted to adjust temperatures of a Nd:YVO.sub.4 crystal and a KTP crystal such that the detected wavelength of the second harmonic light approaches a desired wavelength and such that the optical intensity of the second harmonic light reaches at least a predetermined value. In the second adjustment step, after the first adjustment step, a temperature of an etalon is adjusted by a second temperature adjuster such that the detected wavelength of the second harmonic light approaches the desired wavelength and such that the optical intensity of the second harmonic light reaches at least a predetermined value.
LINE NARROWING MODULE, GAS LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
A line narrowing module includes an enclosure, a prism which is disposed in an internal space of the enclosure and through which light passes, a mounter which is disposed in the internal space and on which the prism is mounted, a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and a light blocking member. The light blocking member is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.
LINE NARROWING MODULE, GAS LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
A line narrowing module includes an enclosure, a prism which is disposed in an internal space of the enclosure and through which light passes, a mounter which is disposed in the internal space and on which the prism is mounted, a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and a light blocking member. The light blocking member is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.
Tunable narrow-linewidth single-frequency linear-polarization laser device
A tunable narrow-linewidth single-frequency linear-polarization laser device comprising a heat sink, a pumping source packaged on the heat sink, a first and second collimating lenses, a laser back cavity mirror, a thermal optical tunable filter, a rare-earth-ion heavily-doped multicomponent glass optical fiber, a super-structure polarization-maintaining fiber grating, a polarization-maintaining optical isolator, a polarization-maintaining optical fiber, and a thermoelectric refrigerating machine. The laser device uses a short and straight single-frequency resonant cavity structure, the heavily-doped and high-gain characteristics of the multicomponent glass optical fiber, a frequency selection role and wavelength tuning function of the thermal optical tunable filter and the superstructure polarization-maintaining fiber grating, and combines a precision temperature adjustment technology, and by means of real-time adjustment of distribution of reflection wavelengths and transmission wavelengths, the laser device changes spectrum peak overlapping positions, so as to implement stable output of wide-tuning-range, extra-narrow-linewidth, high-extinction-ratio and high-output-power continuously tunable single-frequency linear-polarization laser.
Tunable narrow-linewidth single-frequency linear-polarization laser device
A tunable narrow-linewidth single-frequency linear-polarization laser device comprising a heat sink, a pumping source packaged on the heat sink, a first and second collimating lenses, a laser back cavity mirror, a thermal optical tunable filter, a rare-earth-ion heavily-doped multicomponent glass optical fiber, a super-structure polarization-maintaining fiber grating, a polarization-maintaining optical isolator, a polarization-maintaining optical fiber, and a thermoelectric refrigerating machine. The laser device uses a short and straight single-frequency resonant cavity structure, the heavily-doped and high-gain characteristics of the multicomponent glass optical fiber, a frequency selection role and wavelength tuning function of the thermal optical tunable filter and the superstructure polarization-maintaining fiber grating, and combines a precision temperature adjustment technology, and by means of real-time adjustment of distribution of reflection wavelengths and transmission wavelengths, the laser device changes spectrum peak overlapping positions, so as to implement stable output of wide-tuning-range, extra-narrow-linewidth, high-extinction-ratio and high-output-power continuously tunable single-frequency linear-polarization laser.
SYSTEM AND METHOD FOR FREQUENCY MATCHING A RESONANCE CAVITY TO A LIGHT SOURCE
A method and system for frequency matching a resonant cavity is disclosed. Light is received in a resonant cavity having at least a first mirror and a second mirror defining a path along which light is reflected. At least the second mirror is actuatable to vary the length of the path of the resonant cavity. An intensity of the light exiting or reflecting from the resonant cavity is monitored, and an error correction is determined. The second mirror is actuated towards a pose relative to the first mirror at which a frequency of the light is in resonance with the length of the path. In this manner, the resonant cavity is frequency matched to the light to maintain the resonant cavity in resonance.