Patent classifications
H03H9/02834
RADIO-FREQUENCY MODULE AND COMMUNICATION APPARATUS
A radio-frequency module includes a first base made of a first semiconductor material; a second base that is made of a second semiconductor material having a thermal conductivity lower than that of the first semiconductor material and which includes a power amplifier circuit; a third base including a transmission filter circuit; and a module substrate having a main surface on which the first base, the second base, and the third base are arranged. The first base is joined to the main surface via an electrode. The second base is arranged between the module substrate and the first base in a sectional view and is joined to the main surface via an electrode. At least part of the first base is overlapped with at least part of the second base and at least part of the third base in a plan view.
Suspending an Electrode Structure Using a Dielectric
An apparatus is disclosed for suspending an electrode structure using a dielectric. In an example aspect, the apparatus includes a surface-acoustic-wave filter with a piezoelectric layer and an electrode structure. The electrode structure has a first surface facing the piezoelectric layer and separated from the piezoelectric layer by a distance. The surface-acoustic-wave filter also includes a dielectric disposed on at least one other surface of the electrode structure and configured to extend past a plane defined by the first surface of the electrode structure and toward the piezoelectric layer to define a cavity between at least a portion of the first surface of the electrode structure and the piezoelectric layer.
Acoustic wave element and method for manufacturing same
An acoustic wave element which can be reduced in size and produced relatively easily, practically used without using harmful substances, and can suppress a surface acoustic wave propagation loss, which has an excellent temperature coefficient of frequency and a velocity dispersion characteristic, and with which an increase in the reflection coefficient of interdigital transducers can be suppressed, and a method for manufacturing the acoustic wave element are provided. The acoustic wave element includes a pair of electrodes provided on both surfaces of a piezoelectric substrate, and a dielectric film provided on a first surface of the piezoelectric substrate so as to cover the electrode. The acoustic wave element alternatively includes interdigital transducers provided on a first surface of the piezoelectric substrate, and a dielectric film provided on the interdigital transducers, a gap between the interdigital transducers, and/or a second surface of the piezoelectric substrate.
BONDED BODY AND ACOUSTIC WAVE ELEMENT
A bonded body includes a supporting substrate, piezoelectric material substrate and a multilayer film, between the supporting substrate and piezoelectric material substrate. The multilayer film includes a lamination structure having a first layer, second layer, third layer and fourth layer in the order. The first layer and third layer are composed of silicon oxides, and the second layer and fourth layer are composed of metal oxides. The refractive index of the second layer is higher than the refractive index of the first layer and refractive index of the third layer. The refractive index of the second layer is different from the refractive index of the fourth layer.
LAYERED TEMPERATURE-COMPENSATED SURFACE ACOUSTIC WAVE RESONATOR AND PACKAGING METHOD
A layered temperature-compensated surface acoustic wave resonator. The layered temperature-compensated surface acoustic wave resonator includes a substrate layer, a temperature compensation layer, a piezoelectric film layer and an electrode layer. The temperature compensation layer is located between the substrate layer and the piezoelectric film layer; the substrate layer and the temperature compensation layer are integrated by wafer bonding, and the temperature compensation layer and the piezoelectric film layer are integrated by wafer bonding. The electrode layer is arranged on a surface of the piezoelectric film layer. The temperature compensation layer is made of a positive temperature coefficient material.
ACOUSTIC WAVE DEVICE
An acoustic wave device includes a high acoustic velocity structure, a low acoustic velocity layer on the high acoustic velocity structure, a piezoelectric layer directly or indirectly on the low acoustic velocity layer, and an electrode on the piezoelectric layer. The low acoustic velocity layer is made of a dielectric material having a lower Young's modulus than silicon oxide, or includes the dielectric material as a main component.
Surface-Acoustic-Wave (SAW) Filter with an Electrical Conductor Having a Floating Potential
An apparatus is disclosed for a surface-acoustic-wave filter with an electrical conductor having a floating potential. In an example aspect, the apparatus includes a surface-acoustic-wave filter with a piezoelectric layer and an electrode structure disposed on a surface of the piezoelectric layer. The electrode structure includes a first comb-shaped structure and a second comb-shaped structure. The electrode structure also includes at least one electrical conductor positioned between the first comb-shaped structure and the second comb-shaped structure such that a gap separates the at least one electrical conductor from the first comb-shaped structure and the second comb-shaped structure.
SAW DEVICE WITH IMPROVED THERMAL MANAGEMENT
This invention focuses on minimizing the hot spots on a filter chip by creating thermal radiators using the mechano-acoustic structures and connection circuitry. A gradual increase of metal to wafer relation is made to provide better heat dissipation and heat sinking. Preferably the shunt lines of the ladder type arrangement of SAW resonators (RS1, RS2, RS3) comprise a broadened section (BBCN). Each two series resonators (RS1, RS2, RS3) that are subsequent to each other in the series signal line are connected via a common busbar (BBCN) extending over a whole length of that subsequent series resonators, a lateral extension of the common busbars represents a first section of a respective shunt line each, each first shunt line section between a node and the parallel resonator (RP1, RP2) of a shunt line (SLS1) comprises a broadened section (BS) that is broader than the common busbar, the broadened section extends over the whole width of the parallel resonator (RP1), the first reflector (REF1) of the parallel resonator that faces the laterally adjacent series resonator is formed from the broadened section (BS).
Acoustic wave device and composite filter apparatus
An acoustic wave device includes a (111)-oriented silicon substrate, a silicon nitride layer, a silicon oxide layer, a lithium tantalate layer, and an IDT electrode on the lithium tantalate layer. When the wavelength determined by the electrode finger pitch of the IDT electrode is λ, the thickness of the silicon nitride layer, SiN [λ], the thickness of the silicon oxide layer, SiO.sub.2 [λ], the thickness of the lithium tantalate layer, LT [λ], and one of the Euler angles of the lithium tantalate layer, LTθ [deg.], are thicknesses and an angle in ranges in which the phase of a first higher-order mode is about −20° or less.
SURFACE ACOUSTIC WAVE DEVICE AND ASSOCIATED PRODUCTION METHOD
A production method for a surface acoustic wave device comprises the following steps: a step of providing a piezoelectric substrate comprising a transducer arranged on the main front face; a step of depositing a dielectric encapsulation layer on the main front face of the piezoelectric substrate and on the transducer; and a step of assembling the dielectric encapsulation layer with the main front face of a support substrate having a coefficient of thermal expansion less than that of the piezoelectric substrate. In additional embodiments, a surface acoustic wave device comprises a layer of piezoelectric material equipped with a transducer on a main front face, arranged on a substrate support of which the coefficient of thermal expansion is less than that of the piezoelectric material. The transducer is arranged in a dielectric encapsulation layer, between the layer of piezoelectric material and the support substrate.