The inventive concept provides a nozzle for dispensing a treatment liquid in which plasma is generated. The nozzle includes a body having an interior space, a liquid supply unit that supplies the treatment liquid into the interior space, and electrodes that generate the plasma in the interior space. The liquid supply unit supplies the treatment liquid in a bubbling state into the interior space, or causes the treatment liquid to bubble in the interior space.

A dielectric barrier discharge reactor for catalytic nonthermal plasma production of hydrogen from methane. The dielectric barrier discharge reactor includes two end pieces connected by a dielectric tube, two steam generators, two catalyst cages, two perforated tube center electrodes, a center electrode rod, a grounding electrode. In one aspect, the end pieces and the dielectric tube are fabricated from ceramic and fused quartz respectively. In another aspect, the dielectric barrier discharge reactor further includes catalyst cages. In yet another aspect, the catalyst cages contain catalysts in form of pellets. In an alternate aspect, the dielectric barrier discharge reactor acts to cause a reaction between incoming reactant gases. The reaction is achieved under a plasma which is generated between the perforated tubular center electrode and the ground electrode. In yet another alternate aspect, the dielectric barrier discharge reactor is used at home to generate hydrogen from methane.

An apparatus configured to reduce drag is provided. The apparatus includes a plasma actuator including a hollow cylinder with two open bases, a first electrode disposed inside the cylinder, a second electrode disposed outside the cylinder, and a plasma layer disposed inside the cylinder next to the first electrode, a surface including the plasma actuator disposed on the surface, and a motion actuator configured to move the plasma actuator in a sweeping motion across a face of the surface.

Described herein are apparatus and methods of printing in the presence of plasma. The apparatus includes a modular print head comprising an inlet module, a plasma module with movable electrode configurations, and a nozzle module. The modular design of the print head allows for printing on and treatment of surfaces in many different applications.

Embodiments disclosed herein include a plasma source, an abatement system and a vacuum processing system for abating compounds produced in semiconductor processes. In one embodiment, a plasma source includes a dielectric tube and a coil antenna surrounding the tube. The coil antenna includes a plurality of turns, and at least one turn is shorted. Selectively shorting one or more turns of the coil antenna helps reduce the inductance of the coil antenna, allowing higher power to be supplied to the coil antenna that covers more processing volume. Higher power supplied to the coil antenna and larger processing volume lead to an improved DRE.

Described herein are apparatus and methods of printing in the presence of plasma. The apparatus includes a modular print head comprising an inlet module, a plasma module with movable electrode configurations, and a nozzle module. The modular design of the print head allows for printing on and treatment of surfaces in many different applications.

A gas passing groove, a high-voltage electrode groove, and a ground electrode groove provided to an electrode unit base are each helical in plan view. An electrode unit lid is placed on a front surface of the electrode unit base so that a high-voltage conduction hole and a high-voltage conduction point coincide with each other in plan view. An electrode cooling plate is placed on a front surface of the electrode unit lid so that a high-voltage opening includes the high-voltage conduction hole as a whole in plan view. The electrode unit lid and the electrode cooling plate are placed on the front surface of the electrode unit base so that a ground conduction groove, a ground conduction hole, and a ground conduction point coincide with one another in plan view.

A BID includes: a discharger (2) including a dielectric pipe (8) and a pair of electrodes (14, 16) attached on an outer wall of the dielectric pipe, the pair of electrodes (14, 16) being arranged at a distance from each other in a direction along a central axis of the dielectric pipe (8), the discharger (2) being arranged so that plasma generating gas is introduced from a first end of the dielectric pipe (8) and configured to generates dielectric barrier discharge inside the dielectric pipe (8) to generate plasma; a detection section (4) including a sample gas introduction section (31) and a collection electrode (26) for collecting ions, the detection section (4) being configured to ionize components in the sample gas using light emitted from the plasma generated in the discharger (2) and to detect the generated ions by collecting them using the collection electrode (26); and a voltage supply (6; 6) for generating a potential difference between the pair of electrodes (14, 16).

A pathogen and pest exterminating device that can efficiently exterminate pathogens and pests in a shorter time. One electrode includes a part to be inserted into a reaction vessel, and other electrode is arranged in a position that opposes the insertion part. A water supply unit is provided to supply water to the reaction vessel through the insertion part, and a gas supply unit provided of supplying gas, which will become plasma, to the reaction vessel. A power supply unit is provided to be capable of applying voltage between the insertion part and the other electrode such that OH radicals are generated inside the reaction vessel to which the water and the gas are supplied. The insertion part is formed in a shape that restricts, between itself and the other electrode, a flow rate of water from the water supply unit such as a coil, waveform, or mesh shape.

An apparatus configured to reduce drag is provided. The apparatus includes a plasma actuator including a hollow cylinder with two open bases, a first electrode disposed inside the cylinder, a second electrode disposed outside the cylinder, and a plasma layer disposed inside the cylinder next to the first electrode, a surface including the plasma actuator disposed on the surface, and a motion actuator configured to move the plasma actuator in a sweeping motion across a face of the surface.