Patent classifications
H05H1/463
Microwave plasma source
The disclosure provides a plasma source and an excitation system for excitation of a plasma, and an optical monitoring system. In one embodiment the plasma source includes: (1) a coaxial resonant cavity body having an inner length, and including a first end, a second end, an inner electrode and an outer electrode, (2) a radio frequency signal interface electrically coupled to the inner and outer electrodes at a fixed position along the inner length and configured to provide a radio frequency signal to the coaxial resonant cavity body, (3) a window positioned at the first end of the coaxial resonant cavity body, and (4) a mounting flange positioned proximate the window at the first end of the coaxial resonant cavity body and defining a plasma cavity, wherein the window forms one side of the plasma cavity and isolates the coaxial resonant cavity body from plasma in the plasma cavity.
COMPOUND DOUBLE COAXIAL LINE ATMOSPHERIC PRESSURE LOW-TEMPERATURE MICROWAVE PLASMA JET SOURCE
A compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source includes an outer coaxial line, and an inner coaxial line arranged inside the outer coaxial line. The outer coaxial line includes a tube body. A metal tube is arranged in the tube body. A short-circuit plunger is arranged at the bottom of the metal tube. The inner coaxial line includes a needle electrode, and the needle electrode is arranged in the metal tube. A first gas inlet is arranged on the tube body, and the first gas inlet is connected between the tube body and the metal tube. A second gas inlet is arranged at the bottom of the metal tube, and the second gas inlet is connected between the metal tube and the needle electrode. The tube body is further provided with a microwave input port, and the microwave input port is connected to the metal tube.
ELECTRIC FIELD SENSOR, SURFACE WAVE PLASMA SOURCE, AND SURFACE WAVE PLASMA PROCESSING APPARATUS
An electric field sensor includes a probe, a cylindrical probe guide, an insulating member, a preload spring and a connector. The probe serves as an inner conductor of a coaxial transmission path and has a portion forming a monopole antenna at a tip end to be in constant contact with a microwave transmission window by a pressing force of a built-in spring thereof. The probe guide is disposed at an outer side of the probe and serves as an outer conductor of the coaxial transmission path. The insulating member is disposed between the probe and the probe guide. The preload spring preloads the probe guide downward and presses the probe guide so that the tip end of the probe guide comes in constant contact with the planar slot antenna. The connector is connected to the probe and the probe guide to connect coaxial signal cables for extracting signals.
THERMAL BREAK FOR HIGH-FREQUENCY ANTENNAE
Embodiments disclosed herein include a high-frequency emission module. In an embodiment, the high-frequency emission module comprises a solid state high-frequency power source, an applicator for propagating high-frequency electromagnetic radiation from the power source, and a thermal break coupled between the power source and the applicator. In an embodiment, the thermal break comprises a substrate, a trace on the substrate, and a ground plane.
Plasma source
The invention concerns a plasma source including a quarter wave antenna (204) located in a cylindrical enclosure (202) provided with an opening (208) opposite the end of the antenna (204). The diameter (d) of the antenna (204) is in the range from one third to one quarter of the inner diameter (d.sub.1) of the enclosure (202). The distance (l) between the end of the antenna (204) and the opening (208) is in the range from to 5/3 of the diameter (d) of the antenna (204).
Hand-type low temperature microwave plasma generator
Provided is a hand-type low temperature microwave plasma generator that is configured to implement plasma even in a low power state, and be easily applied to various small devices using microwave plasma including medical treatment and the like of wound treatment or cell treatment.
MICROWAVE PLASMA SOURCE
In a microwave plasma source, a tubular magnet portion has a first opening end and a second opening end. The first opening end has a first polarity, and the second opening end has a second polarity. The tubular body is surrounded by the tubular magnet portion. A first magnetic circuit portion closes the first opening end. A second magnetic circuit portion is disposed opposite to the first magnetic circuit portion. The second magnetic circuit portion has a first opening part. An antenna penetrates the first magnetic circuit portion, is introduced to a space, and supplies microwave power to the space. The nozzle portion has a second opening part that has a smaller opening area than the first opening part and communicates with the first opening part. When an inner diameter of the tubular body is represented by a (mm), and a microwave cutoff wavelength of the microwave power being supplied to the space is represented by (mm), the microwave plasma source is configured to satisfy a relational expression >3.41(a/2).
Systems and methods for modifying and enhancing pyrotechnic emissions and effects by irradiating pyrotechnic emissions using electromagnetic radiation sources with programmable electromagnetic radiation profiles
Exemplary systems and methods for modifying and enhancing pyrotechnic emissions and effects are provided including systems for irradiating pyrotechnic emissions using electromagnetic radiation sources with programmable electromagnetic radiation profiles. Exemplary systems include coupling an electromagnetic radiation source to a pyrotechnic device to irradiate pyrotechnic emissions or irradiating pyrotechnic emissions with an external electromagnetic radiation source. Exemplary methods include identifying a desired pyrotechnic emission output and designing an emission and effect output to meet the desired output.
Apparatus and method for depositing a coating on a substrate at atmospheric pressure
An apparatus for depositing a coating on a substrate at atmospheric pressure comprises (a) a plasma torch comprising a microwave source coupled to an antenna disposed within a chamber having an open end, the chamber comprising a gas inlet for flow of a gas over the antenna to generate a plasma jet; (b) a substrate positioned outside the open end of the chamber a predetermined distance away from a tip of the antenna; and (c) a target material to be coated on the substrate disposed at the tip of the antenna.
Control system for a microwave electrothermal thruster
A microwave electrothermal thruster (MET) and its control system is disclosed and claimed. The MET control system uses a dielectric resonator oscillator (DRO) in series with a GaN MMIC-based Solid State Power Amplifier (SSPA) to generate microwave energy, transfer it to a thrust chamber, and heat a propellant that exits a nozzle, providing thrust. The control system uses feedback to provide autonomous control of the MET. A wide variety of propellants may be used, including, for example, hydrazine, ammonia, and water.