A high temperature plasma generating system has a magnetron joined to a frustoconical waveguide reflector. An antenna is set on a cavity magnetron tube and extends the length of the antenna. Applying electrical power to the magnetron creates multipactor in the frustoconical waveguide reflector, generating plasma focused at the tip of the extended magnetron antenna.

A hybrid plasma source and an operation method thereof, the hybrid plasma source is formed by combining the mechanisms of microwave plasma and transformer coupled plasma for gas dissociation and chemical activation. A reaction chamber of the hybrid plasma source is composed of two microwave resonant chambers and sets of hollow metal tubes, after a high-intensity electric field is generated by the microwave resonant chambers to generate a plasma, a high power and high density plasma generated by the highly-efficient coupling mechanism of the transformer coupled plasma is capable of greatly improving a gas conductance, each set of the hollow metal tubes is driven by each set of ferrite transformer magnetic cores to disperse power, which reduces an energy density of each of the hollow metal tubes and reduces occurrence of plasma entering a contraction mode from a diffusion mode, thereby further improving an operable gas flow rate.

The impedance of an antenna is reduced and gaps generated between electrodes constituting a capacitance element and a dielectric body are eliminated. An antenna (3) for generating inductively coupled plasma P includes at least two conductor elements (31), an insulation element (32) that is arranged between the mutually adjacent conductor elements (31) and insulates the conductor elements (31), and a capacitance element (33) that is connected electrically to and in series with the mutually adjacent conductor elements (31). The capacitance element (33) is configured from a first electrode (33A) electrically connected to one of the mutually adjacent conductor elements (21), a second electrode (33B) electrically connected to the other of the mutually adjacent conductor elements (21), and a liquid dielectric body filling the space between the first electrode (33A) and the second electrode (33B).

An example system and corresponding method can include a combustion chamber of jet engine, a radio-frequency power source, and a resonator. The combustion chamber can include a liner defining a combustion zone, and include a fuel inlet configured to introduce fuel into the combustion zone. The resonator can have a resonant wavelength and include: a first conductor, a second conductor, a dielectric, and an electrode coupled to the first conductor. The resonator can be configured such that, when the resonator is excited by the radio-frequency power source with a signal having a wavelength proximate to an odd-integer multiple of one-quarter () of the resonant wavelength, the resonator provides a plasma corona in the combustion zone. The controller can be configured to cause the radio-frequency power source to excite the resonator with the signal so as to provide the plasma corona.

A device for producing a plasma, configured to generate a plasma from a reaction gas, wherein the device for producing a plasma comprises a microwave generator operating at a given source frequency comprised within a microwave frequency range and a waveguide coupled to the microwave generator and configured to guide an excitation wave. The device also includes a dielectric tube extending longitudinally along an axis of extension, the dielectric tube being configured to receive the plasma, such as the dielectric tube passes right through the waveguide; and a reaction gas injection unit configured to introduce the reaction gas into the dielectric tube.

A plasma-generation system is provided that includes a variable-frequency microwave generator configured to generate microwave power and a plasma applicator configured to use the microwave power from the microwave generator to (i) ignite a process gas therein for initiating a plasma in a plasma ignition process and (ii) maintain the plasma in a steady state process. The system also includes a coarse tuner connected between the microwave generator and the plasma applicator. At least one physical parameter of the coarse tuner is adapted to be set to achieve coarse impedance matching between the microwave generator and the plasma generated during both the plasma ignition process and the steady state process. A load impedance of the plasma generated during the plasma ignition process and the steady state process is adapted to vary. The microwave generator is configured to tune an operating frequency at the set physical parameter of the coarse tuner.

An analytical device includes: a reaction unit into which an ion derived from a sample component is introduced; a radical generation unit that generates a radical by vacuum discharge and comprises a raw material introduction chamber into which a plasma raw material is introduced; a connection part that introduces the radical generated in the radical generation unit into a vacuum chamber, the vacuum chamber having a pressure lower than a pressure of the raw material introduction chamber and being connected to the reaction unit; and a separation unit that separates a generated ion generated by a reaction with the radical introduced via the connection part into the reaction unit according to m/z and/or ion mobility, wherein an inner diameter of a cross section of the connection part is equal to or less than 20 millimeters.

A plasma processing apparatus includes: a processing container which defines a processing space; a microwave generator; a dielectric having an opposing surface which faces the processing space; a slot plate formed with a plurality of slots; and a heating member provided within the slot plate. The slot plate is provided on a surface of the dielectric at an opposite side to the opposing surface to radiate microwaves for plasma excitation to the processing space through the dielectric based on the microwaves generated by the microwave generator.

A plasma reactor includes a chamber body having an interior space that provides a plasma chamber, a gas distribution port to deliver a processing gas to the plasma chamber, a workpiece support to hold a workpiece, an antenna array comprising a plurality of monopole antennas extending partially into the plasma chamber, and an AC power source to supply a first AC power to the plurality of monopole antennas. The plurality of monopole antennas are divided into a plurality of groups of monopole antennas, and the AC power source is configured to generate AC power on a plurality of power supply lines at a plurality of different phases, and different groups of monopole antennas are coupled to different power supply lines.

Example implementations relate to electromagnetic wave modification of fuel in a jet engine. An example implementation includes a jet engine. The jet engine includes a combustion chamber, a radio-frequency power source, and a fuel conduit configured to provide a fuel to the combustion chamber. In addition, the jet engine includes a resonator configured to electromagnetically couple to the radio-frequency power source and having a resonant wavelength. The resonator includes a first conductor, a second conductor, and a dielectric between the first conductor and the second conductor. The resonator is configured such that, when the resonator is excited by the radio-frequency power source with a signal having a wavelength proximate to an odd-integer multiple of one-quarter () of the resonant wavelength, the resonator radiates electromagnetic waves usable to modify (i) the fuel within the fuel conduit or (ii) a fuel mixture, which includes the fuel, within the combustion chamber.