A plasma reactor includes a chamber body having an interior space that provides a plasma chamber, a gas distribution port to deliver a processing gas to the plasma chamber, a workpiece support to hold a workpiece, an antenna array comprising a plurality of monopole antennas extending partially into the plasma chamber, and an AC power source to supply a first AC power to the plurality of monopole antennas.

Provided are an RF power distribution device and an RF power distribution method. The RF power distribution device includes an impedance matching network for transferring power from an RF power source and a power distribution unit for distributing the output power from the impedance matching network to at least one electrode generating capacitively-coupled plasma. The power distribution unit includes a first reactive element connected in series to a first electrode, a variable capacitor having one end connected in parallel to the first reactive element and the first electrode and the other end grounded, and a second reactive element having one end connected to a first node where the one end of the variable capacitor and one end of the first reactance device are in contact with each other and the other end connected to a second node where a second electrode and an output terminal of the impedance matching network are connected.

A switching device includes a first electrode at least partially disposed within a sealed chamber. The sealed chamber encloses a plasma phase change material. The switching device includes a second electrode at least partially disposed within the sealed chamber. The second electrode is physically separated from the first electrode. When subjected to a signal that satisfies a threshold, the plasma phase change material forms a plasma within the sealed chamber. The first electrode is electrically coupled to the second electrode via the plasma when the plasma is formed. The first electrode is electrically isolated from the second electrode when the plasma is not formed. The switching device includes a first connector electrically coupled to the first electrode and a second connector electrically coupled to the second electrode. The first connector, the second connector, or both, are configured to receive the signal.

The invention relates to a method (S) for generating a plurality of cold-plasma jets at atmospheric pressure in order to treat a target (2), wherein said method includes the following steps: producing (S1) a primary cold-plasma jet (3) at atmospheric pressure using a plasma source (10); placing (S2) a substrate (20, 21, 30, 32, 34) near the target (2) to be treated, said substrate (20, 21, 30, 32, 34) including at least two through-holes; and passing (S3) the plasma through the through-holes (22) of the substrate (20) such as to generate at least two secondary cold-plasma jets (4) at atmospheric pressure.

The present disclosure provides a liquid treatment device and a liquid treatment method each capable of efficiently generating plasma and treating a liquid in a short time period. A liquid treatment device according to the present disclosure includes a first electrode, a second electrode disposed in a liquid, an insulator disposed surrounding the first electrode through a space, the insulator having an opening portion at a position in contact with the liquid, and a power supply that applies an AC voltage or a pulse voltage between the first electrode and the second electrode.

An ICP torch includes an injector tube defining an injector flow passage to receive a flow of a sample fluid, an intermediate tube disposed about the injector tube, a plasma tube disposed about the intermediate tube, and an induction coil disposed about the plasma tube. An auxiliary gas passage is defined between the injector tube and the intermediate tube to receive a flow of an auxiliary gas. A plasma gas passage is defined between the intermediate tube and the plasma tube to receive a flow of a plasma gas. The induction coil can produce a plasma proximate a torch distal end. The induction coil extends axially from a coil proximal end to a coil distal end proximate the torch distal end. The plasma tube includes an outlet opening proximate the torch distal end. The outlet opening is at least partially coincident with or axially inset from the coil distal end.

The present disclosure provides an apparatus including a chamber body and a lid defining a volume therein. The apparatus includes a substrate support disposed in the volume opposite the lid. The substrate support includes a support body disposed on a stem, and a ground plate disposed between the support body and the stem. A top flange is coupled to a lower peripheral surface the ground plate and a bottom flange is coupled to a bottom of the chamber body. The bottom flange and the top flange is coupled to one another with a plurality of straps, each of the straps having a first end coupled to the bottom flange and a second end coupled to the top flange.

A method for generating atmospheric pressure cold plasma inside a hand-held unit discharges cold plasma with simultaneously different rf wavelengths and their harmonies. The unit includes an rf tuning network that is powered by a low-voltage power supply connected to a series of high-voltage coils and capacitors. The rf energy signal is transferred to a primary containment chamber and dispersed through an electrode plate network of various sizes and thicknesses to create multiple frequencies. Helium gas is introduced into the first primary containment chamber, where electron separation is initiated. The energized gas flows into a secondary magnetic compression chamber, where a balanced frequency network grid with capacitance creates the final electron separation, which is inverted magnetically and exits through an orifice with a nozzle. The cold plasma thus generated has been shown to be capable of accelerating a healing process in flesh wounds on animal laboratory specimens.

Medical devices for generating an aerosol and plasma, e.g., for therapeutic treatment are described. The medical device may include a nebulizer, the nebulizer including an outer compartment, an inner compartment, and a needle radially inward of the inner and outer compartments. The medical device may include at least one electrode and a chamber, wherein a distal-facing surface of the chamber defines at least one plasma outlet and a nozzle in communication with the nebulizer, an end of the electrode being proximate the plasma outlet.

The present disclosure relates to a power supply system for improving plasma uniformity and a method thereof, wherein the power supply system includes a signal generating device, a first electrode and a second electrode. The signal generator is respectively connected with a plurality of signal processing circuits and is used for generating a plurality of initial signals at different frequencies; the signal processing circuits are used for processing the initial signals at corresponding frequencies; the plurality of signal processing circuits are all connected with the first electrode; and the initial signals are processed by the signal processing circuits and then act on the plasma through the first electrode. The present disclosure may effectively process signals in different power supplies, improve the stability of plasma discharge, reduce the impact of the coupling effect between different power supplies, and realize the independent control of ion flux and ion energy.