According to various embodiments, a device may include: a semiconductor region; a metallization layer disposed over the semiconductor region; and a self-organizing barrier layer disposed between the metallization layer and the semiconductor region, wherein the self-organizing barrier layer comprises a first metal configured to be self-segregating from the metallization layer.

Implementations of a silicon-on-insulator (SOI) die may include a silicon layer including a first side and a second side, and an insulative layer coupled directly to the second side of the silicon layer. The insulative layer may not be coupled to any other silicon layer.

Implementations of a silicon-on-insulator (SOI) die may include a silicon layer including a first side and a second side, and an insulative layer coupled directly to the second side of the silicon layer. The insulative layer may not be coupled to any other silicon layer.

An integrated circuit package including a package substrate including a monolithic core, the monolithic core having a first substrate side, a second substrate side opposite the first substrate side, a thickness in a range from 800 to 2000 microns and a through-cavity that passes through the first and second substrate sides. The package includes a device module, the device module having a first module side and a second module side opposite the first module side. The device module is embedded in the through-cavity, the first module side is aligned with the first substrate side, the second module side is aligned with the second substrate side, and the device module includes one or more silicon-based passive or silicon-based active device component. A method of manufacture of the integrated circuit package is also disclosed.

An integrated circuit package including a package substrate including a monolithic core, the monolithic core having a first substrate side, a second substrate side opposite the first substrate side, a thickness in a range from 800 to 2000 microns and a through-cavity that passes through the first and second substrate sides. The package includes a device module, the device module having a first module side and a second module side opposite the first module side. The device module is embedded in the through-cavity, the first module side is aligned with the first substrate side, the second module side is aligned with the second substrate side, and the device module includes one or more silicon-based passive or silicon-based active device component. A method of manufacture of the integrated circuit package is also disclosed.

A wafer has a front face that is partitioned by a plurality of streets crossing with each other into a plurality of regions in each of which a device is formed. A surface protective tape is adhered to the front face of the wafer. Then a laser beam having a wavelength transparent to the wafer is irradiated along the streets from a rear face side of the wafer to form a modified layer inside the wafer. Then the wafer is ground from the rear face side to thin the wafer. When the surface protective tape is applied, the surface protective tape is heated. When the modified layer is formed, cracks extend from the modified layer to the front face of the wafer. When ground, the wafer is divided into individual chips with the cracks serving as boundaries.

A wafer has a front face that is partitioned by a plurality of streets crossing with each other into a plurality of regions in each of which a device is formed. A surface protective tape is adhered to the front face of the wafer. Then a laser beam having a wavelength transparent to the wafer is irradiated along the streets from a rear face side of the wafer to form a modified layer inside the wafer. Then the wafer is ground from the rear face side to thin the wafer. When the surface protective tape is applied, the surface protective tape is heated. When the modified layer is formed, cracks extend from the modified layer to the front face of the wafer. When ground, the wafer is divided into individual chips with the cracks serving as boundaries.

Methods of forming an interconnect structure include depositing a first conductive material on a substrate. Aspects include subtractively etching the conductive material to form a patterned first conductive layer, and depositing a dielectric layer on interconnect structure. Aspects also include depositing a second conductive material on the dielectric layer and removing the second conductive material through the top of the second metal liner.

A method of manufacturing a light emitting device includes: a first wafer preparation step including preparing, on a first substrate, m first wafers (where m2), each of the first wafers comprising a first semiconductor layer, an active layer, and a second semiconductor layer; a second wafer preparation step including bonding a second substrate with the second semiconductor layer of a first of the m first wafers and then removing the first substrate from the first wafer, so as to form a second wafer in which the first semiconductor layer is exposed; and a first bonding step including bonding the first semiconductor layer exposed at the surface of the second wafer and the second semiconductor layer of a second of the m first wafers together using a light-transmissive conductive layer, and then removing a first substrate of the second of the m first wafers.

The present invention discloses a transferring method, a manufacturing method, a device and an electronics apparatus of micro-LED. The method for transferring micro-LEDs comprises: forming a mask layer on the backside of a laser-transparent original substrate, wherein micro-LEDs are formed on the front-side of the original substrate; bringing the micro-LEDs on the original substrate in contact with preset pads on a receiving substrate; and irradiating the original substrate from the original substrate side with laser through the mask layer, to lift-off micro-LEDs from the original substrate.