Patent classifications
H01L27/0694
SEMICONDUCTOR DIES AND DEVICES WITH COILS FOR INDUCTIVE COUPLING
A semiconductor die is disclosed, including a plurality of transistors at a frontside of a semiconductor substrate, a backside inductor at a backside of the semiconductor substrate; and a frontside inductor at the frontside of the semiconductor substrate. The frontside inductor and the backside inductor are inductively coupled.
Method and system of current sharing among bidirectional double-base bipolar junction transistors
Current sharing among bidirectional double-base bipolar junction transistors. One example is a method comprising: conducting current through a first bidirectional double-base bipolar junction transistor (first B-TRAN); conducting current through a second B-TRAN the second B-TRAN coupled in parallel with the first B-TRAN; measuring a value indicative of conduction of the first B-TRAN, and measuring a value indicative of conduction of the second B-TRAN; and adjusting a current flow through the first B-TRAN, the adjusting responsive to the value indicative of conduction of the first B-TRAN being different than the value indicative of conduction of the second B-TRAN.
Method of forming a thermal shield in a monolithic 3-d integrated circuit
A monolithic three-dimensional integrated circuit including a first device, a second device on the first device, and a thermal shield stack between the first device and the second device. The thermal shield stack includes a thermal retarder portion having a low thermal conductivity in a vertical direction, and a thermal spreader portion having a high thermal conductivity in a horizontal direction. The thermal shield stack of the monolithic three-dimensional integrated circuit includes only dielectric materials.
THREE-DIMENSIONAL INTEGRATED CIRCUIT STRUCTURE AND METHOD OF MANUFACTURING THE SAME
Disclosed is a three-dimensional integrated circuit structure including an active device die and a capacitor die stacked on the logic die. The active device die includes: a first substrate including a front side and a back side that are opposite to each other; a power delivery network on the back side of the first substrate; a device layer on the front side of the first substrate; a first wiring layer on the device layer; and a through contact that vertically extends from the power delivery network to the first wiring layer. The passive device die includes: a second substrate including a front side and a back side that are opposite to each other, the front side of the second substrate facing the front side of the first substrate; an interlayer dielectric layer on the front side of the second substrate, the interlayer dielectric layer including at least one hole; a passive device in the hole; and a second wiring layer on the passive device, wherein the second wiring layer faces and is connected to the first wiring layer.
Method to produce 3D semiconductor devices and structures with memory
A method for producing a 3D semiconductor device including: providing a first level, the first level including a first single crystal layer; forming first alignment marks and control circuits in and/or on the first level, where the control circuits include first single crystal transistors and at least two interconnection metal layers; forming at least one second level disposed above the control circuits; performing a first etch step into the second level; forming at least one third level disposed on top of the second level; performing additional processing steps to form first memory cells within the second level and second memory cells within the third level, where each of the first memory cells include at least one second transistor, where each of the second memory cells include at least one third transistor, performing bonding of the first level to the second level, where the bonding includes oxide to oxide bonding.
GALLIUM NITRIDE (GAN) EPITAXY ON PATTERNED SUBSTRATE FOR INTEGRATED CIRCUIT TECHNOLOGY
Gallium nitride (GaN) epitaxy on patterned substrates for integrated circuit technology is described. In an example, an integrated circuit structure includes a material layer including gallium and nitrogen, the material layer having a first side and a second side opposite the first side. A plurality of fins is on the first side of the material layer, the plurality of fins including silicon. A device layer is on the second side of the material layer, the device layer including one or more GaN-based devices.
3D SEMICONDUCTOR DEVICE AND STRUCTURE
A semiconductor device, the device including: a first silicon layer including a first single crystal silicon layer and a plurality of first transistors; a first metal layer disposed over the first single crystal silicon layer; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including a plurality of second transistors, the second level disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer; and a via disposed through the second level, where the via has a diameter of less than 450 nm, where the via includes tungsten, and where a typical thickness of the fifth metal layer is greater than a typical thickness of the second metal layer by at least 50%.
3D semiconductor device and structure
A semiconductor device, the device including: a first silicon layer including a first single crystal silicon layer and a plurality of first transistors; a first metal layer disposed over the first single crystal silicon layer; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including a plurality of second transistors, the second level disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer; and a via disposed through the second level, where the via has a diameter of less than 450 nm, where the via includes tungsten, and where a typical thickness of the fifth metal layer is greater than a typical thickness of the second metal layer by at least 50%.
Semiconductor device integrating silicon-based device with semiconductor-based device and method for fabricating the same
A semiconductor device is provided, including a buried oxide layer, having a first side and a second side. A silicon-based device layer is disposed on the first side of the buried oxide layer. The silicon-based device layer includes a first interconnection structure. A semiconductor-based device layer is disposed on the second side of the buried oxide layer. The semiconductor-based device layer includes a second interconnection structure.
METHOD FOR MANUFACTURING COMPONENTS ON BOTH FACES OF A SUBSTRATE
Method comprising the following steps: i) manufacturing components on a face of a substrate fastened to a first temporary substrate, ii) fastening a second temporary substrate onto the substrate, iii) removing the first temporary substrate, iv) manufacturing components on another face of the substrate, the first and second temporary substrates having surface areas greater than the surface area of the substrate of interest, during step ii), an adhesive film is disposed between the substrate and the first temporary substrate or between the substrate and the second temporary substrate, the adhesive film forming a lateral band around the substrate and adhering to the temporary substrates, the adhesion energy E.sub.1 between the substrate of interest and the first temporary substrate being greater than the adhesion energy E.sub.2 between the substrate of interest and the second temporary substrate, the adhesion energy E.sub.31 between the first temporary substrate and the adhesive film being lower than the adhesion energy E.sub.32 between the second temporary substrate and the adhesive film.