Embodiments of the present disclosure relate to the field of semiconductors, and provide a semiconductor structure and a fabrication method thereof, and a memory. The semiconductor structure includes: a base substrate including a first side and a second side opposite to each other; a first device layer including a first device, the first device layer being arranged on the first side of the base substrate; and a second device layer including a second device, the second device layer being arranged on the second side of the base substrate. At least part of the first device and at least part of the second device share a first doped region.

A semiconductor device, the device comprising: a plurality of transistors, wherein at least one of said plurality of transistors comprises a first single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a second single crystal source, channel, and drain, wherein said second single crystal source, channel, and drain is disposed above said first single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a third single crystal source, channel, and drain, wherein said third single crystal source, channel, and drain is disposed above said second single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a fourth single crystal source, channel, and drain, and wherein said third single crystal channel is self-aligned to said fourth single crystal channel being processed following the same lithography step.

A process for manufacturing an integrated circuit (IC) with a through via extending through a group III-V layer to a diode is provided. An etch is performed through the group III-V layer, into a semiconductor substrate underlying the group III-V layer, to form a via opening. A doped region is formed in the semiconductor substrate, through the via opening. Further, the doped region is formed with an opposite doping type as a surrounding region of the semiconductor substrate. The through via is formed in the via opening and in electrical communication with the doped region.

An integrated circuit (IC) that includes a circuit substrate having a front side surface and an opposite back side surface. Active circuitry is located on the front side surface. An inductive structure is located within a deep trench formed in the circuit substrate below the backside surface. The inductive structure is coupled to the active circuitry.

Some embodiments relate to a method. In the method, semiconductor devices are formed on a frontside of a semiconductor substrate. A trench is formed in a backside of the semiconductor substrate. Conductive and insulating layers are alternatingly formed in the trench on the backside of the semiconductor substrate to establish a backside capacitor. A backside interconnect structure is formed on the backside of the semiconductor substrate to couple to capacitor electrodes of the backside capacitor.

A 3D semiconductor structure includes a buffer layer, a n-type high electron mobility transistor (HEMT) disposed on a first surface of the buffer layer, and a p-type high hole mobility transistor (HHMT) disposed on a second surface of the buffer layer opposite to the first surface.

An integrated circuit (IC) chip that includes a semiconductor substrate including active devices on its front side, and at least part of a power delivery network (PDN) on its back side, is disclosed. In one aspect, the PDN includes a power supply terminal (Vdd) and a reference terminal (Vss) at the back of the IC. A plurality of TSV (Through Semiconductor Via) connections through the substrate bring the power to the front of the substrate. A field effect transistor is integrated at the back side of the substrate, and includes a source electrode, a drain electrode, and a gate electrode, which are contacted at the back side of the substrate. The IC further includes a gate control terminal for controlling the gate voltage. The transistor is coupled between the power supply terminal and one or more of the active devices of the IC.

A bidirectional power semiconductor device with full turn-off control in both current directions and improved electrical and thermal properties is provided, the device comprises a plurality of first gate commutated thyristor (GCT) cells and a plurality of second GCT cells alternating with each other, a first base layer of each first GCT cell is separated from a neighbouring second anode layer of a neighbouring second GCT cell by a first separation region, and a second base layer of each second GCT cell is separated from a neighbouring first anode layer of a neighbouring first GCT cell by a second separation region.

A design structure for an integrated radio frequency (RF) filter on a backside of a semiconductor substrate includes: a device on a first side of a substrate; a radio frequency (RF) filter on a backside of the substrate; and at least one substrate conductor extending from the front side of the substrate to the backside of the substrate and electrically coupling the RF filter to the device.

A semiconductor device, the device including: a plurality of transistors, where at least one of the plurality of transistors includes a first single crystal channel, where at least one of the plurality of transistors includes a second single crystal channel, where the second single crystal channel is disposed above the first single crystal channel, where at least one of the plurality of transistors includes a third single crystal channel, where the third single crystal channel is disposed above the second single crystal channel, where at least one of the plurality of transistors includes a fourth single crystal channel, and where the fourth single crystal channel is disposed above the third single crystal channel; and at least one region of oxide to oxide bonds.