H01L27/11803

SEMICONDUCTOR DEVICE
20200365592 · 2020-11-19 ·

An object is to provide a semiconductor device with a novel structure. The semiconductor device includes a first wiring; a second wiring; a third wiring; a fourth wiring; a first transistor having a first gate electrode, a first source electrode, and a first drain electrode; and a second transistor having a second gate electrode, a second source electrode, and a second drain electrode. The first transistor is provided in a substrate including a semiconductor material. The second transistor includes an oxide semiconductor layer.

3D SEMICONDUCTOR DEVICE AND STRUCTURE

A 3D semiconductor device, the device including: a first level overlaid by a second level overlaid by a third level overlaid by a fourth level, where the second level includes an array of first memory cells, the first memory cells including first transistors, the first transistors including first sources, first gates, and first drains, where each of the first transistors includes a single the first source, a single the first gate, and a single the first drain, where the third level includes an array of second memory cells, the second memory cells including second transistors, the second transistors including second sources, second gates, and second drains, where each of the second transistors includes a single the second source, a single the second gate, and a single the second drain, where at least one of the first memory cells is self-aligned to at least one of the second memory cells, being processed following the same lithography step; vertically oriented word-lines adapted to control a plurality of the first gates and a plurality of the second gates; and horizontal drain-lines directly connected to a plurality of the first drains and a plurality of the second drains.

3D SEMICONDUCTOR DEVICE AND STRUCTURE

A 3D semiconductor device including: a first level including first single crystal silicon and a plurality of first transistors; a first metal layer including interconnects between the plurality of first transistors; a second level on top of the first metal layer, the second level including a plurality of second transistors; a third level on top of the second level, the third level including a plurality of third transistors; an oxide layer on top of the third level; a fourth level on top of the oxide layer, the fourth level including second single crystal silicon and many fourth transistors, where at least one of the plurality of second transistors is at least partially self-aligned to at least one of the plurality of third transistors, both being formed following the same lithography step, the fourth level is bonded to the oxide layer, the bonded includes many metal to metal bonded structures.

Semiconductor device

An object is to provide a semiconductor device with a novel structure. The semiconductor device includes a first wiring; a second wiring; a third wiring; a fourth wiring; a first transistor having a first gate electrode, a first source electrode, and a first drain electrode; and a second transistor having a second gate electrode, a second source electrode, and a second drain electrode. The first transistor is provided in a substrate including a semiconductor material. The second transistor includes an oxide semiconductor layer.

Integrated circuit and semiconductor device

In one embodiment, the standard cell includes first and second active regions defining an intermediate region between the first and second active regions; and first, second and third gate lines crossing the first and second active regions and crossing the intermediate region. The first gate line is divided into an upper first gate line and a lower first gate line by a first gap insulating layer in the intermediate region, the second gate line is undivided, and the third gate line is divided into an upper third gate line and a lower third gate line by a second gap insulating layer in the intermediate region.

IC with test structures embedded within a contiguous standard cell area

An IC includes a contiguous standard cell area with first, second, and third TS-GATE-short-configured test area geometries disposed therein. In some embodiments, the contiguous standard cell area may further include: fourth and fifth TS-GATE-short-configured test area geometries, and/or other test area geometries, such as tip-to-tip-short, tip-to-side-short, diagonal-short, corner-short, interlayer-overlap-short, via-chamfer-short, merged-via-short, snake-open, stitch-open, via-open, or metal-island-open.

STANDARD CELL ARCHITECTURE WITH POWER TRACKS COMPLETELY INSIDE A CELL

An integrated circuit structure includes a cell on a metal level, the cell defined by a cell boundary. A plurality of substantially parallel interconnect lines are inside the cell boundary. A first power track and a second power track are both dedicated to power and are located completely inside the cell boundary without any power tracks along the cell boundary on the metal level.

Methods of manufacturing transistors including forming a depression in a surface of a covering of resist material

A method of manufacturing a transistor comprising providing a substrate, a region of semiconductive material on the substrate, and a region of electrically conductive material on the region of semiconductive material; forming a covering of resist material over said regions; forming a depression in a surface of the covering of resist material that extends over a first portion of said region of conductive material, said first portion separating second and third portions of the conductive region; removing resist material located under said depression to form a window through said covering, exposing said first portion; removing said first portion to expose a connecting portion of the region of semiconductive material that connects the second and third portions; forming a layer of dielectric material over the exposed connecting portion; and forming a layer of electrically conductive material over said layer of dielectric material.

Selective per die performance binning
10665515 · 2020-05-26 · ·

Embodiments herein describe binning and placement techniques for assembling a multi-die device to improve yield when a customer requests a high performance feature from the device. For example, the multi-die device may include multiple dies that are interconnected to form a single device or package. In one embodiment, the multiple dies are the same semiconductor die (e.g., have the same circuit layout) which are disposed on a common interposer or stacked on each other. The multi-die device can then be attached to a printed circuit board (PCB). Although the dies in the multi-die device may each include the same feature (e.g., a PCIe interface, SerDes interface, transmitter, memory interface, etc.), the multi-die device is assembled so that not all of the dies have a feature that satisfies the high performance requested by the customer. That is, at least one of the die includes a lower performance feature.

Nitrogen assisted oxide gapfill

An embodiment includes a dielectric material; a trench included in the dielectric material, the trench having first and second opposing sidewalls; wherein the trench includes: (a)(i) a first trench portion extending from the first sidewall to the second sidewall, (a)(ii) a second trench portion extending from the first sidewall to the second sidewall, and (a)(iii) a third trench portion extending from the first sidewall to the second sidewall; wherein the second trench portion is between the first trench portion and the third trench portion; wherein the first trench portion is substantially filled with a first material, the second trench portion is substantially filled with a second material, and the third trench portion is substantially filled with a third material; wherein (b)(i) the first material includes nitrogen, and (b)(ii) the first material includes more nitrogen than the third material. Other embodiments are described herein.