Methods and systems for depositing vanadium and/or indium layers onto a surface of a substrate and structures and devices formed using the methods are disclosed. An exemplary method includes using a cyclical deposition process, depositing a vanadium and/or indium layer onto the surface of the substrate. The cyclical deposition process can include providing a vanadium and/or indium precursor to the reaction chamber and separately providing a reactant to the reaction chamber. The cyclical deposition process may desirably be a thermal cyclical deposition process. Exemplary structures can include field effect transistor structures, such as gate all around structures. The vanadium and/or indium layers can be used, for example, as barrier layers or liners, as work function layers, as dipole shifter layers, or the like.

A method for manufacturing a pFET transistor, the method for manufacturing the transistor including providing a base structure comprising a silicon channel and a gate structure, the gate structure surrounding the channel leaving two flanks of the channel free; growing a first layer made from silicon-germanium alloy on the flanks of the channel; enriching the channel with germanium atoms from the first layer; and forming a drain region and a source region on either side of the channel.

A tilted nanowire structure is provided which has an increased gate length as compared with a horizontally oriented semiconductor nanowire at the same pitch. Such a structure avoids complexity required for vertical transistors and can be fabricated on a bulk semiconductor substrate without significantly changing/modifying standard transistor fabrication processing.

A method for the nanoscale etching of a layer of Ge.sub.1-xSn.sub.x on a carrier for a FET transistor, x being the concentration of tin in the GeSn alloy, the etching method includes a step of plasma-etching the layer of Ge.sub.1-xSn.sub.x using a mixture comprising dichlorine (Cl.sub.2) and dinitrogen (N.sub.2) and under an etching pressure lower than or equal to 50 mTorr, preferably lower than or equal to 10 mTorr. A method for producing a conduction channel on a carrier for a FET transistor, comprising a step of forming a layer of Ge.sub.1-xSn.sub.x on the carrier, the layer being produced by epitaxial growth, and a step of etching the layer of Ge.sub.1-xSn.sub.x according to the etching method. A conduction channel made of Ge.sub.1-xSn.sub.x for a FET transistor, the channel being obtained according to the production method, and a FET transistor comprising a plurality of conduction channels made of Ge.sub.1-xSn.sub.x.

A nanowire transistor and a manufacture method thereof are provided. The nanowire transistor includes a semiconductor wire, a semiconductor layer, a source electrode and a drain electrode. The semiconductor wire includes a first semiconductor material and includes a source region, a drain region, and a channel region, along an axial direction of the semiconductor wire, the channel region is between the source region and the drain region; the semiconductor layer includes a second semiconductor material and covers the channel region of the semiconductor wire; the source electrode is in the source region of the semiconductor wire and is in direct contact with the source region of the semiconductor wire, and the drain electrode is in the drain region of the semiconductor wire and is in direct contact with the drain region of the semiconductor wire.

Embodiments disclosed herein include transistor devices with complex oxide interfaces and methods of forming such devices. In an embodiment, the transistor device may comprise a substrate, and a fin extending up from the substrate. In an embodiment, a first oxide is formed over sidewall surfaces of the fin, and a second oxide is formed over the first oxide. In an embodiment, the first oxide and the second oxide are perovskite oxides with the general formula of ABO.sub.3.

Provided is a method of manufacturing a nanorod. The method comprising comprises the steps of: providing a growth substrate and a support substrate; epitaxially growing a nanomaterial layer onto one surface of the growth substrate; forming a sacrificial layer on one surface of the support substrate; bonding the nanomaterial layer with the sacrificial layer; separating the growth substrate from the nanomaterial layer; flattening the nanomaterial layer; forming a nanorod by etching the nanomaterial layer; and separating the nanorod by removing the sacrificial layer.

A method of processing a substrate that includes: loading the substrate in a processing chamber, the substrate including a raised feature of a semiconductor; forming a conformal dopant layer on the raised feature by atomic layer deposition (ALD); forming a metal layer over the raised feature; thermally treating the dopant layer to form an ultra-shallow dopant region in the raised feature by diffusion of a dopant from the dopant layer into the raised feature; and thermally treating the metal layer to form an ohmic contact region in the raised feature by diffusion of a metal from the metal layer into the raised feature.

Particular embodiments described herein provide for an electronic device that can include a nanowire channel. The nanowire channel can include nanowires and the nanowires can be about fifteen (15) or less angstroms apart. The nanowire channel can include more than ten (10) nanowires and can be created from a MXene material.

The document discloses transferrable hyperbolic metamaterial particles (THMMP) that display broadband, selective, omnidirectional absorption and can be transferred to secondary substrates, allowing enhanced flexibility and selective transmission. A device having metamaterial nanostructures includes a substrate and metamaterial nanostructures engaged to the substrate to form an optical layer to interact with light incident to the optical layer to exhibit optical reflection or absorption or transmission that is substantially uniform over a spectral range of different optical wavelengths associated with materials and structural features of the metamaterial nanostructures, each metamaterial nanostructure including different material layers that are interleaved to form a multi-layer nanostructure.