H01L29/0696

Multi-trench Super-Junction IGBT Device

A multi-trench super junction IGBT device includes a metallization collector, a P-type substrate, a first N-type epitaxial layer located above the P-type substrate and a second N-type epitaxial layer located above the first N-type epitaxial layer. The second N-type epitaxial layer includes at least a first dummy MOS cell unit and a MOS cell unit, wherein the first dummy MOS cell unit includes a trench formed by reactive ion etching, a thermally grown gate oxide layer provided inside the trench and deposited heavily doped polysilicon located in the gate oxide layer.

SILICON CARBIDE SEMICONDUCTOR DEVICE
20230050319 · 2023-02-16 · ·

In an entire intermediate region between an active region and an edge termination region, a p.sup.+-type region is provided between a p-type base region and a parallel pn layer. The p.sup.+-type region is formed concurrently with and in contact with p.sup.+-type regions for mitigating electric field near bottoms of gate trenches. The p.sup.+-type region has portions that face, respectively, n-type regions and p-type regions of a parallel pn layer in a depth direction Z and at the portions, has protrusions that protrude toward the parallel pn layer. N-type current spreading regions extend in the entire intermediate region from the active region and are between the p.sup.+-type region and the parallel pn layer, positioned between protrusions of the p.sup.+-type region. The impurity concentration of the n-type current spreading regions in the gate region is higher than that of those in other regions. Thus, avalanche capability may be enhanced.

SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THEREOF

A transistor device and a method for forming a transistor device are disclosed. The transistor device includes: a SiC semiconductor body that includes a first semiconductor layer and a second semiconductor layer formed on top of the first semiconductor; a trench structure extending from a first surface of the semiconductor body through the second semiconductor layer into the first semiconductor layer; a drain region arranged in the first semiconductor layer; and a plurality of transistor cells each coupled between the drain region and a source node. The trench structure subdivides the second semiconductor layer into a plurality of mesa regions and includes at least one cavity. At least one of the plurality of transistor cells is at least partially integrated in each of the mesa regions.

LATERAL DIFFUSION METAL-OXIDE SEMICONDUCTOR DEVICE

A lateral diffusion metal-oxide semiconductor (LDMOS) device includes a first gate structure and a second gate structure extending along a first direction on a substrate, a first source region extending along the first direction on one side of the first gate structure, a second source region extending along the first direction on one side of the second gate structure, a drain region extending along the first direction between the first gate structure and the second gate structure, a guard ring surrounding the first gate structure and the second gate structure, and a shallow trench isolation (STI) surrounding the guard ring.

IGBT with dV/dt controllability

A power semiconductor device includes an active cell region with a drift region of a first conductivity type, a plurality of IGBT cells arranged within the active cell region, each of the IGBT cells includes at least one trench that extends into the drift, an edge termination region surrounding the active cell region, a transition region arranged between the active cell region and the edge termination region, at least some of the IGBT cells are arranged within or extend into the transition region, a barrier region of a second conductivity type, the barrier region is arranged within the active cell region and in contact with at least some of the trenches of the IGBT cells and does not extend into the transition region, and a first load terminal and a second load terminal, the power semiconductor device is configured to conduct a load current along a vertical direction between.

Semiconductor device

The object is to provide a semiconductor device that prevents a snapback operation and has excellent heat dissipation. The semiconductor device includes a semiconductor substrate, transistor portions, diode portions, a surface electrode, and external wiring. The transistor portions and the diode portions are provided in the semiconductor substrate and are arranged in one direction parallel with the surface of the semiconductor substrate. A bonding portion of the external wiring is connected to the surface electrode. The transistor portions and the diode portions are provided in a first region and a second region and alternately arranged in the one direction. A first transistor width and a first diode width in the first region are smaller than a width of the bonding portion. A second transistor width and a second diode width in the second region are larger than the width of the bonding portion.

Small pitch super junction MOSFET structure and method
11581432 · 2023-02-14 · ·

The present invention provides semiconductor devices with super junction drift regions that are capable of blocking voltage. A super junction drift region is an epitaxial semiconductor layer located between a top electrode and a bottom electrode of the semiconductor device. The super junction drift region includes a plurality of pillars having P type conductivity, formed in the super junction drift region, which are surrounded by an N type material of the super junction drift region.

High voltage semiconductor device and manufacturing method of high voltage semiconductor device
11581434 · 2023-02-14 · ·

A semiconductor device includes a deep well region located on a substrate, a drift region located in the deep well region, a first gate electrode that overlaps with the first body region and the drift region, a second gate electrode that overlaps with the second body region and the drift region, a first source region and a second source region located in the first and second body regions, respectively, a drain region located in the drift region and disposed between the first gate electrode and the second gate electrode, a silicide layer located on the substrate, a first non-silicide layer located between the drain region and the first gate electrode, wherein the first non-silicide layer extends over a top surface of the first gate electrode, and a first field plate contact plug in contact with the first non-silicide layer.

TRANSISTOR DEVICE

A transistor device includes a semiconductor substrate having a first major surface, a cell field including transistor cells, and an edge termination region laterally surrounding the cell field. Each transistor cell includes a drift region of a first conductivity type, a first body region of a second conductivity type on the drift region, a source region of the first conductivity type on the first body region and a gate electrode. The transistor device further includes an elongate source contact having opposing first and second distal ends, the elongate source contact being in contact with the source region, and a second body region of the second conductivity type positioned in the semiconductor substrate. The second body region has a lateral extent such that it is spaced part from the second distal end of the elongate source contact and extends laterally beyond the first distal end of the elongate source contact.

TRENCH-GATE MOSFET WITH ELECTRIC FIELD SHIELDING REGION

A trench-gate MOSFET with electric field shielding region, has a substrate; a source electrode; a drain electrode; a semiconductor region with a first doping type formed on the substrate; a trench-gate, a plurality of electric field shielding regions with a second doping type formed under a surface of the semiconductor region, wherein the electric field shielding region intersects the trench-gate at an angle; a source electrode region formed on both sides of the trench-gate is divided into a plurality of source electrode sub-regions by the plurality of electric field shielding regions.