A semiconductor device includes: an n-doped drift region between first and second surfaces of a semiconductor body; a p-doped first region at the second surface; and an n-doped field stop region between the drift and first region. The field stop region includes first and second sub-regions with hydrogen related donors. A p-n junction separates the first region and first sub-region. A concentration of the hydrogen related donors, along a first vertical extent of the first sub-region, steadily increases from the pn-junction to a maximum value, and steadily decreases from the maximum value to a reference value at a first transition between the sub-regions. A second vertical extent of the second sub-region ends at a second transition to the drift region where the concentration of hydrogen related donors equals 10% of the reference value. A maximum concentration value in the second sub-region is at most 20% larger than the reference value.

Provided is a semiconductor device that includes a semiconductor substrate that is provided with a first conductivity type drift region, a transistor portion that includes a second conductivity type collector region in contact with a lower surface of the semiconductor substrate, and a diode portion that includes a first conductivity type cathode region in contact with the lower surface of the semiconductor substrate, and is alternately disposed with the transistor portion along an arrangement direction in an upper surface of the semiconductor substrate. In the transistor portions, a width in the arrangement direction of two or more transistor portions sequentially selected from the transistor portions nearer to the center in the arrangement direction of the semiconductor substrate is larger than a width in the arrangement direction of one of the other transistor portions.

A semiconductor device includes a semiconductor substrate, an emitter region, a base region and multiple accumulation areas, and an upper accumulation area in the multiple accumulation areas is in direct contact with a gate trench section and a dummy trench section, in an arrangement direction that is orthogonal to a depth direction and an extending direction, a lower accumulation area furthest from the upper surface of the semiconductor substrate in the multiple accumulation areas has: a gate vicinity area closer to the gate trench section than the dummy trench section in the arrangement direction; and a dummy vicinity area closer to the dummy trench section than the gate trench section in the arrangement direction, and having a doping concentration of the first conductivity type lower than that of the gate vicinity area.

An RC IGBT includes: an active region with separate IGBT and diode sections; a semiconductor body forming a part of the active region; a first load terminal and control terminal at a first side of the body and a second load terminal at a second side, the control terminal including a control terminal finger that laterally overlaps, in the active region, with the diode section. Control trenches extending into the semiconductor body along a vertical direction have a control trench electrode electrically connected to the control terminal for controlling a load current between the load terminals in the IGBT section. At least one control trench extends into both IGBT and diode sections. The electrical connection between the control trench electrode of that control trench and the control terminal is established at least based on an electrically conductive member arranged, in the diode section, in contact with the control terminal finger.

A thin non-punch-through semiconductor device with a patterned collector layer on the collector side is proposed. The thin NPT RC-IGBT semiconductor device has a collector layer with a pattern of p/n shorts, an emitter side structured as a functional MOS cell, a base layer arranged between the emitter and the collector sides, but without the use of a buffer/field-stop layer. A low doped bipolar gain control layer having a thickness of less than 10 μm may be used in combination with a short pattern of the collector to reduce the bipolar gain and achieve thinner devices with lower losses and high operating temperature capability. The doping concentration of the base layer and a thickness of the base layer are adapted such that the distance from the end of the electric field region to the patterned collector, at breakdown voltage, is less than 15% of the total device thickness.

A semiconductor device is proposed. The semiconductor device includes a semiconductor substrate including a RC-IGBT with a diode area. The diode area includes a p-doped anode region and an n-doped emitter efficiency adjustment region. At least one of the p-doped anode region or the n-doped emitter efficiency adjustment region includes deep level dopants.

An insulated gate bipolar transistor, comprising an anode second conductivity-type region and an anode first conductivity-type region provided on a drift region; the anode first conductivity-type region comprises a first region and a second region, and the anode second conductivity-type region comprises a third region and a fourth region, the dopant concentration of the first region being less than that of the second region, the dopant concentration of the third region being less than that of the fourth region, the third region being provided between the fourth region and a body region, the first region being provided below the fourth region, and the second region being provided below the third region and located between the first region and the body region.

A semiconductor device includes a semiconductor substrate including an active region and an outer peripheral region. The active region includes a transistor portion and a diode portion. The outer peripheral region includes a current sensing unit. A lifetime control region including a lifetime killer is provided from the diode portion to at least a part of the transistor portion. The current sensing unit includes a sense transistor non-irradiation region not provided with the lifetime control region and a sense transistor irradiation region provided with the lifetime control region.

An npnp layered switch is modified to have a composite anode structure. Instead of the continuous p-type bottom anode layer of a typical npnp IGTO device, thyristor, or IGBT, the composite anode is formed of a segmented p-type layer with gaps containing n-type semiconductor material. The n-type material forms a majority carrier path between the bottom anode electrode and the n-type collector of the vertical npn bipolar transistor. When a trenched gate is biased high, the majority carrier path is created between the bottom anode electrode and the top cathode electrode. Such a current path operates at very low operating voltages, starting at slightly above 0 volts. Above operating voltages of about 1.0 volts, the npnp layered switch operates normally and uses regenerative bipolar transistor action to conduct a vast majority of the current. The two current paths conduct in parallel.

Plural sessions of proton irradiation are performed by differing ranges from a substrate rear surface side. After first to fourth n-type layers of differing depths are formed, the protons are activated. Next, helium is irradiated to a position deeper than the ranges of the proton irradiation from the substrate rear surface, introducing lattice defects. When the amount of lattice defects is adjusted by heat treatment, protons not activated in a fourth n-type layer are diffused, forming a fifth n-type layer contacting an anode side of the fourth n-type layer and having a carrier concentration distribution that decreases toward the anode side by a more gradual slope than that of the fourth n-type layer. The fifth n-type layer that includes protons and helium and the first to fourth n-type layers that include protons constitute an n-type FS layer. Thus, a semiconductor device having improved reliability and lower cost may be provided.