Patent classifications
H01L29/1029
Apparatus, system and method of an electrostatically formed nanowire (EFN)
For example, an Electrostatically Formed Nanowire (EFN) may include a source region; at least one drain region; a wire region configured to drive a current between the source and drain regions via a conductive channel; a first lateral-gate area extending along a first surface of the wire region between the source and drain regions; a second lateral-gate area extending along a second surface of the wire region between the source and drain regions; and a sensing area in opening in a backside of a silicon substrate under the wire region and the first and second lateral-gate areas, the sensing area configured to, in reaction to a predefined substance, cause a change in a conductivity of the conductive channel.
APPARATUS, SYSTEM AND METHOD OF AN ELECTROSTATICALLY FORMED NANOWIRE (EFN)
For example, an Electrostatically Formed Nanowire (EFN) may include a source region; at least one drain region; a wire region configured to drive a current between the source and drain regions via a conductive channel; a first lateral-gate area extending along a first surface of the wire region between the source and drain regions; a second lateral-gate area extending along a second surface of the wire region between the source and drain regions; and a sensing area in opening in a backside of a silicon substrate under the wire region and the first and second lateral-gate areas, the sensing area configured to, in reaction to a predefined substance, cause a change in a conductivity of the conductive channel.
CHARGE DETECTOR AND PROCESS FOR SENSING A CHARGED ANALYTE
A charge detector includes: a charge sensor that senses a charged analyte and produces a charge signal in response to contact with the charged analyte; a transducer in electrical communication with the charge sensor and that: receives the charge signal from the charge sensor, receives a feedback control signal; and produces a transduction signal in response to receipt of the charge signal and the feedback control signal; and a sensitivity controller in electrical communication with the transducer and that: receives the transduction signal from the transducer; produces the feedback control signal in response to receipt of the transduction signal from the transducer; and produces a charge readout in response to receipt of the transduction signal from the transducer.
Process of fabricating high efficiency, high linearity N-polar gallium-nitride (GaN) transistors
Fabricating high efficiency, high linearity N-polar gallium-nitride (GaN) transistors by selective area regrowth is disclosed. A demand for high efficiency components with highly linear performance characteristics for radio frequency (RF) systems has increased development of GaN transistors and, in particular, aluminum-gallium-nitride (AlGaN)/GaN high electron mobility transistor (HEMT) devices. A method of fabricating a high efficiency, high linearity N-polar HEMT device includes employing a selective area regrowth method for forming a HEMT structure on the Nitrogen-face (N-face) of a GaN buffer, a natural high composition AlGaN/AlN back barrier for carrier confinement, a thick undoped GaN layer on the access areas to eliminate surface dispersion, and a high access area width to channel width ratio for improved linearity. A problem of impurities on the GaN buffer surface prior to regrowth creating a leakage path is avoided by intentional silicon (Si) doping in the HEMT structure.
Semiconductor devices having a fin channel arranged between source and drift regions and methods of manufacturing the same
Structures for laterally-diffused metal-oxide-semiconductor devices and drain-extended metal-oxide-semiconductor devices, as well as methods of forming laterally-diffused metal-oxide-semiconductor devices and drain-extended metal-oxide-semiconductor devices. A gate electrode is arranged to extend about a semiconductor fin projecting from a substrate. A drain region is arranged in the substrate, and a source region is coupled with the semiconductor fin. The source region is arranged over the semiconductor fin. A drift region is arranged in the substrate between the drain region and the semiconductor fin. The drain region, source region, and drift region have a given conductivity type. The drift region has a lower electrical conductivity than the drain region.
Semiconductor device and manufacturing method thereof
A semiconductor device includes a substrate, a channel layer, an active layer, and a gate electrode. The channel layer has a fin portion over the substrate. The active layer is over at least the fin portion of the channel layer. The active layer is configured to cause a two-dimensional electron gas (2DEG) to be formed in the channel layer along an interface between the channel layer and the active layer. The gate electrode is in contact with a sidewall of the fin portion of the channel layer.
Highly scaled linear GaN HEMT Structures
A transistor includes a substrate, a channel layer coupled to the substrate, a source electrode coupled to the channel layer, a drain electrode coupled to the channel layer, and a gate electrode coupled to the channel layer between the source electrode and the drain electrode. The gate electrode has a length dimension of less than 50 nanometers near the channel layer, and the channel layer includes at least a first GaN layer and a first graded AlGaN layer on the first GaN layer.
High Electron Mobility Transistor and Method for Manufacturing the Same
The present disclosure provides a high electron mobility transistor, including a silicon substrate, a channel layer, a barrier layer and a gate sequentially stacked in a thickness direction of the high electron mobility transistor. The high electron mobility transistor further includes a strain layer made of an insulating material. A surface of the barrier layer distal to the channel layer includes a gate region and an enhancement region. The gate is disposed in the gate region. The strain layer includes an enhancement portion stacked in the enhancement region. A mismatch rate of a lattice constant of the strain layer to a lattice constant of the barrier layer is not less than 0.5%. The present disclosure further provides a method for manufacturing a high electron mobility transistor. The high electron mobility transistor has good performance and low cost.
Semiconductor device comprising work function metal pattern in boundary region and method for fabricating the same
A semiconductor device and method for fabricating the same are provided. The semiconductor device includes a substrate including a cell region, a core region, and a boundary region between the cell region and the core region, a boundary element isolation layer in the boundary region of the substrate to separate the cell region from the core region, a high-k dielectric layer on at least a part of the boundary element isolation layer and the core region of the substrate, a first work function metal pattern comprising a first extension overlapping the boundary element isolation layer on the high-k dielectric layer, and a second work function metal pattern comprising a second extension overlapping the boundary element isolation layer on the first work function metal pattern, wherein a first length of the first extension is different from a second length of the second extension.
Electronic device including a transistor with a non-uniform 2DEG
An electronic device can include a channel layer, a first carrier supply layer, a gate electrode of a HEMT, and a drain electrode of the HEMT. The HEMT can have a 2DEG along an interface between the channel and first carrier supply layers. In an aspect, the 2DEG can have a highest density that is the highest at a point between the drain and gate electrodes. In another aspect, the HEMT can further comprise first and second carrier supply layers, wherein the first carrier supply layer is disposed between the channel and second carrier supply layers. The second carrier supply layer be thicker at a location between the drain and gate electrodes. In a further aspect, a process of forming an electronic device can include the HEMT. In a particular embodiment, first and second carrier supply layers can be epitaxially grown from an underlying layer.