Patent classifications
H01L29/1075
Semiconductor device including superlattice pattern
A semiconductor device includes; a substrate including a first region and a second region, a first active pattern extending upward from the first region, a first superlattice pattern on the first active pattern, a first active fin centrally disposed on the first active pattern, a first gate electrode disposed on the first active fin, and first source/drain patterns disposed on opposing sides of the first active fin and on the first active pattern. The first superlattice pattern includes at least one first semiconductor layer and at least one first blocker-containing layer, and the first blocker-containing layer includes at least one of oxygen, carbon, fluorine and nitrogen.
MICRO-ELECTRONIC DEVICE WITH INSULATED SUBSTRATE, AND ASSOCIATED MANUFACTURING METHOD
A micro-electronic device includes a first electronic component and a second electronic component, and a substrate formed of a first semiconductor material for supporting the components. The first component and the second component each include an active layer formed at least partially from a second semiconductor material different from the first semiconductor material. The device further includes, for each of the components, a stack for maintaining electrical voltage, which stack is situated between the substrate and the active layer of the electronic component under consideration and which comprises two layers forming a junction P-N formed from the same semiconductor material as the substrate and which insulates the relevant active layer from the substrate. The assemblies respectively including the first component and the second component and their respective stack for maintaining electrical voltage are separated from each other by a barrier made of electrically insulating material.
Parasitic channel mitigation using silicon carbide diffusion barrier regions
Semiconductor structures and methods of forming semiconductor structures that inhibit the conductivity of parasitic channels are described. In one example, a semiconductor structure includes a semiconductor substrate and a III-nitride material region over a top surface of the semiconductor substrate. The semiconductor substrate includes a bulk region below the top surface and a parasitic channel that extends to a depth from the top surface toward the bulk region of the semiconductor substrate. The parasitic channel comprises a first region and a second region. The first region of the parasitic channel comprises an implanted species having a relative atomic mass of less than 5, and the second region of the parasitic channel is free from the implanted species or the implanted species is present in the second region at a concentration that is less than in the first region.
NITRIDE SEMICONDUCTOR BUFFER STRUCTURE AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
Provided are a nitride semiconductor buffer structure and a semiconductor device including the same. The buffer structure may include a plurality of buffer layers between a substrate and an active layer. The active layer may include a nitride semiconductor. The plurality of buffer layers may be stacked on each other on the substrate. Each of the plurality of buffer layers may have a super lattice structure and may include a doped nitride semiconductor. The plurality of buffer layers may have different compositions from each other. Adjacent buffer layers, among the plurality of buffer layers, may have different doping concentrations from each other.
Method for fabricating semiconductor structure including the substrate structure
A substrate structure and a method for fabricating a semiconductor structure including the substrate structure are provided. The substrate structure includes a substrate, a bow adjustment layer, and a silicon layer. The bow adjustment layer is on the top surface of the substrate. The silicon layer is on the bow adjustment layer. The substrate structure has a total bow value, and the total vow value is from −20 μm to −40 μm.
GALLIUM NITRIDE HIGH-ELECTRON MOBILITY TRANSISTORS WITH P-TYPE LAYERS AND PROCESS FOR MAKING THE SAME
A high-electron mobility transistor includes a substrate layer, a first buffer layer provided on the substrate layer, a barrier layer provided on the first buffer layer, a source provided on the barrier layer, a drain provided on the barrier layer, and a gate provided on the barrier layer. The transistor further includes a p-type material layer having a length parallel to a surface of the substrate layer over which the first buffer layer is provided, the length of the p-type material layer being less than an entire length of the substrate layer. The p-type material layer is provided in one of the following: the substrate layer, or the first buffer layer. A process of making the high-electron mobility transistor is disclosed as well.
Timing circuit arrangements for flip-flops
An integrated circuit includes a first time delay circuit, a second time delay circuit, and a master-slave flip-flop having a gated input circuit and a transmission gate. The first time delay circuit has a first input configured to receive a first clock signal and having a first output configured to generate a second clock signal. The second time delay circuit has a second input configured to receive the second clock signal and having a second output configured to generate a third clock signal. The transmission gate is configured to receive the first clock signal and the second clock signal to control a transmission state of the transmission gate. The gated input circuit is configured to have an input transmission state controlled by the third clock signal at the second output of the second time delay circuit.
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
A semiconductor device includes a substrate, a first GaN-based high-electron-mobility transistor (HEMT), a second GaN-based HEMT, a first interconnection, and a second interconnection is provided. The substrate has a plurality of first-type doped semiconductor regions and second-type doped semiconductor regions. The first GaN-based HEMT is disposed over the substrate to cover a first region on the first-type doped semiconductor regions and the second-type doped semiconductor regions in the substrate. The second GaN-based HEMT is disposed over the substrate to cover a second region. The first region is different from the second region. The first interconnection is disposed over and electrically connected to the substrate, forming a first interface. The second interconnection is disposed over and electrically connected to the substrate, forming a second interface. The first interface is separated from the second interface by at least two heterojunctions formed in the substrate.
NORMALLY-CLOSED DEVICE AND FABRICATION METHOD THEREOF
A normally-closed device and a fabrication method thereof, relating to the technical field of semiconductors, is disclosed. The normally-closed device comprises a substrate, an epitaxial layer connected to the substrate comprising a first P-type nitride layer and a modified layer located on two sides of the first P-type nitride layer and formed by modifying a second P-type nitride layer in a preset region, where the first P-type nitride layer and the second P-type nitride layer are formed by epitaxially growing synchronously, a barrier layer connected to the first P-type nitride layer and the modified layer, a gate electrode connected to the barrier layer, and a source electrode and a drain electrode connected to the modified layer.
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
A semiconductor device includes a doped substrate, a barrier layer, a channel layer, and a doped semiconductor structure. The barrier layer is disposed on the doped substrate. The channel layer is disposed between the doped substrate and the barrier layer, in which a bandgap of the barrier layer is greater than a bandgap of the channel layer. The doped semiconductor structure is embedded in the doped substrate and at a position lower than the channel layer, in which the doped substrate and the doped semiconductor structure have different polarities, so as to form a diode therebetween.