A device includes a substrate, a gate structure wrapping around a vertical stack of nanostructure semiconductor channels, and a source/drain abutting the vertical stack and in contact with the nanostructure semiconductor channels. The device includes a gate via in contact with the first gate structure. The gate via includes a metal liner layer having a first flowability, and a metal fill layer having a second flowability higher than the first flowability.

A semiconductor device includes a semiconductor part, first to third electrodes, and first and second control electrodes. The semiconductor part is provided between the first and second electrodes. On the second electrode side of the semiconductor part, the first control electrode and the third electrode are provided in a first trench, and the second control electrode is provided in a second trench. The first control electrode is provided between the second and third electrode. In a first direction from the first control electrode toward the second control electrode, the first trench has first and second widths. The first width is a combined width of the third electrode and insulating portions provided on both sides of the third electrode. The second width is a combined width of the first control electrode and the gate insulating films on both sides thereof. The first width is greater than the second width.

There is provided a semiconductor device including: an n-type semiconductor substrate having a first main surface and a second main surface on an opposite side of the first main surface; an n-type semiconductor layer arranged on the first main surface of the semiconductor substrate; a pair of trenches formed at a distance from each other on a surface of the semiconductor layer on an opposite side of the semiconductor substrate; a pair of gate electrodes buried in the pair of trenches; a gate insulating film interposed between the gate electrodes and the semiconductor layer; a source electrode formed on the surface of the semiconductor layer on the opposite side of the semiconductor substrate; and a drain electrode formed on the second main surface of the semiconductor substrate.

Gallium nitride (GaN) integrated circuit technology with resonators is described. In an example, an integrated circuit structure includes a layer or substrate including gallium and nitrogen. A first plurality of electrodes is over the layer or substrate. A resonator layer is on the first plurality of electrodes, the resonator layer including aluminum and nitrogen. A second plurality of electrodes is on the resonator layer. Individual ones of the second plurality of electrodes are vertically over and aligned with corresponding individual ones of the first plurality of electrodes.

A semiconductor device includes: an active pattern disposed on a substrate; a source/drain pattern disposed on the active pattern; a channel pattern connected to the source/drain pattern, wherein the channel pattern includes semiconductor patterns stacked on each other and spaced apart from each other; and a gate electrode disposed on the channel pattern and extending in a first direction, wherein the gate electrode includes: a channel neighboring part adjacent to a first sidewall of a first semiconductor pattern of the stacked semiconductor patterns; and a body part spaced apart from the first semiconductor pattern, wherein the channel neighboring part is disposed between the body part and the first semiconductor pattern, wherein the first sidewall of the first semiconductor pattern has a first width, wherein the channel neighboring part has a second width less than the first width. The body part has a third width greater than the second width.

A semiconductor integrated circuit device includes: a channel layer, a barrier layer; a first p-type semiconductor layer and a second p-type semiconductor layer, spaced apart from each other on the barrier layer; and a passivation layer on the first p-type semiconductor layer and the second p-type semiconductor layer. The passivation layer may partially inactivate a dopant of at least one of the first p-type semiconductor layer and the second p-type semiconductor layer.

A semiconductor device includes a type IV semiconductor base substrate, a first type III-V semiconductor layer formed on a first surface of the base substrate, and a second type III-V semiconductor layer with a different bandgap as the first type III-V being formed on the first type III-V semiconductor layer. The semiconductor device further includes first and second electrically conductive device terminals each being formed on the second type III-V semiconductor layer and each being in ohmic contact with the two-dimensional charge carrier gas. The base substrate includes a first highly doped island that is disposed directly beneath the second device terminal and extends to the first surface of the base substrate. The first highly-doped island is laterally disposed between portions of semiconductor material having a lower net doping concentration than the first highly-doped island.

A semiconductor transistor structure with reduced contact resistance includes a substrate, a channel layer on the substrate, a barrier layer on the channel layer, a two-dimensional electron gas (2DEG) layer at an interface between the barrier layer and the channel layer, and a recess in a contact region. The recess penetrates through the barrier layer and extends into the channel layer. An Ohmic contact metal is disposed in the recess. The Ohmic contact metal is in direct contact with a vertical side surface of the barrier layer in the recess and in direct contact with an inclined side surface of the 2DEG layer and the channel layer in the recess.

Disclosed herein are IC structures, packages, and devices that include planar III-N transistors with wrap-around gates and/or one or more wrap-around source/drain (S/D) contacts. An example IC structure includes a support structure (e.g., a substrate) and a planar III-N transistor. The transistor includes a channel stack of a III-N semiconductor material and a polarization material, provided over the support structure, a pair of S/D regions provided in the channel stack, and a gate stack of a gate dielectric material and a gate electrode material provided over a portion of the channel stack between the S/D regions, where the gate stack at least partially wraps around an upper portion of the channel stack.

The present disclosure discloses a semiconductor component and a method for forming the semiconductor component. The semiconductor component includes a substrate, a III-V layer, a doped III-V layer, a gate contact, a first field plate, and a second field plate. The gate contact has first and second sides away from the doped III-V layer. The first field plate has first and second sides, and the first side is closer to the second side of the gate contact than the second side. The second field plate has first and second sides, and the first side is closer to the second side of the gate contact than the second side. The first field plate is closer to the doped III-V layer than the second field plate and the first side and the second side of the gate contact.