Patent classifications
H01L29/66356
Charge storage and sensing devices and methods
Charge storage and sensing devices having a tunnel diode operable to sense charges stored in a charge storage structure are provided. In some embodiments, a device includes a substrate, a charge storage device on the substrate, and tunnel diode on the substrate adjacent to the charge storage device. The tunnel diode includes a tunnel diode dielectric layer on the substrate, and a tunnel diode electrode on the tunnel diode dielectric layer. A substrate electrode is disposed on the doped region of the substrate, and the tunnel diode electrode is positioned between the charge storage device and the substrate electrode.
Tunnel field-effect transistor with reduced subthreshold swing
A method for manufacturing a semiconductor device includes forming a source layer on a semiconductor substrate, forming a channel layer on the source layer, and forming a drain layer on the channel layer. The source, channel and drain layers are patterned into at least one fin, and a cap layer is formed on a lower portion of the at least one fin. The lower portion of the at least one fin includes the source layer and part of the channel layer. The method further includes forming a gate structure comprising a gate dielectric layer and a gate conductor on the at least one fin and on the cap layer. The cap layer is positioned between the lower portion of the at least one fin and the gate dielectric layer.
Ferroelectric gate oxide based tunnel feFET memory
A transistor is disclosed. The transistor includes a p-type region, an intrinsic region coupled to the p-type region, an n-type region coupled to the intrinsic region, and a gate electrode above the intrinsic region. The ferroelectric material is on a bottom, a first side and a second side of the gate electrode, and above the intrinsic region.
Arsenic-doped epitaxial, source/drain regions for NMOS
Techniques are disclosed for providing an integrated circuit structure having NMOS transistors including an arsenic-doped interface layer between epitaxially grown source/drain regions and a channel region. The arsenic-doped interface layer may include, for example, arsenic-doped silicon (Si:As) having arsenic concentrations in a range of about 1E20 atoms per cm.sup.3 to about 5E21 atoms per cm.sup.3. The interface layer may have a relatively uniform thickness in a range of about 0.5 nm to full fill where the entire source/drain region is composed of the Si:As. In cases where the arsenic-doped interface layer only partially fills the source/drain regions, another n-type doped semiconductor material can fill remainder (e.g., phosphorus-doped III-V compound or silicon). The use of a layer having a high arsenic concentration can provide improved NMOS performance in the form of abrupt junctions in the source/drain regions and highly conductive source/drain regions with negligible diffusion of arsenic into the channel region.
Parallel structure, method of manufacturing the same, and electronic device including the same
A parallel structure comprising source/drain and channel layers alternately stacked on a substrate, and gate stacks formed around peripheries of the channel layers. Each of the channel layers, the source/drain layers on upper and lower sides of the channel layer, and the gate stack formed around the channel layer, form a semiconductor device. In each semiconductor device, one of the source/drain layers is in contact with a first electrically-conductive channel disposed on an outer periphery of the active region, the other is in contact with a second electrically-conductive channel on the outer periphery of the active region, and the gate stack is in contact with a third electrically-conductive channel disposed on the outer periphery of the active region. The first electrically-conductive channel is common to the semiconductor devices, the second electrically-conductive channel is common to the semiconductor devices, and the third electronically-conductive channel is common to the semiconductor devices.
DIODE STRUCTURES WITH ONE OR MORE RAISED TERMINALS
Structures for a diode and methods of fabricating a structure for a diode. The structure includes a layer comprised of a semiconductor material. The layer includes a first section, a second section, and a third section laterally positioned between the first section and the second section. The structure includes a first terminal having a raised semiconductor layer on the first section of the layer, a second terminal including a portion on the second section of the layer, and a gate on the third section of the layer.
ELECTROSTATIC DISCHARGE DIODE HAVING DIELECTRIC ISOLATION LAYER
In one embodiment a semiconductor structure comprises a semiconductor substrate, a trench dielectric layer disposed in a trench of the semiconductor substrate, a first source/drain region disposed in contact with the semiconductor substrate, a gate and a second source/drain region. The gate is disposed between the first source/drain region and the second source/drain region. The semiconductor structure further comprises a dielectric isolation layer disposed between the semiconductor substrate and the second source/drain region.
Power device having lateral insulated gate bipolar transistor (LIGBT) and manufacturing method thereof
A power device which is formed on a semiconductor substrate includes: a lateral insulated gate bipolar transistor (LIGBT), a PN diode and a clamp diode. The PN diode is connected in parallel to the LIGBT. The clamp diode has a clamp forward terminal and a clamp reverse terminal, which are electrically connected to a drain and a gate of the LIGBT, to clamp a gate voltage applied to the gate not to be higher than a predetermined voltage threshold.
ASYMMETRIC FET
After forming a first-side epitaxial semiconductor region and a second-side epitaxial semiconductor region on recessed surfaces of a semiconductor portion that are not covered by a gate structure, at least one dielectric layer is formed to cover the first-side and the second-side epitaxial semiconductor regions and the gate structure. A second-side contact opening is formed within the at least one dielectric layer to expose an entirety of the second-side epitaxial semiconductor region. The exposed second-side epitaxial semiconductor region can be replaced by a new second-side epitaxial semiconductor region having a composition different from the first-side epitaxial semiconductor region or can be doped by additional dopants, thus creating an asymmetric first-side epitaxial semiconductor region and a second-side epitaxial semiconductor region. Each of the first-side epitaxial semiconductor region and the second-side epitaxial semiconducting region can function as either a source or a drain for a transistor.
STRAIN COMPENSATION VIA ION IMPLANTATION IN RELAXED BUFFER LAYER TO PREVENT WAFER BOW
In one embodiment, an integrated circuit includes a substrate, a buffer layer, a source region, a drain region, a channel region, and a gate structure. The substrate includes silicon. The buffer layer is above the substrate and includes a semiconductor material having defects near an interface with the substrate. The buffer layer also includes ions implanted among the defects. The source region and drain region are above the buffer layer, and the channel region is above the buffer layer and between the source and drain regions. The gate structure above the channel region.