Semiconductor devices comprising a getter material are described. The getter material can be located in or over the active region of the device and/or in or over a termination region of the device. The getter material can be a conductive or an insulating material. The getter material can be present as a continuous or discontinuous film. The device can be a SiC semiconductor device such as a SiC vertical MOSFET. Methods of making the devices are also described. Semiconductor devices and methods of making the same comprising source ohmic contacts formed using a self-aligned process are also described. The source ohmic contacts can comprise titanium silicide and/or titanium silicide carbide and can act as a getter material.

A Schottky diode is disclosed that includes a silicon carbide substrate, a silicon carbide drift layer, a Schottky contact, and a passivation structure. The silicon carbide drift layer provides an active region and an edge termination region about the active region. The Schottky contact has sides and a top extending between the two sides and includes a Schottky layer over the active region and an anode contact over the Schottky layer. The passivation structure covers the edge termination region, the sides of the Schottky contact, and at least a portion of the top of the Schottky contact. The passivation structure includes a first silicon nitride layer, a silicon dioxide layer over the first silicon nitride layer, and a second silicon nitride layer over the silicon dioxide layer.

A Schottky diode is disclosed that includes a silicon carbide substrate, a silicon carbide drift layer, a Schottky contact, and a passivation structure. The silicon carbide drift layer provides an active region and an edge termination region about the active region. The Schottky contact has sides and a top extending between the two sides and includes a Schottky layer over the active region and an anode contact over the Schottky layer. The passivation structure covers the edge termination region, the sides of the Schottky contact, and at least a portion of the top of the Schottky contact. The passivation structure includes a first silicon nitride layer, a silicon dioxide layer over the first silicon nitride layer, and a second silicon nitride layer over the silicon dioxide layer.

A gate-turn-off thyristor is provided. The gate-turn-off thyristor includes a plurality of strips formed by repeatedly arranging a plurality of N-type emitter regions with high doping concentration of an upper transistor on an upper surface of an N-type silicon substrate with high resistivity, wherein a periphery of each strip of the plurality of strips is surrounded with a P-type dense base region bus bar of the upper transistor, a cathode metal layer is disposed on an N-type emitter region of the plurality of N-type emitter regions of the upper transistor, and a P-type base region of the upper transistor is disposed below the N-type emitter region of the upper transistor; a side of the P-type base region of the upper transistor is connected to a P-type dense base region of the upper transistor or a P-type dense base region bus bar of the upper transistor.

A light-emitting component includes a light-emitting element, a driving thyristor, and a light-absorbing layer. The light-emitting element emits light of a predetermined wavelength. The driving thyristor causes the light-emitting element to emit light or causes an amount of light emitted by the light-emitting element to increase, upon entering an on-state. The light-absorbing layer is disposed between the light-emitting element and the driving thyristor such that the light-emitting element and the driving thyristor are stacked, and absorbs light emitted by the driving thyristor.

A light-emitting component includes a light-emitting element, a driving thyristor, and a light-absorbing layer. The light-emitting element emits light of a predetermined wavelength. The driving thyristor causes the light-emitting element to emit light or causes an amount of light emitted by the light-emitting element to increase, upon entering an on-state. The light-absorbing layer is disposed between the light-emitting element and the driving thyristor such that the light-emitting element and the driving thyristor are stacked, and absorbs light emitted by the driving thyristor.

A semiconductor device comprises at least one cell. The structure of each cell comprises: a N-type substrate; at least one first trench unit and at least one second trench unit provided on one side of the N-type substrate; at least one P-type semiconductor region provided on the other side of the N-type substrate, the P-type semiconductor region consisting an anode region; at least one N-type carrier barrier region; and at least one P-type electric field shielding region. The purpose of the present invention is to provide a semiconductor device which has a novel cell structure to provide: a large safe operating area; a short-circuit resistance; elimination of the effect of parasitic thyristors; a low gate-collector charge (Q.sub.GC) to provide a maximum resistance to dv/dt; increase of conductivity modulation at the emitter side to provide a large current density and an extremely low on-voltage drop; a small turn-off loss; and a low process complexity.

A semiconductor device comprises at least one cell. The structure of each cell comprises: a N-type substrate; at least one first trench unit and at least one second trench unit provided on one side of the N-type substrate; at least one P-type semiconductor region provided on the other side of the N-type substrate, the P-type semiconductor region consisting an anode region; at least one N-type carrier barrier region; and at least one P-type electric field shielding region. The purpose of the present invention is to provide a semiconductor device which has a novel cell structure to provide: a large safe operating area; a short-circuit resistance; elimination of the effect of parasitic thyristors; a low gate-collector charge (Q.sub.GC) to provide a maximum resistance to dv/dt; increase of conductivity modulation at the emitter side to provide a large current density and an extremely low on-voltage drop; a small turn-off loss; and a low process complexity.

An array of gated devices includes a plurality of gated devices arranged in rows and columns and individually including an elevationally inner region, a mid region elevationally outward of the inner region, and an elevationally outer region elevationally outward of the mid region. A plurality of access lines are individually laterally proximate the mid regions along individual of the rows. A plurality of data/sense lines are individually elevationally outward of the access lines and electrically coupled to the outer regions along individual of the columns. A plurality of metal lines individually extends along and between immediately adjacent of the rows elevationally inward of the access lines. The individual metal lines are directly against and electrically coupled to sidewalls of the inner regions of each of immediately adjacent of the rows. The metal lines are electrically isolated from the data/sense lines. Other arrays of gated devices and methods of forming arrays of gated devices are disclosed.

An array of gated devices includes a plurality of gated devices arranged in rows and columns and individually including an elevationally inner region, a mid region elevationally outward of the inner region, and an elevationally outer region elevationally outward of the mid region. A plurality of access lines are individually laterally proximate the mid regions along individual of the rows. A plurality of data/sense lines are individually elevationally outward of the access lines and electrically coupled to the outer regions along individual of the columns. A plurality of metal lines individually extends along and between immediately adjacent of the rows elevationally inward of the access lines. The individual metal lines are directly against and electrically coupled to sidewalls of the inner regions of each of immediately adjacent of the rows. The metal lines are electrically isolated from the data/sense lines. Other arrays of gated devices and methods of forming arrays of gated devices are disclosed.