H01L29/66325

METHOD FOR MANUFACTURING LATERALLY INSULATED-GATE BIPOLAR TRANSISTOR

The present invention relates to a method for manufacturing a laterally insulated-gate bipolar transistor, comprising: providing a wafer having an N-type buried layer (10), an STI (40), and a first N well (22)/a first P well (24) which are formed successively from above a substrate; depositing and forming a high-temperature oxide film on the first N well (22) of the wafer; performing thermal drive-in on the wafer and performing photoetching and etching on the high-temperature oxide film to form a mini oxide layer (60); performing photoetching and ion implantation so as to form a second N well (32) inside the first N well (22) and second P wells (34) inside the first N well (22) and the first P well (24); then successively forming a gate oxide layer and a polysilicon gate (72), wherein one end of the gate oxide layer and the polysilicon gate (72) extends onto the second P well (34) inside the first N well (22), and the other end extends onto the mini oxide layer (60) on the second N well (32); and photoetching and injecting N-type ions between the mini oxide layer (60) and the STI (40) adjacent to the mini oxide layer (60) to form a drain electrode, and at the same time forming a source electrode (51) inside the second P well (34).

SEMICONDUCTOR DEVICE
20170352747 · 2017-12-07 ·

A semiconductor device includes: a semiconductor substrate having a drift layer; a base layer on the drift layer; a collector layer and a cathode layer arranged on the drift layer opposite to the base layer; multiple trenches penetrating the base layer and reaching the drift layer, and arranged along one direction; a gate electrode arranged in each trench via a gate insulating film; and an emitter region arranged in a surface portion of the base layer, and contacting with each trench. The semiconductor substrate includes an IGBT region having the emitter region and an FWD region in which an injection limiting region and a contact region are arranged in the surface portion of the base layer alternately along the one direction.

SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREFOR AND SEMICONDUCTOR MODULE

A semiconductor device of the present invention achieves improved avoidance of a parasitic operation in a circuit region while achieving miniaturization of the semiconductor device and a reduction in the amount of time for manufacturing the semiconductor device. The semiconductor device according to the present invention includes an IGBT disposed on a first main surface of a semiconductor substrate provided with a drift layer of a first conductivity type; a thyristor disposed on the first main surface of the semiconductor substrate; a circuit region; a hole-current retrieval region separating the IGBT and the circuit region in a plan view; and a diffusion layer of a second conductivity type, the diffusion layer being disposed on a second main surface of the semiconductor substrate. The IGBT has an effective area equal to or less than an effective area of the thyristor in a plan view.

Method for Manufacturing a Power Semiconductor Device

A method for manufacturing a power semiconductor device includes: forming a drift region of a first conductivity type, a second emitter region of a second conductivity type, a pn-junction between the second emitter region and drift region, and a first emitter region having a first doping region of the first conductivity type and a second doping region of the first conductivity type; forming a first emitter metallization in contact with the first emitter region to form an ohmic contact between the first emitter metallization and the first doping region, and to form a non-ohmic contact between the first emitter metallization and the second doping region; and forming a second emitter metallization in contact with the second emitter region. The first emitter region is formed using a mask that is aligned with respect to the second emitter region, so that the first and second doping regions are formed in aligned relation.

Semiconductor device including insulated gate bipolar transistor, diode, and current sense regions

A predetermined relational expression holds where a first distance along the in-plane direction from a channel of the first semiconductor layer to a third semiconductor layer that is the other of the collector layer and the cathode layer is designated as W, a second distance from the channel of the first semiconductor layer to the second semiconductor layer is designated as S, and a diffusion coefficient and a lifetime of a part of the semiconductor substrate between the channel of the first semiconductor layer and the third semiconductor layer are designated as D and τ, respectively.

Insulated gate bipolar transistor structure having low substrate leakage

A high voltage metal-oxide-semiconductor laterally diffused device (HV LDMOS), and more particularly an insulated gate bipolar junction transistor (IGBT), is disclosed. The device includes a semiconductor substrate, a gate structure formed on the substrate, a source and a drain formed in the substrate on either side of the gate structure, a first doped well formed in the substrate, and a second doped well formed in the first well. The gate, source, second doped well, a portion of the first well, and a portion of the drain structure are surrounded by a deep trench isolation feature and an implanted oxygen layer in the silicon substrate.

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
20170288026 · 2017-10-05 ·

A semiconductor device includes a semiconductor layer, having an active region, in which a functional element is formed, a first impurity region of a first conductivity type, formed at a surface layer portion of the semiconductor layer, a second impurity region of a second conductivity type, formed at a surface layer portion of the first impurity region and defining the active region, and a well region of the second conductivity type, formed along a periphery of the second impurity region at the surface layer portion of the first impurity region and having an inner side edge portion positioned at the second impurity region side, and an outer side edge portion positioned at an opposite side with respect to the second impurity region and having a second conductivity type impurity concentration lower than a second conductivity type impurity concentration of the inner side edge portion.

Semiconductor device and method for fabricating the same

A semiconductor device includes a semiconductor substrate and a semiconductor layer formed thereon; a first well region disposed in a portion of the semiconductor layer; a second well region disposed in another portion of the semiconductor layer; a pair of third well regions disposed in a portion of the semiconductor layer at opposite sides of the second well region; a plurality of isolation elements disposed over the semiconductor layer, respectively between the third well regions and the first and second well region; a deep well region disposed in a portion of the semiconductor substrate adjacent to the semiconductor layer between the first and second well region; a first doping region disposed in the first well region; and second doping regions disposed in the third well regions.

Analysis system, analysis method, and program storage medium
11431255 · 2022-08-30 · ·

In order to provide a feature for processing an image of an object being photographed using photographic data having better quality, an image analyzer 1 is provided with a selection unit 104 and a bandwidth control request unit 105. The selection unit 104 selects a second photographing device associated with a first photographing device from among a plurality of photographing devices. The bandwidth control request unit 105 transmits, to a network control device, a request for change of the transmission data amount transmittable by the second photographing device.

SEMICONDUCTOR DEVICE
20170236926 · 2017-08-17 ·

Provided is a semiconductor device comprising: a semiconductor substrate; a plurality of gate trench sections formed in the semiconductor substrate; and a plurality of emitter trench sections formed in the semiconductor substrate, one or more emitter trench sections provided in each region between adjacent gate trench sections of the plurality of gate trench sections, wherein the semiconductor device includes at least one of: pairs of gate trench sections in which at least two gate trench sections of the plurality of gate trench sections are connected; and a pair of emitter trench sections in which at least two emitter trench sections of the plurality of emitter trench sections are connected.