In a case where a semiconductor layer is epitaxially grown on a step shape formed due to CBL (current blocking layer) formation, the crystallinity of the semiconductor layer lowers. Also, a GaN layer that is epitaxially regrown on the CBL is not formed continuously by epitaxial growth, and therefore the crystallinity of the GaN layer lowers. A vertical semiconductor device manufacturing method is provided that comprises: a step of epitaxially growing a gallium nitride-based n-type semiconductor layer on a gallium nitride-based semiconductor substrate; a step of epitaxially growing a gallium nitride-based p-type semiconductor layer on the n-type semiconductor layer; and a step of ion-implanting p-type impurities to form a p.sup.+-type embedded region selectively in a predetermined depth range across the boundary between the n-type semiconductor layer and the p-type semiconductor layer.

A precursor cell for a transistor having a foundation structure, a mask structure, and a gallium nitride (GaN) PN structure is provided. The mask structure is provided over the foundation structure to expose a first area of a top surface of the foundation structure. The GaN PN structure resides over the first area and at least a portion of the mask structure and has a continuous crystalline structure with no internal regrowth interfaces. The GaN PN structure comprises a drift region over the first area, a control region laterally adjacent the drift region, and a PN junction formed between the drift region and the control region. Since the drift region and the control region form the PN junction having no internal regrowth interfaces, the GaN PN structure has a continuous crystalline structure with reduced regrowth related defects at the interface of the drift region and the control region.

A compound semiconductor field effect transistor (FET) may include a channel layer. The semiconductor FET may also include an oxide layer, partially surrounded by a passivation layer, on the channel layer. The semiconductor FET may also include a first dielectric layer on the oxide layer. The semiconductor FET may also include a second dielectric layer on the first dielectric layer. The semiconductor FET may further include a gate, comprising a base gate through the oxide layer and the first dielectric layer, and a head gate in the second dielectric layer and electrically coupled to the base gate.

A semiconductor substrate structure and process for fabrication of the semiconductor substrate structure are described. The semiconductor substrate structure includes a silicon carbide (SiC) wafer substrate, an active gallium nitride (GaN) layer and a layer of microcrystalline diamond (MCD) layer disposed between the SiC wafer substrate and the GaN active layer. The MCD) layer is bonded to the SiC wafer substrate and to the GaN active layer.

In an embodiment, a semiconductor device is provided that includes a lateral transistor device having a source, a drain and a gate, and a monolithically integrated capacitor coupled between the gate and the drain.

A semiconductor device includes a substrate and a p-doped layer including a doped III-V material on the substrate. An n-type material is formed on or in the p-doped layer. The n-type layer includes ZnO. An aluminum contact is formed in direct contact with the ZnO of the n-type material to form an electronic device.

A compound semiconductor field effect transistor (FET) may include gallium nitride (GaN) and alloy material layers. The compound semiconductor FET may also include a pair of L-shaped contacts on the GaN and alloy material layers. The compound semiconductor FET may also include a pair of gate spacers between the L-shaped contacts and on the GaN and alloy material layers, each of the pair of gate spacers contacting one of the L-shaped contacts. The compound semiconductor FET may further include a base gate between the pair of gate spacers and on the GaN and alloy material layers, in which the pair of L-shaped contacts are self-aligned with the base gate.

FinFET devices including III-V fin structures and silicon-based source/drain regions are formed on a semiconductor substrate. Silicon is diffused into the III-V fin structures to form n-type junctions. Leakage through the substrate is addressed by forming p-n junctions adjoining the source/drain regions and isolating the III-V fin structures under the channel regions.

Disclosed is an integrated circuit (IC) structure that incorporates stacked pair(s) of field effect transistors (FETs), where each stacked pair has a shared gate. The structure also includes an irregular-shaped buried interconnect that connects source/drain regions that are on opposite sides of the shared gate and at different levels (i.e., a lower FET's source/drain region on one side of the shared gate to an upper FET's source/drain region on the opposite side). Also disclosed is a method for forming the structure by forming, during different process stages, different sections of an irregular-shaped cavity (including sections that expose surfaces of the source/drain regions at issue and a section with sidewalls lined by a dielectric spacer) and filling the different sections with sacrificial material. When all of the sections are completed, the sacrificial material is selectively removed, thereby creating the irregular-shaped cavity. Then, the buried interconnect is formed within the cavity.

A compound semiconductor field effect transistor (FET) may include a channel layer. The semiconductor FET may also include an oxide layer, partially surrounded by a passivation layer, on the channel layer. The semiconductor FET may also include a first dielectric layer on the oxide layer. The semiconductor FET may also include a second dielectric layer on the first dielectric layer. The semiconductor FET may further include a gate, comprising a base gate through the oxide layer and the first dielectric layer, and a head gate in the second dielectric layer and electrically coupled to the base gate.