H01L29/66477

SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR MEMORY DEVICE
20230225121 · 2023-07-13 · ·

A semiconductor device includes: a semiconductor substrate (10) having a first region (NP1) and a second region (NP2); a first insulating layer (2b); a first gate electrode (3b) having a first semiconductor layer (31b) containing an impurity, a first conductive layer (32b) containing titanium, a second conductive layer (33b) containing nitrogen and either titanium or tungsten, and a third conductive layer (34b) containing tungsten; a second insulating layer (4b) provided on the third conductive layer and containing oxygen and silicon; a third insulating layer (5b) provided on the second insulating layer and containing nitrogen and silicon; a first contact (CS) provided on the first region; a second contact (CS) provided on the second region; and a third contact (C0) provided on the third conductive layer of the first gate electrode and penetrating through the second insulating layer and the third insulating layer.

SEMICONDUCTOR STRUCTURE AND FORMING METHOD THEREOF

A semiconductor structure and a forming method thereof are provided. The method includes: providing a substrate, a dummy spacer being formed on a side wall of the gate structure, a contact etch stop layer being formed on a side wall of the dummy spacer, and a source/drain doped area being formed in the substrate on two sides of the gate structure; forming a sacrificial dielectric layer above tops of the source/drain doped area and the gate structure; forming a source/drain plug running through the sacrificial dielectric layer; etching the sacrificial dielectric layer until a top of the dummy spacer is exposed; removing, after the top of the dummy spacer is exposed, the dummy spacer to form a gap between the contact etch stop layer and the side wall of the gate structure; and forming a top dielectric layer filling between the source/drain plugs.

Field Effect Transistor Device, and Method for Improving Short-Channel Effect and Output Characteristic Thereof
20230223466 · 2023-07-13 ·

The present invention provides a field effect transistor device and a method for improving the short-channel effect and the output characteristics using the same. The field effect transistor device comprises an active layer comprising a source region, a drain region, and a channel region located between the source region and the drain region; when the device is turned on, an effective channel and an equivalent source and/or equivalent drain away from the effective channel are formed in the channel region, and the field effect transistor device connects the source region with the drain region through the effective channel, and the equivalent source and/or equivalent drain to form an operating current.

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MODULE
20230223441 · 2023-07-13 ·

Provided is a semiconductor device including: a transistor portion provided in a semiconductor substrate; and a diode portion provided in the semiconductor substrate, in which an area ratio of the transistor portion to the diode portion on a front surface of the semiconductor substrate is larger than 3.1 and smaller than 4.7. Provided is a semiconductor module including: a semiconductor device including a transistor portion and a diode portion provided in a semiconductor substrate; an external connection terminal electrically connected to the semiconductor device; and a coupling portion for electrically connecting the semiconductor device and the external connection terminal. The coupling portion may be in plane contact with a front surface electrode of the semiconductor device at a predetermined junction surface. An area ratio of the transistor portion to the diode portion may be larger than 2.8 and smaller than 4.7.

Nanowire structures having non-discrete source and drain regions

Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.

SEMICONDUCTOR DEVICE, POWER CONVERSION APPARATUS, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

A semiconductor device according to the present disclosure includes: a gate electrode provided in a gate trench and provided so as to oppose a source region via a gate insulating film; a first bottom protection region of a second conductivity type provided below the gate insulating film; a plurality of first connection regions of the second conductivity type provided at a first interval in an extension direction of the gate trench and electrically connecting the first bottom protection region and a body region; a Schottky electrode provided in a Schottky trench; a second bottom protection region of the second conductivity type provided below the Schottky electrode; and a plurality of second connection regions of the second conductivity type provided at a second interval smaller than the first interval in an extension direction of the Schottky trench and electrically connecting the second bottom protection region and the body region.

Semiconductor device and manufacturing method of the same

On a semiconductor substrate having an SOI region and a bulk silicon region formed on its upper surface, epitaxial layers are formed in source and drain regions of a MOSFET formed in the SOI region, and no epitaxial layer is formed in source and drain regions of a MOSFET formed in the bulk silicon region. By covering the end portions of the epitaxial layers with silicon nitride films, even when diffusion layers are formed by implanting ions from above the epitaxial layers, it is possible to prevent the impurity ions from being implanted down to a lower surface of a silicon layer.

Multilevel semiconductor device and structure with oxide bonding

A multi-level semiconductor device, the device including: a first level including integrated circuits; a second level including a structure designed to conduct electromagnetic waves, where the second level is disposed above the first level, where the integrated circuits include single crystal transistors; and an oxide layer disposed between the first level and the second level, where the integrated circuits include at least one processor, where the second level is bonded to the oxide layer, and where the bonded includes oxide to oxide bonds.

DISPLAY DEVICE
20220415988 · 2022-12-29 ·

According to one embodiment, a display device comprises an insulating base, a plurality of light-emitting elements, a plurality of pixel circuits, and a plurality of lines. The insulating base includes a plurality of first island portions and a plurality of non-linear line portions connecting two of the first island portions. The light-emitting elements are arranged in each of the first island portions. The pixel circuits are arranged in each of the first island portions and driving the light-emitting elements. The lines are arranged in each of the line portions and connected to the pixel circuits of the two first island portions connected by the line portions.

SEMICONDUCTOR DEVICE
20220415884 · 2022-12-29 ·

A semiconductor device includes a semiconductor substrate, a contact region, a carrier suppression region and an electrode. The semiconductor substrate is shared by an insulated gate bipolar transistor (IGBT) region with an IGBT element and a freewheeling diode (FWD) region with an FWD element. The carrier suppression region is exposed from a surface of the semiconductor substrate in the IGBT region, and has a lower impurity concentration than the contact region. The carrier suppression region has a Schottky barrier junction with the electrode.