A semiconductor device includes a dielectric structure, a first source/drain electrode, a second source/drain electrode, an oxide semiconductor layer, a gate dielectric layer, and a first gate electrode. The first source/drain electrode is disposed in the dielectric structure. The oxide semiconductor layer is disposed on the first source/drain electrode in a vertical direction. The second source/drain electrode disposed on the oxide semiconductor layer in the vertical direction. The gate dielectric layer is disposed on the dielectric structure and surrounds the oxide semiconductor layer in a horizontal direction. The gate dielectric layer includes a first portion and a second portion. The first portion is elongated in the horizontal direction. The second portion is disposed on the first portion and elongated in the vertical direction. The first gate electrode is disposed on the first portion of the gate dielectric layer.

The present disclosure relates to a method for fabricating an FET structure. The method includes forming on a substrate a first semiconductor structure and an insulator structure covering the first semiconductor structure with a first insulator layer, forming on the first insulator layer a sacrificial layer extending to a reference plane, forming a second insulator layer on the reference plane, forming a first cavity through the second insulator layer, the sacrificial layer and the first insulator layer, thus exposing a surface of the first semiconductor structure, filling the first cavity with a second semiconductor structure extending from the surface at least up to the first reference plane, forming a third semiconductor structure on the second semiconductor structure, selectively removing the sacrificial layer, thus forming a second cavity, and filling the second cavity with a gate structure.

A method includes: forming a dielectric fin protruding above a substrate; forming a channel layer over an upper surface of the dielectric fin and along first sidewalls of the dielectric fin, the channel layer including a low dimensional material; forming a gate structure over the channel layer; forming metal source/drain regions on opposing sides of the gate structure; forming a channel enhancement layer over the channel layer; and forming a passivation layer over the gate structure, the metal source/drain regions, and the channel enhancement layer.

A 3D memory array has data storage structures provided at least in part by one or more vertical films that do not extend between vertically adjacent memory cells. The 3D memory array includes conductive strips and dielectric strips, alternately stacked over a substrate. The conductive strips may be laterally indented from the dielectric strips to form recesses. A data storage film may be disposed within these recesses. Any portion of the data storage film deposited outside the recesses may have been effectively removed, whereby the data storage film is essentially discontinuous from tier to tier within the 3D memory array. The data storage film within each tier may have upper and lower boundaries that are the same as those of a corresponding conductive strip. The data storage film may also be made discontinuous between horizontally adjacent memory cells.

A transistor, integrated semiconductor device and methods of making. The transistor includes a dielectric layer having a plurality of dielectric protrusions, a channel layer conformally covering the protrusions of the dielectric layer to form a plurality of trenches between two adjacent dielectric protrusion, a gate layer disposed on the channel layer. The gate layer 106 has a plurality of gate protrusions fitted into the trenches. The transistor also includes active regions aside the gate layer. The active regions are electrically connected to the channel layer.

Thin film transistors fabricated using a spacer as a fin are described. In an example, a method of forming a fin transistor structure includes patterning a plurality of backbone pillars on a semiconductor substrate. The method may then include conformally depositing a spacer layer over the plurality of backbone pillars and the semiconductor substrate. A spacer etch of the spacer layer is then performed to leave a sidewall of the spacer layer on a backbone pillar to form a fin of the fin transistor structure. Other embodiments may be described and claimed

Integrated circuit structures having GeSnB source or drain structures, and methods of fabricating integrated circuit structures having GeSnB source or drain structures, are described. For example, an integrated circuit structure includes a vertical arrangement of horizontal nanowires. A gate stack is around the vertical arrangement of horizontal nanowires. A first epitaxial source or drain structure is at a first end of the vertical arrangement of horizontal nanowires, and a second epitaxial source or drain structure is at a second end of the vertical arrangement of horizontal nanowires. The first and second epitaxial source or drain structures include germanium, tin and boron.

In a general aspect, a transistor can include a fin having a proximal end and a distal end. The fin can include a dielectric portion longitudinally extending between the proximal end and the distal end, and a semiconductor layer disposed on the dielectric portion. The semiconductor layer can longitudinally extend between the proximal end and the distal end. The transistor can further include a source region disposed at the proximal end of the fin, and a drain region disposed at the distal end of the fin. The transistor can also include a gate dielectric layer disposed on a channel region of the semiconductor layer. The channel region can be disposed between the gate dielectric layer and the dielectric portion. The channel region can be longitudinally disposed between the source region and the drain region. The transistor can further include a conductive gate electrode disposed on the gate dielectric layer.

Semiconductor devices and methods of forming the same are provided. A semiconductor device according to the present disclosure include a source feature disposed over a backside source contact, a drain feature disposed over a backside dielectric layer, a plurality of channel members each extending between the source feature and the drain feature, and a gate structure wrapping around each of the plurality of channel members and disposed over the backside dielectric layer. The backside source contact is spaced apart from the backside dielectric layer by a gap.

Disclosed herein are gradient-doped sacrificial layers in integrated circuit (IC) structures, as well as related methods and components. For example, in some embodiments, an IC component may include a stack of layers of a first material alternating along an axis with layers of a second material, wherein the first material includes at least one of silicon and germanium, the second material includes silicon and germanium, and a concentration of germanium in an individual layer of the second material increases toward adjacent layers of the first material.