A semiconductor device, comprises a source, and a drain spaced apart from the source in a first direction. A channel layer is disposed on radially outer surfaces of the source and the drain in a second direction orthogonal to the first direction. A memory layer is disposed on a radially outer surface of the channel layer. A via is disposed at an axial end of the drain and is configured to electrically couple the drain to a global drain line. The via comprises a via base extending in a plane defined by the first direction and a second direction perpendicular to the first direction, and structured to contact the corresponding global drain line, and via sidewalls extending from outer peripheral edges of the base towards the drain. The via defines an internal cavity within which at least a portion of the axial end of the drain is disposed.

A semiconductor device and a method for manufacturing the same, and a NAND memory device are disclosed. The method comprises: forming a substrate that comprises a first active region and an isolation region; forming a first groove between the isolation region and the first channel region, the first groove being partially located in the isolation region, and not penetrating through the isolation region; forming a first gate insulating layer covering the first groove and the first channel region; forming a first gate on the first gate insulating layer, the first gate covering the first channel region and filling the first groove.

A semiconductor device includes a substrate, a ferroelectric layer disposed on the substrate in a vertical direction, a charge trap layer disposed on the ferroelectric layer, a gate insulation layer disposed on the charge trap layer, and a gate electrode layer disposed on the gate insulation layer. The charge trap layer includes a metal-organic framework layer and metal particles embedded in the metal-organic framework layer.

A semiconductor device capable of shortening an erasing time and suppressing deterioration of retention characteristics is provided. A semiconductor device includes: a semiconductor substrate having a main surface; a gate insulating film formed on the main surface; and a gate electrode formed on the gate insulating film. The gate insulating film includes a first silicon nitride film, and a first silicon oxide film arranged between the main surface and the first silicon nitride film and in contact with the first silicon nitride film. A Si—Si bond is formed in a boundary portion between the first silicon oxide film first silicon nitride film.

Disclosed is a method of manufacturing flash memory with a vertical cell stack structure. The method includes forming source lines in a cell area of a substrate having an ion-implanted well and forming an alignment mark relative to the source lines. The alignment mark is formed in the substrate outside the cell area of the substrate. After formation of the source lines, cell stacking layers are formed. After forming the cell stacking layers, cell pillars in the cell stacking layers are formed at locations relative to the previously formed source lines using the alignment mark to correctly locate the cell pillars.

A semiconductor device is provided. The semiconductor device includes a stack structure disposed on a lower structure; an insulating structure disposed on the stack structure; and a vertical structure extending in a direction perpendicular to an upper surface of the lower structure and having side surfaces opposing the stack structure and the insulating structure. The stack structure includes interlayer insulating layers and gate layers, alternately stacked, and the insulating structure includes a lower insulating layer, an intermediate insulating layer on the lower insulating layer, and an upper insulating layer on the intermediate insulating layer.

Transistors, and memories including such transistors, might include an active area having a first conductivity type, first and second source/drain regions in the active area and having a second conductivity type, and a plurality of control gates between the first and second source/drain regions and the second source/drain region, wherein each control gate of the plurality of control gates includes a respective first control gate portion overlying a first side of the active area, and a respective second control gate portion connected to its respective first control gate portion that is either adjacent to a second side of the active area orthogonal to the first side of the active area, or underlying a second side of the active area opposite the first side of the active area.

A memory device includes an alternating stack of insulating layers and control gate layers, a memory opening vertically extending through the alternating stack, and a memory opening fill structure containing a memory film and a vertical semiconductor channel located within the memory opening. The memory film contains a resonant tunneling barrier stack, a semiconductor barrier layer, and a memory material layer located between the resonant tunneling barrier stack and the semiconductor barrier layer.

The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a source/drain region arranged within a substrate. A first select gate is arranged over the substrate, and a first memory gate is arranged over the substrate and separated from the source/drain region by the first select gate. An inter-gate dielectric structure is arranged between the first memory gate and the first select gate. The inter-gate dielectric structure extends under the first memory gate. A height of the inter-gate dielectric structure decreases along a direction extending from the first select gate to the first memory gate.

Some embodiments include a semiconductor device having a stack structure including a source comprising polysilicon, an etch stop of oxide on the source, a select gate source on the etch stop, a charge storage structure over the select gate source, and a select gate drain over the charge storage structure. The semiconductor device may further include an opening extending vertically into the stack structure to a level adjacent to the source. A channel comprising polysilicon may be formed on a side surface and a bottom surface of the opening. The channel may contact the source at a lower portion of the opening, and may be laterally separated from the charge storage structure by a tunnel oxide. A width of the channel adjacent to the select gate source is greater than a width of the channel adjacent to the select gate drain.