A semiconductor device including: a P-type base region provided; an N-type emitter region provided inside the P-type base region; a P-type collector region that is provided on the surface layer portion of the N-type semiconductor layer and is separated from the P-type base region; a gate insulating film that is provided on the surface of the N-type semiconductor layer, and that contacts the P-type base region and the N-type emitter region; a gate electrode on the gate insulating film; a pillar shaped structure provided inside the N-type semiconductor layer between the P-type base region and the P-type collector region, wherein one end of the pillar shaped structure is connected to an N-type semiconductor that extends to the surface layer portion of the N-type semiconductor layer, and the pillar shaped structure includes an insulator extending in a depth direction of the N-type semiconductor layer.

Methods according to the present disclosure include: providing a substrate including: a first semiconductor region, a second semiconductor region, and a trench isolation (TI) laterally between the first and second semiconductor regions; forming an epitaxial layer on at least the first semiconductor region of the substrate, wherein the epitaxial layer includes a first semiconductor base material positioned above the first semiconductor region of the substrate; forming an insulator region on at least the first semiconductor base material, the trench isolation (TI), and the second semiconductor region; forming a first opening in the insulator over the second semiconductor region; and growing a second semiconductor base material in the first opening, wherein a height of the second semiconductor base material above the substrate is greater than a height of the first semiconductor base material above the substrate.

A semiconductor device includes a P-type semiconductor substrate, a plurality of N-type buried diffusion layers that are arranged in the semiconductor substrate, an N-type first semiconductor layer that is arranged in a first region on a first buried diffusion layer, an N-type second semiconductor layer that is arranged in a second region on a second buried diffusion layer, an N-type first impurity diffusion region that surrounds the first region in plan view, a P-type second impurity diffusion region that is arranged in the second semiconductor layer, an N-type third impurity diffusion region that is arranged in the second semiconductor layer, an N-type fourth impurity diffusion region that is arranged in the first semiconductor layer. The second region is a region in which an N-type impurity diffusion region that has a higher impurity concentration than the second semiconductor layer cannot be arranged.

A method of producing a semiconductor component is provided. The method includes providing a silicon substrate having a <111>-surface defining a vertical direction, forming in the silicon substrate at least one electronic component, forming at least two epitaxial semiconductor layers on the silicon substrate to form a heterojunction above the <111>-surface, and forming a HEMT-structure above the <111>-surface.

A method of forming a lateral bipolar junction transistor (LBJT) that includes providing a germanium containing layer on a crystalline oxide layer, and patterning the germanium containing layer stopping on the crystalline oxide layer to form a base region. The method may further include forming emitter and collector extension regions on opposing sides of the base region using ion implantation, and epitaxially forming an emitter region and collector region on the crystalline oxide layer into contact with the emitter and collector extension regions. The crystalline oxide layer provides a seed layer for the epitaxial formation of the emitter and collector regions.

A device includes a bipolar transistor. The bipolar transistor includes: a collector region, a base region, and an emitter region. A first metallization is in contact with the emitter region, a second metallization is in contact with the base region, and a third metallization is in contact with the collector region. A first connection element is coupled to the first metallization and has dimensions, in a plane of the interface between the first metallization and the connection element, greater than dimensions of the first metallization. A second connection element is coupled to the second metallization and passes through spacers, which at least partially cover the second metallization, surrounding the emitter region. A third connection element is coupled to the third metallization and passes through spacers, which at least partially cover the third metallization, surrounding the base region.