A method of manufacturing a semiconductor device includes forming an auxiliary mask including a plurality of mask openings on a main surface of a crystalline semiconductor substrate. A porous structure is formed in the semiconductor substrate. The porous structure includes a porous layer at a distance to the main surface and porous columns that extend from the porous layer into direction of the main surface and that are laterally separated from each other by a non-porous portion. A non-porous device layer is formed on the non-porous portion and on the porous columns.

The semiconductor device includes, in plan view, a gate electrode having a first portion located on a side surface portion where a plurality of emitter regions are formed, and a gate electrode having a second portion located between the plurality of emitter regions. The second portion of the gate electrode has a length shorter than first portion in the direction from the main surface to the back surface of the gate electrode of the semiconductor substrate.

A semiconductor device includes a substrate, an epitaxial layer, an emitter region, and a collector region. The epitaxial layer is disposed over the substrate and has a first conductivity type. The drift region is disposed in the epitaxial layer and has a second conductivity type that is the opposite of the first conductivity type. The emitter region is disposed in the epitaxial layer outside the drift region. The collector region is disposed in the drift region. The semiconductor device also includes a doped region. The doped region is disposed adjacent to the bottom surface of the drift region and has the first conductivity type.

In an embodiment, an apparatus includes: a signal pad; a first diode having a first terminal coupled to the signal pad and a second terminal, the first diode having a first polarity; a second diode having a second terminal coupled to the signal pad and a first terminal, the second diode having a second polarity; a first insulated gate bipolar transistor (IGBT) having a first polarity, the first IGBT coupled between the second terminal of the first diode and a reference voltage node; and a second IGBT having the first polarity, the second IGBT coupled between the first terminal of the second diode and the reference voltage node.

A semiconductor device includes a semiconductor layer having a first principal surface on one side thereof and a second principal surface on the other side thereof, a channel region of a first conductivity type formed at a surface layer portion of the first principal surface of the semiconductor layer, an emitter region of a second conductivity type formed at a surface layer portion of the channel region in the semiconductor layer, a drift region of the second conductivity type formed in a region of the second principal surface side with respect to the channel region in the semiconductor layer so as to be electrically connected to the channel region, a collector region of the first conductivity type formed at a surface layer portion of the second principal surface of the semiconductor layer so as to be electrically connected to the drift region, a cathode region of the second conductivity type formed at a surface layer portion of the second principal surface of the semiconductor layer so as to be electrically connected to the drift region and including a continuously laid around line-shaped pattern, and a gate electrode formed at the first principal surface side of the semiconductor layer so as to face the channel region across an insulating film.

The present disclosure relates to a high-speed superjunction lateral insulated gate bipolar transistor, and belongs to the technical field of semiconductor power devices. Fast turn-off can be achieved by replacing the lightly doped substrate of the existing bulk silicon superjunction lateral insulated gate bipolar transistor with heavily doped substrate, breakdown voltage of the device is ensured by reasonably setting the total number of impurities in each drift region of the over junction-sustaining voltage layer, and further application thereof in integrated circuits is realized by providing the semiconductor second substrate region and the semiconductor isolation region. A high speed superjunction laterally insulated gate bipolar transistor according to the present disclosure solves the contradiction between cost of the superjunction laterally insulated gate bipolar transistor and achievement of fast turn-off on a bulk silicon substrate.

We disclose herein a gate controlled bipolar semiconductor device comprising: a collector region of a first conductivity type; a drift region of a second conductivity type located over the collector region;a body region of a first conductivity type located over the drift region; a plurality of first contact regions of a second conductivity type located above the body region and having a higher doping concentration than the body region; a second contact region of a first conductivity type located laterally adjacent to the plurality of first contact regions, the second contact region having a higher doping concentration than the body region; at least two active trenches each extending from a surface into the drift region;an emitter trench extending from the surface into the drift region; wherein each first contact region adjoins an active trench so that, in use, a channel is formed along said each active trench and within the body region; wherein the second contact region adjoins the emitter trench; and wherein the emitter trench is located between two active trenches.

A semiconductor device includes an insulated gate field effect transistor connected in series with a FET. The FET includes parallel conductive layers. A substrate of first conductivity type extends under both transistors, with a first layer of a second conductivity type over the substrate. On this first layer are arranged conductive layers with channels formed by the first conductivity type doped epitaxial layers with layers of a first conductivity type on both sides. The uppermost layer of the device is thicker than the directly underlying several parallel conductive layers. The field effect transistor, JFET, is isolated with deep poly trenches of first conductivity type, DPPT, on the source side of the JFET. The insulated gate field effect transistor is isolated with deep poly DPPT trenches on both sides. A further isolated region with logic and analog control functions is isolated with deep poly DPPT trenches on both sides.

A gate controlled semiconductor device comprising a collector region of a first conductivity type; a drift region of a second conductivity type located over the collector region; a body region of a first conductivity type located over the drift region; at least one first contact region of a second conductivity type located above the body region and having a higher doping concentration compared to the body region. The device further comprises at least one second contact region of a first conductivity type located laterally adjacent to the at least one first contact region, the at least one second contact region having a higher doping concentration than the body region. The device further comprises at least one active trench extending from a surface into the drift region, in which the at least one first contact region adjoins the at least one active trench so that, in use, a channel region is formed along said at least one active trench and within the body region. The at least one active trench comprises: two vertical sidewalls and a bottom surface between the two vertical sidewalls; and an insulation layer along the vertical side walls and the bottom surface, wherein the insulation layer along at least one vertical side wall comprises different thicknesses; at least one auxiliary trench extending from the surface into the drift region. The at least one auxiliary trench comprises: two vertical sidewalls and a bottom surface between the two vertical sidewalls; and an insulation layer along the vertical side walls and the bottom surface, wherein the insulation layer along at least one vertical side wall comprises a constant thickness.

Systems and methods of the disclosed embodiments include a semiconductor device structure having a semiconductor substrate. The semiconductor substrate has a first major surface, an opposing second major surface, a first doped region of a first conductivity type disposed beneath the first major surface, and a semiconductor region of the first conductivity type disposed between the first doped region and the second major surface. The semiconductor device may also include a trench isolation structure, comprising a conductive trench filling enclosed by an insulating trench liner. The trench isolation structure extends from the first major surface through the first doped region and into the semiconductor region. The semiconductor device may also include a semiconductor device disposed with a drain structure, and a connection structure formed between the conductive trench filling of the trench isolation structure and the drain region.