A semiconductor device includes a carrier generation layer disposed on a channel layer, a source contact and a drain contact disposed on the carrier generation layer, and a gate contact disposed between the source contact and the drain contact. The semiconductor device further includes a number N of conductive stripes disposed directly on the carrier generation layer in an area between the drain contact and the gate contact, and a number M of conductive transverse stripes disposed directly on the carrier generation layer in the area between the drain contact and the gate contact. Each of the N conductive stripes extends from and is electrically coupled to the drain contact. Each of the M conductive transverse stripes is aligned non-parallel to the N conductive stripes and is not in direct physical contact with the N conductive stripes.

Disclosed herein are integrated circuit (IC) structures, packages, and devices that include thin-film transistors (TFTs) integrated on the same substrate/die/chip as III-N transistors. One example IC structure includes an III-N transistor in a first layer over a support structure (e.g., a substrate) and a TFT in a second layer over the support structure, where the first layer is between the support structure and the second layer. Another example IC structure includes a III-N semiconductor material and a TFT, where at least a portion of a channel material of the TFT is over at least a portion of the III-N semiconductor material.

A semiconductor structure includes: a channel layer; an active layer over the channel layer, wherein the active layer is configured to form a two-dimensional electron gas (2DEG) to be formed in the channel layer along an interface between the channel layer and the active layer; a gate electrode over a top surface of the active layer; and a source/drain electrode over the top surface of the active layer; wherein the active layer includes a first layer and a second layer sequentially disposed therein from the top surface to a bottom surface of the active layer, and the first layer possesses a higher aluminum (Al) atom concentration compared to the second layer. An HEMT structure and an associated method are also disclosed.

Semiconductor device structures and methods for manufacturing the same are provided. The semiconductor device structure includes a substrate, a first nitride semiconductor layer, a second nitride semiconductor layer, a gate structure and a conductive layer. The substrate has a first surface. The first nitride semiconductor layer is disposed on the first surface of the substrate. The second nitride semiconductor layer is disposed on the first nitride semiconductor layer. The gate structure is disposed on the second nitride semiconductor layer. The conductive layer is disposed on the second nitride semiconductor layer. The conductive layer has a first length extending in a first direction substantially parallel to the first surface of the substrate, a second length extending in a second direction substantially perpendicular to the first direction—from a cross section view perspective—wherein the second length is greater than the first length.

The present disclosure provides a semiconductor device and a fabrication method thereof. The semiconductor device includes a semiconductor stack and a first ohmic contact. The semiconductor stack is formed on a substrate. The semiconductor stack has a first nitride semiconductor layer and a second nitride semiconductor layer formed on the first nitride semiconductor layer. The second nitride semiconductor layer has a wider bandgap than that of the first nitride semiconductor layer. The first ohmic contact is disposed over the semiconductor stack. The first to ohmic contact has a first opening exposing the first nitride semiconductor layer.

A field-effect transistor includes a gate electrode formed on an electron supply layer thereon, a source electrode and a drain electrode thereon; and also the field-effect transistor includes an insulation film for covering the electron supply layer, and an opening portion of the insulation film, having trapezoidal prism's oblique contour faces, being provided in a region to form the gate electrode in the insulation film. It is so arranged that the gate electrode is made to have a Schottky junction with respect to a region where the electron supply layer is exposed through the opening portion, and also that the trapezoidal prism's oblique contour faces each formed by the opening portion have inclination angles in a range from 25 degrees to 75 degrees with respect to a surface of the electron supply layer.

An integrated circuit structure comprises a silicon substrate and a III-nitride (III-N) substrate over the silicon substrate. A first III-N transistor and a second III-N transistor is on the III-N substrate. An insulator structure is formed in the III-N substrate between the first III-N transistor and the second III-N, wherein the insulator structure comprises one of: a shallow trench filled with an oxide, nitride or low-K dielectric; or a first gap adjacent to the first III-N transistor and a second gap adjacent to the second III-N transistor.

A semiconductor device according to one aspect of the present disclosure includes a substrate including a first main surface, a semiconductor layer provided on the first main surface of the substrate, and a gate electrode, a source electrode, and a drain electrode, provided on the semiconductor layer. The semiconductor layer has an electron transit layer provided above the substrate and including a first upper surface, and an electron supply layer provided above the electron transit layer. The electron supply layer and the electron transit layer have a first opening and a second opening. A bottom surface of the first opening and a bottom surface of the second opening each exist at a deeper position toward the substrate than the first upper surface.

A High Electron Mobility Transistor (HEMT) having a reduced surface field (RESURF) junction is provided. The HEMT includes a source electrode at a first end and a drain electrode at a second end. A gate electrode is provided between the source electrode and the drain electrode. A reduced surface field (RESURF) junction extends from the first end to the second end. The gate electrode is provided above the RESURF junction. A buried channel layer is formed in the RESURF junction on application of a positive voltage at the gate electrode. The RESURF junction includes an n-type Gallium nitride (GaN) layer and a p-type GaN layer. The n-type GaN layer is provided between the p-type GaN layer and the gate electrode.

Embodiments herein describe techniques, systems, and method for a semiconductor device. Embodiments herein may present a semiconductor device having a channel area including a channel III-V material, and a source area including a first portion and a second portion of the source area. The first portion of the source area includes a first III-V material, and the second portion of the source area includes a second III-V material. The channel III-V material, the first III-V material and the second III-V material may have a same lattice constant. Moreover, the first III-V material has a first bandgap, and the second III-V material has a second bandgap, the channel III-V material has a channel III-V material bandgap, where the channel material bandgap, the second bandgap, and the first bandgap form a monotonic sequence of bandgaps. Other embodiments may be described and/or claimed.