A method for controlling a concentration of donors in an Al-alloyed gallium oxide crystal structure includes implanting a Group IV element as a donor impurity into the crystal structure with an ion implantation process and annealing the implanted crystal structure to activate the Group IV element to form an electrically conductive region. The method may further include depositing one or more electrically conductive materials on at least a portion of the implanted crystal structure to form an ohmic contact. Examples of semiconductor devices are also disclosed and include a layer of an Al-alloyed gallium oxide crystal structure, at least one region including the crystal structure implanted with a Group IV element as a donor impurity with an ion implantation process and annealed to activate the Group IV element, an ohmic contact including one or more electrically conductive materials deposited on the at least one region.

A vertical fin field-effect transistor. The transistor has a semiconductor fin, an n-doped source region, an n-doped drift region, an n-doped channel region in the semiconductor fin situated vertically between the source region and the drift region, a gate region horizontally adjacent to the channel region, a gate dielectric electrically insulating the gate region from the channel region, a boundary surface between the gate dielectric and the channel region having negative boundary surface charges, a p-doped gate shielding region situated below the gate region so that, given the vertical projection, the gate shielding region is situated within a surface limited by the gate dielectric, a source contact electrically conductively connected to the source region, and an electrically conductive region between the gate region and the p-doped gate shielding region. The p-doped gate shielding region is electrically conductively connected to the source contact by the electrically conductive region.

A vertical, fin-based field effect transistor (FinFET) device includes an array of individual FinFET cells. The array includes a plurality of rows and columns of separated fins. Each of the separated fins is in electrical communication with a source contact. The vertical FinFET device also includes one or more rows of first inactive fins disposed on a first set of sides of the array of individual FinFET cells, one or more columns of second inactive fins disposed on a second set of sides of the array of individual FinFET cells, and a gate region surrounding the individual FinFET cells of the array of individual FinFET cells, the first inactive fins, and the second inactive fins.

A method of fabricating a wide bandgap device includes providing a thin native substrate. An epitaxial layer is grown on a surface of the native substrate. After growing the epitaxial layer, a handle substrate is attached to the opposite surface of the native substrate by way of an interface layer. With the handle substrate providing mechanical support, wide bandgap devices are fabricated in the epitaxial layer using a low-temperature fabrication process. The handle substrate is detached from the native substrate after fabrication of the wide bandgap devices.

A vertical field-effect transistor. The vertical field-effect transistor includes: a drift area; a first semiconductor fin on or above the drift area and electrically conductively connected thereto; a plurality of second semiconductor fins on or above the drift area, the plurality of second semiconductor fins being formed connected electrically nonconductively to the drift area, the plurality of second semiconductor fins being situated laterally adjacent to at least one side wall of the first semiconductor fin and being electrically conductively connected thereto; and a source/drain electrode, which is electrically conductively connected to the plurality of second semiconductor fins.

A Vertical Field Effect Transistor (VFET) and/or a one transistor dynamic random access memory 1T DRAM that has a substrate with a horizontal substrate surface, a source disposed on the horizontal substrate surface, a drain, and a channel. The channel has a channel top, a channel bottom, a first channel side, a second channel side, and two channel ends. The channel top is connected to the drain. The channel bottom is connected to the source. The channel is vertical and perpendicular to the substrate surface. A first gate stack interfaces with the first channel side and a second gate stack interfaces with the second channel side. A single external gate connection electrically connects the first gate stack and the second gate stack A gate bias (voltage) applied on the single external gate connection biases the first channel side in accumulation and biases the second channel side in inversion. The first gate stack is made of a first high-k dielectric layer and a first gate metal layer. The second gate stack is made of a second high-k dielectric layer and a second gate metal layer. The single external gate electrical connection is made to the first gate metal layer and the second gate metal layer. The first and second channel side can be made of the same or different materials. The first and second gate metal layer can be made of the same or different materials. One of the channel ends forms a floating body region, i.e. a capacitance, used by the 1T DRAM.

A semiconductor device includes: an n− type layer disposed on a first surface of an n+ type silicon carbide substrate; a first trench formed in the n− type layer; a p type region disposed on both side surfaces of the first trench; an n+ type region disposed on both side surfaces of the first trench and disposed on the n− type layer and the p type region; a gate insulating layer disposed inside the first trench; a gate electrode disposed on the gate insulating layer; an oxide layer disposed on the gate electrode; a source electrode disposed on the oxide layer and the n+ region; and a drain electrode disposed on the second surface of the n+ type silicon carbide substrate, wherein a first channel as an accumulation layer channel and a second channel as an inversion layer channel are disposed in both side surfaces of the first trench, and the first channel and the second channel are disposed to be adjacent in a horizontal direction for the first surface of the n+ type silicon carbide substrate.

Integrated circuit devices including standard cells are provided. The standard cells may include a first vertical field effect transistor (VFET) including a first channel region and having a first conductivity type and a second VFET including a second channel region and having a second conductivity type that is different from the first conductivity type. Each of the first channel region and the second channel region may extend longitudinally in a first horizontal direction, and the first channel region may be spaced apart from the second channel region in a second horizontal direction that is perpendicular to the first horizontal direction.

A field-plate trench FET having a drain region, an epitaxial layer, a source region, a gate conductive layer formed in a trench, a field-plate dielectric layer formed on vertical sidewalls of the trench, a well region formed below the trench, a source contact and a gate contact. When the well region is in direct physical contact with the gate conductive layer, the field-plate trench FET can be used as a normally-on device working depletion mode, and when the well region is electrically isolated from the gate conductive layer by the field-plate layer, the field-plate trench FET can be used as a normally-off device working in an accumulation-depletion mode.

A field-effect transistor includes an n-type semiconductor layer that includes a Ga.sub.2O.sub.3-based single crystal and a plurality of trenches opening on one surface, a gate electrode buried in each of the plurality of trenches, a source electrode connected to a mesa-shaped region between adjacent trenches in the n-type semiconductor layer, and a drain electrode directly or indirectly connected to the n-type semiconductor layer on an opposite side to the source electrode.