A fan-out semiconductor package includes: a first interconnection member having a through-hole; a semiconductor chip disposed in the through-hole and having an active surface and an inactive surface; an encapsulant encapsulating at least portions of the first interconnection member and the inactive surface of the semiconductor chip; a second interconnection member disposed on the first interconnection member and the active surface of the semiconductor chip and including a redistribution layer electrically connected to the connection pads of the semiconductor chip; a passivation layer disposed on the second interconnection member; and an under-bump metal layer including an external connection pad formed on the passivation layer and a plurality of vias connecting the external connection pad and the redistribution layer of the second interconnection member to each other, wherein the first interconnection member includes a redistribution layer electrically connected to the connection pads of the semiconductor chip.

Mitigating surface damage of probe pads in preparation for direct bonding of a substrate is provided. Methods and layer structures prepare a semiconductor substrate for direct bonding processes by restoring a flat direct-bonding surface after disruption of probe pad surfaces during test probing. An example method fills a sequence of metals and oxides over the disrupted probe pad surfaces and builds out a dielectric surface and interconnects for hybrid bonding. The interconnects may be connected to the probe pads, and/or to other electrical contacts of the substrate. A layer structure is described for increasing the yield and reliability of the resulting direct bonding process. Another example process builds the probe pads on a next-to-last metallization layer and then applies a direct bonding dielectric layer and damascene process without increasing the count of mask layers. Another example process and related layer structure recesses the probe pads to a lower metallization layer and allows recess cavities over the probe pads.

An integrated semiconductor device having a metallic element formed between a capacitor with and a doped region.

An amplifier circuit including a semiconductor element is formed on a substrate. A protection circuit is formed including a plurality of protection diodes that are formed on the substrate and that are connected in series with each other, the protection circuit being connected to an output terminal of the amplifier circuit. A pad conductive layer is formed that at least partially includes a pad for connecting to a circuit outside the substrate. An insulating protective film covers the pad conductive layer. The insulating protective film includes an opening that exposes a partial area of a surface of the pad conductive layer, and that covers another area. A first bump is formed on the pad conductive layer on a bottom surface of the opening, and a second bump at least partially overlaps the protection circuit in plan view and is connected to a ground (GND) potential connected to the amplifier circuit.

A method of making a semiconductor device includes plating a first conductive material over a first passivation layer, wherein the first conductive material fills an opening in the first passivation layer and electrically connects to an interconnect structure. The method further includes planarizing the first conductive material, wherein a top surface of the planarized first conductive material is coplanar with a top surface of the first passivation layer. The method further includes depositing a second conductive material over the first passivation layer, wherein the second conductive material is different from the first conductive material, and the second conductive material is electrically connected to the first conductive material in the opening. The method further includes patterning the second conductive material to define a redistribution line (RDL).

An electronic device includes a wiring board and a semiconductor device on the wiring board's main surface. The semiconductor device includes a semiconductor chip on a die pad sealed by a sealing body. A back surface of the die pad is directed to a main surface of the sealing body. A back surface of the sealing body faces the main surface of the wiring board. First and second electrodes are formed on the wiring board and in the sealing body, respectively. The second electrode is disposed in the back surface of the sealing body, and is bonded to a metal plate connecting a lead and a pad. A distance between the first and second electrodes is shorter than that between the metal plate and the first electrode. The first and second electrodes overlap each other in a plan view. A capacitor is composed of the first and second electrodes.

A semiconductor device includes a semiconductor substrate SB and a wiring structure formed on a main surface of the semiconductor substrate SB. The uppermost first wiring layer among a plurality of wiring layers included in the wiring structure includes a pad PD, and the pad PD has a first region for bonding a copper wire and a second region for bringing a probe into contact with the pad. A second wiring layer that is lower by one layer than the first wiring layer among the plurality of wiring layers included in the wiring structure includes a wiring line M6 arranged immediately below the pad PD, the wiring line M6 is arranged immediately below a region other than the first region of the pad PD, and no conductor pattern in the same layer as a layer of the wiring line M6 belong is formed immediately below the first region of the pad PD.

An integrated fan-out package includes a die, an encapsulant, a seed layer, a conductive pillar, a redistribution structure, and a buffer layer. The encapsulant encapsulates the die. The seed layer and the conductive pillar are sequentially stacked over the die and the encapsulant. The redistribution structure is over the die and the encapsulant. The redistribution structure includes a conductive pattern and a dielectric layer. The conductive pattern is directly in contact with the seed layer and the dielectric layer covers the conductive pattern and surrounds the seed layer and the conductive pillar. The buffer layer is disposed over the redistribution structure. The seed layer is separate from the dielectric layer by the buffer layer, and a Young's modulus of the buffer layer is higher than a Young's modulus of the dielectric layer of the redistribution structure.

A semiconductor chip includes a redistribution layer having an improved reliability. The semiconductor chip includes a device layer on a semiconductor substrate, a wiring structure on the device layer, a cover insulating layer on the wiring structure, and a redistribution layer. The device layer includes a semiconductor device. The wiring structure includes an internal connection pad electrically connected to the semiconductor device. The cover insulating layer includes a first recess filled with a connection via connected to the internal connection pad and a second recess having a depth that is less than that of the first recess. The redistribution layer in connected to the connection via and extends along an upper surface of the cover insulating layer.

Semiconductor devices comprising a getter material are described. The getter material can be located in or over the active region of the device and/or in or over a termination region of the device. The getter material can be a conductive or an insulating material. The getter material can be present as a continuous or discontinuous film. The device can be a SiC semiconductor device such as a SiC vertical MOSFET. Methods of making the devices are also described. Semiconductor devices and methods of making the same comprising source ohmic contacts formed using a self-aligned process are also described. The source ohmic contacts can comprise titanium silicide and/or titanium silicide carbide and can act as a getter material.